@article{CTT100883068, author = {Ryota Shibukawa and Sung Lin Tsai and Takuya Hoshii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kuniyuki KAKUSHIMA}, title = {Influence of sputtering power on the switching and reliability of ferroelectric Al0.7Sc0.3N films}, journal = {Japanese Journal of Applied Physics}, year = 2022, } @inproceedings{CTT100877155, author = {R. Shibukawa and S. -L. Tsai and T. Hoshii and H. Wakbayashi and K. Tsutsui and K. Kakushima}, title = {Thermal stability of ferroelectric AlScN films}, booktitle = {}, year = 2021, }