@article{CTT100930561,
  author = {Devi Srujana Tenneti and Chihaya Mukaide and Kisuke Miyado and Torauto Yamada and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Design and Evaluation of a Dual Detection Range Single-Axis MEMS Capacitive Accelerometer with Gold Proof-Mass Structure for Suppressed Warpage},
  journal = {Japanese Journal of Applied Physics},
  year = 2025,
}

@inproceedings{CTT100938149,
  author = {Masako Okumura and Tomoyuki Kurioka and Torauto Yamada and Tatsuhiko Mori and Tso-Fu Mark Chang and Yoshihiro Miyake and Hiroyuki Ito and Masato Sone and Katsuyuki Machida},
  title = {Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information},
  booktitle = {},
  year = 2025,
}

@inproceedings{CTT100938904,
  author = {高畑 寿志 and 栗岡 智行 and 山田 虎人 and 町田 克之 and Tso-Fu Mark Chang and 三宅 美博 and 伊藤 浩之 and 曽根 正人},
  title = {Ti/Auで形成した九十九折ばねにおけるTi膜のばね形状への影響に関する検討},
  booktitle = {},
  year = 2025,
}

@inproceedings{CTT100938150,
  author = {奥村 雅子 and 栗岡 智行 and 森 達彦 and 山田 虎人 and 向出 隼人 and Chun Yi-Chen and Tso-Fu Mark Chang and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人},
  title = {静電容量型MEMS加速度センサにおける金錘の形状による反り抑制の検討},
  booktitle = {},
  year = 2025,
}

@inproceedings{CTT100917601,
  author = {Kisuke Miyado and Torauto Yamada and Devi Srujana Tenneti and Chihaya Mukaide and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100917604,
  author = {Devi Srujana Tenneti and Kisuke Miyado and Chihaya Mukaide and Torauto Yamada and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}