@article{CTT100769658, author = {Hirokazu Chiba and Masaki Hirano and Kazuhisa Kawano and Noriaki Oshima and Hiroshi Funakubo}, title = {Effect of substrate type and temperature on the growth of thin Ru films by metal organic chemical vapor deposition}, journal = {Materials Science in Semiconductor Processing}, year = 2017, } @article{CTT100702776, author = {Hiroshi Funakubo and Takahisa Shiraishi and Takahiro Oikawa and Masaki Hirano and Hirokazu Chiba and and Kazuhisa Kawano}, title = {Effect of Incubation Time on Preparation of Continuous and Flat Ru Films}, journal = {J. Vac. Sci. Technol. A.}, year = 2015, } @article{CTT100599964, author = {Masaki Hirano and Kazuhisa Kawano and Hiroshi Funakubo}, title = {Effect of incubation time on deposition behavior of Ruthenium films by MOCVD using (2,4-Dimethy lpentadienyl) (ethylcyclopentadienyl) Ruthenium}, journal = {Key Engineering Materials}, year = 2010, } @inproceedings{CTT100601058, author = {M. Ishikawa and T. Fujisawa and S. Yasui and T. Kamo and M. Hirano and T. Yamada and M. Kurosawa and T. Morita and H. Funakubo}, title = {Growth of Epitaxial Potassium Niobate Film on (100)SrRuO3/(100)SrTiO3 by Hydrothermal Method and Their Electromechanical Properties}, booktitle = {Proc. 2008 Materials Research Society Fall Meeting}, year = 2008, }