@article{CTT100902767,
  author = {Takumi Akiyama and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers  },
  journal = {Micro and Nano Engineering},
  year = 2023,
}

@inproceedings{CTT100922773,
  author = {Tomoyuki Kurioka and Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers},
  booktitle = {CPIT2024, New Method of Damage and Failure Analysis of Structural Part},
  year = 2024,
}

@inproceedings{CTT100873967,
  author = {Takumi Akiyama and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100865533,
  author = {秋⼭ 拓海 and CHIENYu-An and Chun-Yi Chen and Tso-Fu Chang and 伊藤浩之 and 町⽥克之 and 三宅美博 and 曽根正⼈},
  title = {MEMSデバイスへの応⽤に向けた⾦ニッケル合⾦の微⼩機械的特性 の評価},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100862643,
  author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale},
  booktitle = {TACT2021 International Thin Films Conference},
  year = 2021,
}

@inproceedings{CTT100860788,
  author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components},
  booktitle = {},
  year = 2021,
}