論文

• Takumi Akiyama, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers  , Micro and Nano Engineering, Vol. 21, p. 100226, Sept. 2023.  公式リンク  
  

国際会議発表 (査読有り)

• Tomoyuki Kurioka, Takumi Akiyama, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, Oct. 2024.
• Takumi Akiyama, Chun-Yi Chen, Tomoyuki Kurioka, Tso-Fu Mark Chang, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS, 48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES), Sept. 2022.
• Takumi Akiyama, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale, TACT2021 International Thin Films Conference, TACT2021 International Thin Films Conference, Nov. 2021.
• Takumi Akiyama, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components, Micro and Nano Engineering Conference 2021 (MNE2021), Sept. 2021.

国内会議発表 (査読有り)

• 秋⼭ 拓海, CHIENYu-An, Chun-Yi Chen, Tso-Fu Chang, 伊藤浩之, 町⽥克之, 三宅美博, 曽根正⼈. MEMSデバイスへの応⽤に向けた⾦ニッケル合⾦の微⼩機械的特性 の評価, 2022年応⽤物理学会春季講演会, Mar. 2022.

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