国際会議発表 (査読有り)

• Chao Yan, Ken Uchida, Shunri Oda. Design Optimization of MEMS(NEMS) Resonator by 3-D Anisotropic Thermoelastic Modeling, G-COE PICE International Symposium on Silicon Nano Devices in 2030, Oct. 2009.
• 晏超, 内田 建, 小田俊理. MEMS(NEMS) 共振器設計のための体系的最適化法, 、第70回応用物理学会学術講演会, Sept. 2009.
• Chao Yan, Ken Uchida, Shunri Oda. Design Optimization of MEMS(NEMS) Resonator by 3-D Anisotropic Thermoelastic Modeling, G-COE PICE International Symposium on Silicon Nano Devices in 2030, Oct. 2008.

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