@article{CTT100556829, author = {N. Sasaki and . Lim, J and . Hanna}, title = {Role of halogen in low-temperature growth of polycrystalline thin films by reactive thermal CVD}, journal = {J. Non-Cryst. Solids}, year = 2008, } @inproceedings{CTT100584861, author = {佐々木直人 and 半那純一}, title = {Si2H6-F2系反応性CVD法によるa-Si薄膜とTFTの作製}, booktitle = {第69回応用物理学会学術講演会講演予稿集}, year = 2008, } @inproceedings{CTT100584856, author = {Naoto Sasaki and Jun-ichi Hanna}, title = {Role of halogen in low-temperature growth of polycrystalline thin films by reactive thermal CVD}, booktitle = {Journal of Non-Crystalline Solids}, year = 2008, } @inproceedings{CTT100556828, author = {N. Sasaki and C. Lim and J. Hanna}, title = {Role of halogen in low-temperature growth of polycrystalline thin films by reactive thermal CVD}, booktitle = {}, year = 2007, }