@article{CTT100645905, author = {Eri Shinada and Takashi Nagoshi and Tso-Fu Mark Chang and Masato Sone}, title = {Crystallographic Study on Self-Annealing of Electroplated Copper at Room Temperature}, journal = {Materials Science in Semiconductor Processing.}, year = 2013, } @inproceedings{CTT100611345, author = {Eri Shinada and Tso-Fu Mark Chang and Akinobu Shibata and Masato Sone}, title = {Self-annealing at room temperature of Copper electroplating by additive free bath}, booktitle = {Advanced Metallization Conference 2010}, year = 2010, }