@inproceedings{CTT100927132, author = {H. Akatsuka and S. Watanabe and K. Doi and T. Kiyota and Y. Yamashita and W. Kikuchi and K. Ishi and Y. Ye and A. Nezu}, title = {Optical Emission Spectroscopic Measurement of Electron Temperature and Density of Oxygen ICP}, booktitle = {Proc. DPS2024}, year = 2024, } @inproceedings{CTT100925568, author = {山下 雄也 and 土居 謙太 and 清田哲司 and 叶宇晨 and 島谷和希 and 何文涛 and 羽生陽向 and 菊地航行 and 櫻井彩貴 and 根津篤 and 赤塚洋}, title = {トモグラフィック発光分光計測とアルゴン衝突輻射モデルにもとづくCF4/O2/Arプラズマの電子温度・電子密度・EEDFの位置分布診断}, booktitle = {第85回応用物理学会秋季学術講演会 講演要旨集}, year = 2024, } @inproceedings{CTT100919093, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Wataru Kikuchi and Yuchen Ye and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement}, booktitle = {Proceedings of ESCAMPIG2024}, year = 2024, } @inproceedings{CTT100927260, author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Ayaki Sakurai and Yuya Yamashita and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements}, booktitle = {Extended Abstracts of the 41st Annual Meeting of JSPF}, year = 2024, }