@article{CTT100926070, author = {Akihiro Funaki and Yohei Araki and Takahito Nishimura and Akira Yamada}, title = {Fabrication of In2S3 and In–Ga–S Thin Films via Atmosphere-Controlled Fine-Channel Mist Chemical Vapor Deposition}, journal = {Phys. Status Solidi RRL}, year = 2024, } @inproceedings{CTT100927455, author = {Akihiro Funaki and Yohei Araki and Takahito Nishimura and Akira Yamada}, title = {Deposition of (In, Ga)2S3 thin film via mist CVD method under a controlled atmosphere}, booktitle = {}, year = 2024, } @inproceedings{CTT100925920, author = {荒木 耀平 and 船木 顕広 and 西村 昂人 and 山田 明}, title = {ミストCVD法を用いた(In,Ga)2S3薄膜の作製}, booktitle = {}, year = 2024, } @inproceedings{CTT100911695, author = {荒木 耀平 and 船木 顕広 and 古牧 郁弥 and 西村 昂人 and 山田 明}, title = {ミストCVD法を用いたIn2S3薄膜の作製}, booktitle = {}, year = 2024, }