@article{CTT100932465, author = {An Li and Takuya Hoshii and Kazuo Tsutsui and Hitoshi Wakabayashi and Kuniyuki Kakushima}, title = {Interface properties of SiC MOS devices with NH3 plasma nitridation of ultrathin SiO2 interfacial layer}, journal = {Japanese Journal of Applied Physics}, year = 2025, } @article{CTT100932475, author = {An Li and Takuya Hoshii and Kazuo Tsutsui and Hitoshi Wakabayashi and Kuniyuki Kakushima}, title = {Improved electrical characteristics of 4H-SiC (0001) MOS devices with atomic layer deposited SiO2 gate dielectric with H2O plasma}, journal = {Japanese Journal of Applied Physics}, year = 2024, } @misc{CTT100932461, author = {An Li}, title = {A Study on Gate Dielectric Process for SiC MOS Structure with High Reliability}, year = , } @misc{CTT100932894, author = {An Li}, title = {A Study on Gate Dielectric Process for SiC MOS Structure with High Reliability}, year = , } @phdthesis{CTT100932461, author = {An Li}, title = {A Study on Gate Dielectric Process for SiC MOS Structure with High Reliability}, school = {東京科学大学}, year = , } @phdthesis{CTT100932894, author = {An Li}, title = {A Study on Gate Dielectric Process for SiC MOS Structure with High Reliability}, school = {東京科学大学}, year = , }