@article{CTT100929192, author = {Shinsuke Maekawa and Lander Verstraete and Hyo Seon Suh and Takehiro Seshimo and Takahiro Dazai and Kazufumi Sato and Kan Hatakeyama and Yuta Nabae and Teruaki Hayakawa}, title = {High-Fidelity Directed Self-Assembly Using Higher-chi Polystyrene-Block-Poly(Methyl Methacrylate) Derivatives for Dislocation-Free Sub-10 nm Features}, journal = {Advanced Functional Materials}, year = 2025, } @article{CTT100928723, author = {Riku Mizusaki and Shinsuke Maekawa and Takehiro Seshimo and Takahiro Dazai and Kazufumi Sato and Kan Hatakeyama-Sato and Yuta Nabae and Teruaki Hayakawa}, title = {Dual function of precisely modified hydroxy-PS-b-PMMA as neutral layers and thin films for perpendicularly oriented lamella}, journal = {RSC Applied Interfaces}, year = 2024, } @article{CTT100917451, author = {Shinsuke Maekawa and Takehiro Seshimo and Takahiro Dazai and Kazufumi Sato and Kan Hatakeyama and Yuta Nabae and Teruaki Hayakawa}, title = {Chemically tailored block copolymers for highly reliable sub-10-nm patterns by directed self-assembly}, journal = {Nature Communications}, year = 2024, } @misc{CTT100929765, author = {前川伸祐}, title = {次世代半導体微細加工に向けた強偏析性PS-b-PMMA誘導体の開発に関する研究}, year = , } @misc{CTT100929762, author = {前川伸祐}, title = {次世代半導体微細加工に向けた強偏析性PS-b-PMMA誘導体の開発に関する研究}, year = , } @misc{CTT100929767, author = {前川伸祐}, title = {次世代半導体微細加工に向けた強偏析性PS-b-PMMA誘導体の開発に関する研究}, year = , } @misc{CTT100929888, author = {早川晃鏡 and 前川伸祐 and 上原綾太 and 瀬下 武広  and 太宰 尚宏 }, title = {エッチングマスクパターンの製造方法及びエッチングマスクパターン形成用樹脂組成物}, howpublished = {公開特許}, year = 2024, month = {}, note = {特願2024-067050(2024/04/17), 特開2024-159590(2024/11/08)} } @misc{CTT100929891, author = {早川晃鏡 and 前川伸祐 and 上原綾太 and 瀬下 武広 and 宮城 賢 and 太宰 尚宏}, title = {エッチングマスクパターン形成用樹脂組成物、及びエッチングマスクパターンの製造方法}, howpublished = {公開特許}, year = 2024, month = {}, note = {特願2024-066934(2024/04/17), 特開2024-160688(2024/11/14)} } @misc{CTT100932495, author = {早川晃鏡 and 前川伸祐 and 水嵜陸 and 上原 卓也 and 太宰 尚宏}, title = {相分離構造を含む構造体の製造方法、及び組成物}, howpublished = {公開特許}, year = 2025, month = {}, note = {特願2023-102849(2023/06/22), 特開2025-002575(2025/01/09)} } @misc{CTT100932491, author = {早川晃鏡 and 前川伸祐 and 水嵜陸 and 上原 卓也 and 太宰 尚宏 }, title = {ブロックコポリマー、下地剤、相分離構造形成用組成物成用樹脂組成物、 及び相分離構造を含む構造体の製造方法}, howpublished = {公開特許}, year = 2025, month = {}, note = {特願2023-102848(2023/06/22), 特開2025-002574(2025/01/09)} } @misc{CTT100929890, author = {早川晃鏡 and 前川伸祐 and 上原綾太 and 瀬下 武広  and 太宰 尚宏}, title = {エッチングマスクパターン形成用樹脂組成物、及びエッチングマスクパターンの製造方法}, howpublished = {公開特許}, year = 2024, month = {}, note = {特願2023-073814(2023/04/27), 特開2024-158543(2024/11/08)} } @phdthesis{CTT100929765, author = {前川伸祐}, title = {次世代半導体微細加工に向けた強偏析性PS-b-PMMA誘導体の開発に関する研究}, school = {東京工業大学}, year = , } @phdthesis{CTT100929762, author = {前川伸祐}, title = {次世代半導体微細加工に向けた強偏析性PS-b-PMMA誘導体の開発に関する研究}, school = {東京工業大学}, year = , } @phdthesis{CTT100929767, author = {前川伸祐}, title = {次世代半導体微細加工に向けた強偏析性PS-b-PMMA誘導体の開発に関する研究}, school = {東京工業大学}, year = , }