@article{CTT100658723, author = {DARYOUSH ZADEH and Hiroshi Oomine and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and Hiroshi Nohira and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {La2O3/Ino.53Ga.0.47As metal-oxide-semiconductor capacitor with low interface state density using TiN/W gate alectrode}, journal = {Solid-State Electronics}, year = 2013, } @inproceedings{CTT100673379, author = {ザデハサン ダリユーシユ and 大嶺洋 and 角嶋邦之 and 岩井洋}, title = {Highly Scalable La2O3/InGaAs Gate Stack with Low Interface State Density}, booktitle = {}, year = 2014, } @inproceedings{CTT100673380, author = {大嶺洋 and ザデハサン ダリユーシユ and 角嶋邦之 and 岩井洋}, title = {La2O3 gate dielectrics for InGaAs channel using ALD process}, booktitle = {}, year = 2014, } @inproceedings{CTT100673383, author = {ザデハサン ダリユーシユ and 大嶺洋 and 岩井洋}, title = {低界面準位とsub-nm CETを有するLa2O3/ In0.53Ga0.47Asゲートスタックの実現}, booktitle = {}, year = 2014, } @inproceedings{CTT100673418, author = {ザデハサン ダリユーシユ and 大嶺洋 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {低界面準位とsub-nm CETを有するLa2O3/ In0.53Ga0.47Asゲートスタックの実現}, booktitle = {}, year = 2014, } @inproceedings{CTT100673467, author = {大嶺洋 and ザデハサン ダリユーシユ and 角嶋邦之 and 西山彰 and 杉井信之 and 片岡好則 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {La2O3/ InGaAs界面ラフネスに及ぼすALDプロセスの影響}, booktitle = {}, year = 2014, } @inproceedings{CTT100672397, author = {ダリューシュザデ and Hiroshi Oomine and Kuniyuki KAKUSHIMA and HIROSHI IWAI}, title = {Highly Scalable La2O3 /InGaAs Gate Stack with Low Interface State Density}, booktitle = {}, year = 2014, } @inproceedings{CTT100672961, author = {Hiroshi Oomine and DARYOUSH ZADEH and Kuniyuki KAKUSHIMA and Akira Nishiyama and Nobuyuki Sugii and 片岡好則 and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Effect of pretreatment for high-/k//InGaAs interface property}, booktitle = {}, year = 2014, } @inproceedings{CTT100672372, author = {DARYOUSH ZADEH and Hiroshi Oomine and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Low DitHigh-k/In0.53Ga0.47As Gate Stack with CET down to 0.73 nm and Thermally Stable Silicide Contact by Suppression of Interfacial Reaction}, booktitle = {}, year = 2014, } @inproceedings{CTT100669175, author = {Hiroshi Oomine and DARYOUSH ZADEH and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Electrical characterization of atomic layer deposited La2O3 films on In0.53Ga0.47AAs substrates}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100831028, author = {DARYOUSH ZADEH and Hiroshi Oomine and Yuya Suzuki and Kuniyuki KAKUSHIMA and Hiroshi Nohira and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {La2O3/Ino.53Ga.0.47As metal-oxide-semiconductor capacitor with low interface state density using TiN/W gate alectrode}, booktitle = {}, year = 2013, } @inproceedings{CTT100658363, author = {Hiroshi Oomine and ダリューシュザデ and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {La-Oxide Gate Dielectrics for InGaAs Substrates formed by Chemical Vapor Deposition}, booktitle = {}, year = 2013, } @inproceedings{CTT100658364, author = {Hiroshi Oomine and ダリューシュザデ and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {La-Oxide Gate Dielectrics for InGaAs Substrates formed by Chemical Vapor Deposition}, booktitle = {}, year = 2013, } @inproceedings{CTT100660886, author = {ダリューシュザデ and Hiroshi Oomine and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Scalable La-silicate Gate Dielectric on InGaAs Substrate with High Thermal Stability and Low Interface State Density}, booktitle = {}, year = 2013, } @inproceedings{CTT100662340, author = {鹿国強 and 大嶺洋 and ザデハサン ダリユーシユ and 角嶋邦之 and 西山彰 and 杉井信之 and 片岡好則 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {ALD堆積条件によるLa2O3/In0.53Ga0.47Asキャパシタの電気特性への影響}, booktitle = {}, year = 2013, } @inproceedings{CTT100658331, author = {Yuya Suzuki and ダリューシュザデ and Hiroshi Oomine and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface Engineering of La2O3/InGaAs Capacitors with High Temperature Stability}, booktitle = {}, year = 2013, }