@book{CTT100846136, author = {Tso-Fu Mark Chang and Hideaki Nakajima and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi and Masato Sone}, title = {Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers}, publisher = {IFSA PUBLISHING, S.L.}, year = 2021, } @article{CTT100751408, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices}, journal = {Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems}, year = 2017, } @inproceedings{CTT100881483, author = {Masato Sone and Hitomi Watanabe and Kyotaro Nitta and Hideaki Nakajima and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Daisuke Yamane and Hiroyuki Ito and Katsuyuki. Machida and Yoshihiro Miyake and Tso-Fu Mark Chang}, title = {A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer}, booktitle = {}, year = 2022, } @inproceedings{CTT100772124, author = {Masato Sone and Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu}, title = {EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER}, booktitle = {8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"}, year = 2018, } @inproceedings{CTT100771791, author = {中島 英亮 and Tso-Fu Mark Chang and Chun-Yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 年吉 洋 and 益 一哉 and 曽根 正人}, title = {MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討}, booktitle = {第79回応用物理学会秋季学術講演会}, year = 2018, } @inproceedings{CTT100769739, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100768308, author = {HIdeaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and HIroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating}, booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan}, year = 2018, } @inproceedings{CTT100758968, author = {中島英亮 and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 年吉洋 and 益 ⼀哉 and 曽根 正⼈}, title = {電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価}, booktitle = {応用物理学会第65回春季講演会}, year = 2018, } @inproceedings{CTT100751726, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition}, booktitle = {}, year = 2017, } @inproceedings{CTT100735592, author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices}, booktitle = {IEEE-NEMS 2017}, year = 2017, } @inproceedings{CTT100735890, author = {中島 英亮 and Chang Tso-Fu Mark and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人}, title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価(2)}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, } @inproceedings{CTT100735889, author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 中島 英亮 and 寺西 美波 and 陳 君怡 and Chang Tso-Fu Mark and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之}, title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価(1)}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, } @inproceedings{CTT100734201, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hideaki Nakajima and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu}, title = {Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices}, booktitle = {}, year = 2016, }