@article{CTT100930561, author = {Devi Srujana Tenneti and Chihaya Mukaide and Kisuke Miyado and Torauto Yamada and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Design and Evaluation of a Dual Detection Range Single-Axis MEMS Capacitive Accelerometer with Gold Proof-Mass Structure for Suppressed Warpage}, journal = {Japanese Journal of Applied Physics}, year = 2025, } @inproceedings{CTT100941057, author = {山田 虎人 and 向出 千隼 and 栗岡 智行 and 町田 克之 and Chen Chun-Yi and Chang Tso-Fu Mark and 曽根 正人 and 三宅 美博 and 伊藤 浩之}, title = {長期振動試験によるAu錘1軸MEMS加速度センサの耐久性評価}, booktitle = {第73回応用物理学会春季学術講演会}, year = 2026, } @inproceedings{CTT100941058, author = {向出 千隼 and 山田 虎人 and 栗岡 智行 and 町田 克之 and Chun-Yi Chen and Chang Tso-Fu Mark and 三宅 美博 and 曽根 正人 and 伊藤 浩之}, title = {ワイドレンジAu錘1軸MEMS加速度センサにおける検出範囲の検討}, booktitle = {第73回応用物理学会春季学術講演会}, year = 2026, } @inproceedings{CTT100941060, author = {高畑 寿志 and 栗岡 智行 and 山田 虎人 and 向出 千隼 and 町田 克之 and Chen Chun-Yi and Chang Tso-Fu Mark and 三宅 美博 and 伊藤 浩之 and 曽根 正人}, title = {Ti/Au積層九十九折ばねのばね定数に対するTi/Au膜厚の影響評価}, booktitle = {第73回応用物理学会春季学術講演会}, year = 2026, } @inproceedings{CTT100941062, author = {奥村 雅子 and 栗岡 智行 and 山田 虎人 and 森 達彦 and 向出 千隼 and Chen Chun-Yi and Chang Tso-Fu Mark and 三宅 美博 and 伊藤 浩之 and 町田 克之 and 曽根 正人}, title = {円形金錘1軸静電容量型MEMS加速度センサの構造とデバイス特性評価}, booktitle = {第73回応用物理学会春季学術講演会}, year = 2026, } @inproceedings{CTT100917604, author = {Devi Srujana Tenneti and Kisuke Miyado and Chihaya Mukaide and Torauto Yamada and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing}, booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)}, year = 2024, } @inproceedings{CTT100917601, author = {Kisuke Miyado and Torauto Yamada and Devi Srujana Tenneti and Chihaya Mukaide and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing}, booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)}, year = 2024, }