@book{CTT100835470, author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect}, publisher = {MDPI}, year = 2020, } @book{CTT100840219, author = {Takashi Nagoshi and Takahisa Yasuda and Nao Otaki and Masaki Tahara and Hideki Hosoda and Masato Sone}, title = {Evaluation of the Shape Memory Effect by Micro-Compression Testing of Single Crystalline Ti-27Nb Ni-Free Alloy}, publisher = {MDPI Books}, year = 2020, } @book{CTT100791877, author = {Takashi Nagoshi and Tso-Fu Mark Chang}, title = {Evaluation Methods of Mechanical Properties of Micro-Sized Specimens}, publisher = {IntechOpen}, year = 2019, } @book{CTT100791876, author = {Chun-Yi Chen and Masaharu Yoshiba and Haochun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida}, title = {Pulse-Current Electrodeposition of Gold}, publisher = {IntechOpen}, year = 2019, } @book{CTT100791875, author = {Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida}, title = {Electrodeposition of Gold Alloys and the Mechanical Properties}, publisher = {IntechOpen}, year = 2019, } @book{CTT100748622, author = {Tso-Fu Mark Chang and Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors}, publisher = {IFSA Publishing}, year = 2017, } @book{CTT100701834, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Size Effect on the Electrodeposited Nickel Investigated by Micro-compression Test}, publisher = {Springer}, year = 2016, } @book{CTT100683462, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Masato Sone}, title = {Chapter 10: Mechanical Property Evaluation of Electrodeposited Nanocrystalline Metals by Micro-testing}, publisher = {INTECH}, year = 2015, } @article{CTT100841236, author = {Sari Yanagida and Takashi Nagoshi and Akiyoshi Araki and Tso-Fu Mark Chang and Chun-Yi Chen and Equo Kobayashi and Akira Umise and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Heterogeneous Deformation Behavior of Cu-Ni-Si Alloy by Micro-Size Compression Testing}, journal = {Crystals}, year = 2020, } @article{CTT100823691, author = {Kosuke Suzuki and Tso-Fu Mark Chang and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Sample Geometry Effect on Mechanical Property of Gold Micro-Cantilevers by Micro-Bending Test}, journal = {MRS Communications}, year = 2020, } @article{CTT100813420, author = {Takashi Nagoshi and Takahisa Yasuda and Nao Otaki and Masaki Tahara and Hideki HOSODA and Masato Sone}, title = {Evaluation of the Shape Memory Effect by Micro-Compression Testing of Single Crystalline Ti-27Nb Ni-Free Biomedical Alloy}, journal = {Materials}, year = 2020, } @article{CTT100803948, author = {Hao-Chun Tang and Tso-Fu Mark Chang and Yaw-Wang Chai and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect}, journal = {Metals}, year = 2019, } @article{CTT100800512, author = {Keisuke Asano and Tso-Fu Mark Chang and Hao-Chun Tang and Takashi Nagoshi and Chun-Yi Chen and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components}, journal = {ECS Journal of Solid State Science and Technology}, year = 2019, } @article{CTT100793994, author = {Tso-Fu Mark Chang and Hikaru Kinashi and Takashi Nagoshi and Tatsuo Sato and Masato Sone}, title = {Impurity study of copper film fabricated by electroplating with supercritical carbon dioxide emulsified electrolyte}, journal = {Copper and Copper Alloy}, year = 2019, } @article{CTT100793728, author = {Takahiro Yamamoto and Kengo Igawa and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Osamu Kudo and Ryu Maeda and Masato Sone}, title = {Effects of Current Density on Mechanical Properties of Electroplated Nickel with High Speed Sulfamate Bath}, journal = {Microelectronic Engineering}, year = 2019, } @article{CTT100766193, author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications}, journal = {Microelectronic Engineering}, year = 2018, } @article{CTT100759221, author = {Hao-Chun Tang and Ken Hashigata and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide}, journal = {Surface and Coatings Technology}, year = 2018, } @article{CTT100758009, author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices}, journal = {Journal of The Electrochemical Society}, year = 2018, } @article{CTT100757335, author = {Kengo Igawa and Tso-Fu Mark Chang and Chun-Yi Chen and Akira Umise and Takashi Nagoshi and Masaki Tahara and Tomonari Inamura and Hideki Hosoda and Volodymyr A. Chernenko and Masato Sone}, title = {Micro-Compression Study of Ni-Fe(Co)-Ga Magnetic Shape Memory Alloy for MEMS Sensors}, journal = {Proceedings of IEEE Sensors 2017}, year = 2017, } @article{CTT100742124, author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices}, journal = {Microelectronic Engineering}, year = 2017, } @article{CTT100742125, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures}, journal = {Materials Letters}, year = 2017, } @article{CTT100736023, author = {Hao-Chun Tang and Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices}, journal = {Journal of The Electrochemical Society}, year = 2017, } @article{CTT100734738, author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Tensile Tests of Micro-Specimens Made of Electroplated Gold}, journal = {Microelectronics Engineering}, year = 2017, } @article{CTT100712601, author = {Sari Yanagida and Akiyoshi Araki and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Equo Kobayashi and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Deformation Behaviors of Pure Cu and Cu-Ni-Si Alloy Evaluated by Micro-Tensile Testing}, journal = {Materials Transactions}, year = 2016, } @article{CTT100716349, author = {Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide}, journal = {Electrochemistry Communications}, year = 2016, } @article{CTT100714592, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Masato Sone}, title = {Evaluations of Mechanical Properties of Electrodeposited Nickel Film by Using Micro-Testing Method}, journal = {MATERIALS TRANSACTIONS}, year = 2016, } @article{CTT100704360, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression}, journal = {Materials Transactions}, year = 2016, } @article{CTT100703226, author = {Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Pulse Electroplating of Ultra-Fine Grained Au Films with High Compressive Strength}, journal = {Electrochemistry Communications}, year = 2016, } @article{CTT100701137, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Effect of Annealing on Mechanical Properties of Nickel Electrodeposited Using Supercritical CO2 Emulsion Evaluated by Micro-Compression Test}, journal = {Microelectronics Engineering}, year = 2016, } @article{CTT100698249, author = {鄭伯倫 and 名越貴志 and TSO-FUMARK CHANG and 細田秀樹 and 里達雄 and 曽根正人}, title = {微小圧縮試験によるAl-Mg合金双結晶の変形挙動評価}, journal = {日本金属学会誌}, year = 2016, } @article{CTT100699101, author = {曽根正人 and ツォ-フ マーク チャン and 名越貴志 and 陳君怡}, title = {超臨界二酸化炭素を用いた次世代MEMS電鋳技術と微小材料試験}, journal = {化学工業}, year = 2016, } @article{CTT100697517, author = {名越貴志 and Tso-Fu Mark Chang and 曽根正人}, title = {微小材料試験を用いた電析ニッケル薄膜の力学的特性評価}, journal = {日本金属学会誌}, year = 2016, } @article{CTT100691308, author = {Kimiko Yoshida and Fumihiro Wakai and Norimasa Nishiyama and Risako Sekine and Yutaka Shinoda and Takashi Akatsu and Takashi Nagoshi and Masato Sone}, title = {Large increase in fracture resistance of stishovite with crack extension less than one micrometer}, journal = {Scientific Reports}, year = 2015, } @article{CTT100684637, author = {Mana Tanabe and Tso-Fu Mark Chang and Takashi Nagoshi and Sung-Ting Chung and Wei-Ta Tsai and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Mechanical Properties of Sn Electrodeposited in Supercritical CO2 Emulsions Using Micro-Compression Test}, journal = {Microelectronics Engineering}, year = 2015, } @article{CTT100708364, author = {Yoshiaki Kihara and Takashi Nagoshi and Tso-Fu Mark Chang and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Tensile Behavior of Micro-Sized Specimen made of Single Crystalline Nickel}, journal = {Materials Letters}, year = 2015, } @article{CTT100681578, author = {Yoshiaki Kihara and Takashi Nagoshi and Tso-Fu Mark Chang and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Tensile Behavior of Micro-Sized Specimen Fabricated from Nanocrystalline Nickel Film}, journal = {Microelectronics Engineering,}, year = 2015, } @article{CTT100678214, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Size effect on the Electrodeposited Nickel Investigated by Micro-Compression Test}, journal = {4th WMRIF Workshop for Young Scientists}, year = 2014, } @article{CTT100669338, author = {名越貴志 and 木梨光 and 武藤雅英 and Tso-Fu Mark Chang and 里達雄 and 曽根正人}, title = {超臨界二酸化炭素エマルション中で電気めっきされた銅皮膜のマイクロ圧縮試験による力学的特性評価}, journal = {銅と銅合金}, year = 2014, } @article{CTT100670018, author = {Takashi Nagoshi and Akinobu Shibata and Yoshikazu Todaka and Tatsuo Sato and Masato Sone}, title = {Mechanical behavior of a microsized pillar fabricated from ultrafine-grained ferrite evaluated by a microcompression test}, journal = {Acta Materialia}, year = 2014, } @article{CTT100668489, author = {Hikaru Kinashi and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Mechanical Properties of Cu Electroplated in Supercritical CO2 Emulsion Evaluated by Micro-Compression Test}, journal = {Microelectronics Engineering}, year = 2014, } @article{CTT100668115, author = {Tetsuya Shimizu and Yuma Ishimoto and Tso-Fu Mark Chang and Hikaru Kinashi and Takashi Nagoshi and Tatsuo Sato and Masato Sone}, title = {Cu Wiring into Nano-Scale Holes by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte with a Continuous Flow Reaction System}, journal = {The Journal of Supercritical Fluids}, year = 2014, } @article{CTT100665168, author = {Takashi Nagoshi and Masahide Mutoh and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Sample size effect of electrodeposited nickel with sub-10 nm grain size}, journal = {Materials Letters}, year = 2014, } @article{CTT100633209, author = {Akinobu Shibata and Takashi Nagoshi and Masato Sone and Yakichi Higo}, title = {Micromechanical characterization of deformation behavior in ferrous lath martensite}, journal = {Journal of Alloys and Compounds}, year = 2013, } @article{CTT100648256, author = {Masahide Mutoh and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Micro-compression test using non-tapered micro-pillar of electrodeposited Cu}, journal = {Microelectronic Engineering}, year = 2013, } @article{CTT100648184, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Mechanical Properties of Nickel Fabricated by Electroplating with Supercritical CO2 Emulsion Evaluated by Micro-Compression Test Using Non-Tapered Micro-sized Pillar}, journal = {Microelectronic Engineering}, year = 2013, } @article{CTT100645905, author = {Eri Shinada and Takashi Nagoshi and Tso-Fu Mark Chang and Masato Sone}, title = {Crystallographic Study on Self-Annealing of Electroplated Copper at Room Temperature}, journal = {Materials Science in Semiconductor Processing.}, year = 2013, } @article{CTT100639408, author = {Tso-Fu Mark Chang and Takashi Nagoshi and Chiemi Ishiyama and Tatsuo Sato and Masato Sone}, title = {Intact Ultrathin Ni Films Fabricated by Electroplating with Supercritical CO2 Emulsion}, journal = {Applied Mechanics and Materials}, year = 2013, } @article{CTT100639409, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Micro-compression test of nanocrystalline Nickel deposited by supercritical carbon dioxide emulsion}, journal = {Applied Mechanics and Materials}, year = 2013, } @article{CTT100640146, author = {Hirohito Imamura and Takashi Nagoshi and Akari Yoshida and Tso-Fu Mark Chang and Susumu Onaka and Masato Sone}, title = {Evaluation of anisotropic structure in electrodeposited Ni film using micro-sized cantilever}, journal = {Microelectronic Engineering.}, year = 2012, } @article{CTT100612035, author = {Takashi Nagoshi and Akinobu Shibata and Masato Sone}, title = {Mechanical Behavior on Micro-compression Test in Ultra-low Carbon Steel Produced by High Pressure Torsion}, journal = {MRS Proceedings}, year = 2011, } @article{CTT100610513, author = {Akinobu Shibata and Takashi Nagoshi and Masato Sone and Shigekazu Morito and YAKICHI HIGO}, title = {Evaluation of the block boundary and sub-block boundary strengths of ferrous lath martensite using a micro-bending test}, journal = {Materials Science and Engineering A}, year = 2010, } @inproceedings{CTT100845540, author = {曽根 正人 and Tso-Fu Mark Chang and 名越貴志 and 町田 克之 and 山根 大輔 and 伊藤浩之 and 益 一哉}, title = {医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価}, booktitle = {日本金属学会 2021年春季講演大会}, year = 2021, } @inproceedings{CTT100799992, author = {Masato Sone and Tso-Fu Mark Chang and Takashi Nagoshi}, title = {Recent progress in micro-mechanical property evaluation of electrodeposited metals for MEMS applications}, booktitle = {ACEPS10-2019}, year = 2019, } @inproceedings{CTT100802634, author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test}, booktitle = {45th International Conference on Micro & Nano Engineering (MNE2019)}, year = 2019, } @inproceedings{CTT100791879, author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test}, booktitle = {}, year = 2019, } @inproceedings{CTT100794652, author = {Masato Sone and Hao-Chun Tang and Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu}, title = {Mechanical properties of electrodeposited gold-copper alloy by micro-compression test}, booktitle = {The 2nd International Conference on Material Strength and Applied Mechanics}, year = 2019, } @inproceedings{CTT100790678, author = {鈴木 康介 and Ken Hashigata and 浅野 啓介 and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人}, title = {微小曲げ試験による金材料の機械的強度のサンプル形状効果}, booktitle = {}, year = 2019, } @inproceedings{CTT100772110, author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone.}, title = {Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever}, booktitle = {IUMRS-ICA 2018}, year = 2018, } @inproceedings{CTT100769744, author = {Takahiro Yamamoto and Kengo Igawa and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Osamu Kudo and Ryu Maeda and Masato Sone}, title = {Micro-Mechanical Properties of Defect-Free Nickel Electrodeposited at a High Growth Rate toward MEMS Devices}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100772182, author = {Tso-Fu Mark Chang and Hao-chun Tang and Kyotaro Nitta and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Electrodeposition of High Strength Au-Cu Alloys for MEMS Device}, booktitle = {2018 International Conference on Solid State Devices and Materials (SSDM2018)}, year = 2018, } @inproceedings{CTT100769737, author = {Keisuke Asano and Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100768386, author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices}, booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan}, year = 2018, } @inproceedings{CTT100768649, author = {Masato Sone and Hao-Chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu}, title = {Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer}, booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan}, year = 2018, } @inproceedings{CTT100758966, author = {浅野 啓介 and TangHao-Chun and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈}, title = {電析制御による微⼩⾦カンチレバーの曲げ特性の改善}, booktitle = {応用物理学会第65回春季講演会}, year = 2018, } @inproceedings{CTT100758971, author = {⼭本 貴⼤ and 井川 健吾 and Chun-Yi Chen and Tso-Fu Mark Chang and 名越 貴志 and 工藤 緯 and 前田 龍 and 曽根正人}, title = {スルファミン酸ハイスピード浴を⽤いて電気めっきしたニッケル膜の機械的特性に及ぼす電流密度の影響}, booktitle = {応用物理学会第65回春季講演会}, year = 2018, } @inproceedings{CTT100751722, author = {Kengo Igawa and Tso-Fu Mark Chang and Chun-Yi Chen and Akira Umise and Takashi Nagoshi and Masaki Tahara and Tomonari Inamura and Hideki HOSODA and Volodymyr A. Chernenko and Masato Sone}, title = {Mechanical Property Evaluation in Superelastic Ni-Fe(Co)-Ga Micro-Pillar}, booktitle = {}, year = 2017, } @inproceedings{CTT100751725, author = {Keisuke Asano and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions}, booktitle = {}, year = 2017, } @inproceedings{CTT100751720, author = {Masato Sone and Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu}, title = {Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers}, booktitle = {}, year = 2017, } @inproceedings{CTT100751718, author = {Tso-Fu Mark Chang and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2}, booktitle = {}, year = 2017, } @inproceedings{CTT100751436, author = {Kengo Igawa and Tso-Fu Mark Chang and Chun-Yi Chen and Akira Umise and Takashi Nagoshi and Masaki Tahara and Tomonari Inamura and Hideki Hosoda and Volodymyr A. Chernenko and Masato Sone}, title = {Mechanical Property Evaluation of NiFeCoGa Magnetic Shape Memory Alloys by Micro-Compression Tests for MEMS Sensors}, booktitle = {}, year = 2017, } @inproceedings{CTT100745655, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test}, booktitle = {MNE2017}, year = 2017, } @inproceedings{CTT100745651, author = {Keisuke Asano and Hao-Chun Tang and Chun-yi Chen and Takashi Nagoshi and Tso-fu Mark Chang and Daisuke Yamane and Kazuya Masu and Masato Sone}, title = {Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test}, booktitle = {MNE2017}, year = 2017, } @inproceedings{CTT100723391, author = {浅野 啓介 and TangHao-Chun and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志}, title = {微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価}, booktitle = {第33回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100723360, author = {葭葉将治 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志}, title = {高感度MEMS加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価}, booktitle = {第33回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100723362, author = {柳田佐理 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 町田克之 and 益一哉 and 曽根正人 and 名越貴志}, title = {微小引張試験片を用いたMEMS用金めっき材料の機械的特性の評価}, booktitle = {第33回「センサ・マイクロマシンと応用システム」シンポジウム}, year = 2016, } @inproceedings{CTT100710913, author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100710958, author = {Takashi Nagoshi and Takahisa Yasuda and Sari Yanagida and Nao Okano and Tso-Fu Mark Chang and Chun-Yi Chen and Masaki Tahara and Tomonari Inamura and Hideki Hosoda and Masato Sone}, title = {Mechanical Behavior of Ti-27Nb Ni-Free Biomedical Shape-Memory Alloy Evaluated by Temperature Variable Micro-Compression Test}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100710914, author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Mechanical Behaviour of Electroplated Gold Evaluated by Micro-Tensile Test for Application in MEMS Accelerometer}, booktitle = {MNE2016, 42nd Micro& Nano Engineering}, year = 2016, } @inproceedings{CTT100723397, author = {Bourin Tei and Takashi Nagoshi and Tso-Fu Mark Chang and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Effects of Grain Boundary on Mechanical Properties of Aluminum Alloy Observed by Bi-crystal Micro Compression Test}, booktitle = {The 9th Pacific Rim International Conference on Advanced Materials and Processing (PRICM9)}, year = 2016, } @inproceedings{CTT100713019, author = {Sari Yanagida and Akiyoshi Araki and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Equo Kobayashi and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Precipitation Strengthening Behavior of Micro-Specimens Made of Cu-Ni-Si Alloy}, booktitle = {The 9th Pacific Rim International Conference on Advanced Materials and Processing (PRICM9)}, year = 2016, } @inproceedings{CTT100700960, author = {柳田 佐理 and 荒木 章好 and TSO-FU MARK CHANG and 陳 君怡 and 名越 貴志 and 小林 郁夫 and 細田 秀樹 and 里 達雄 and 曽根 正人}, title = {微小圧縮試験及び微小引張試験によるMEMS用Cu-Ni-Si合金の機械的特性評価}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100700963, author = {鄭 伯倫 and 名越 貴志 and TSO-FU MARK CHANG and 細田 秀樹 and 里 達雄 and 曽根 正人}, title = {マイクロサイズ圧縮試験を用いたAl合金の変形挙動における結晶粒界の研究}, booktitle = {第63回応用物理学会春季学術講演会}, year = 2016, } @inproceedings{CTT100697691, author = {Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Properties of Electrodeposited Gold Thin Films}, booktitle = {TACT 2015 International Thin Films Conference}, year = 2015, } @inproceedings{CTT100692511, author = {Sari Yanagida and Akiyoshi Araki and Tso-Fu Mark Chang and Chun-Yi Chen and Nagoshi Takashi and Equo Kobayashi and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Mechanical Properties of Cu-Ni-Si alloy Evaluated by Micro-Tensile Test for Application in MEMS}, booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials}, year = 2015, } @inproceedings{CTT100694935, author = {Sari Yanagida and Akiyoshi Araki and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Equo Kobayashi and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {The Precipitation Strengthening Behavior of Cu-Ni-Si Alloy used as Micro-Components Evaluated by Micro-Tensile Tests}, booktitle = {MNE2015}, year = 2015, } @inproceedings{CTT100693802, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Masato Sone}, title = {Effect of Annealing on Mechanical Properties of Nickel Film Electrodeposited Using Supercritical CO2 Emulsion Evaluated by Micro-Compression Test}, booktitle = {MNE2015, The 41th International Conference on Micro and Nano Engineering}, year = 2015, } @inproceedings{CTT100696385, author = {Tso-Fu Mark Chang and Takashi Nagoshi and Chun-Yi Chen and Yung-Jung Hsu and Masato Sone}, title = {Characterization and Fabrication of the Metals and Metal Oxides Electrodeposited at High Pressure with Supercritical Carbon Dioxide [Keynote]}, booktitle = {}, year = 2015, } @inproceedings{CTT100676651, author = {Yoshiaki Kihara and Takashi Nagoshi and Tso-Fu Mark Chang and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Mechanical property of Nickel Film Electrodeposited with Supercritical Carbon Dioxide Emulsion}, booktitle = {}, year = 2014, } @inproceedings{CTT100676558, author = {Mana Tanabe and Tso-Fu Mark Chang and Takashi Nagoshi and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Mechanical Properties of Sn Electrodeposited in Supercritical CO2 Emulsion Using Micro-Compression Test}, booktitle = {The 40th International Conference on Micro and Nano Engineering, MNE2014}, year = 2014, } @inproceedings{CTT100676561, author = {Yoshiaki Kihara and Takashi Nagoshi and Tso-Fu Mark Chang and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Tensile Behavior of Micro-Sized Specimen Fabricated from Nanocrystalline Nickel Film}, booktitle = {The 40th International Conference on Micro and Nano Engineering, MNE2014}, year = 2014, } @inproceedings{CTT100676559, author = {Bourin Tei and Takashi Nagoshi and Tso-Fu Mark Chang and Hideki Hosoda and Tatsuo Sato and Masato Sone}, title = {Deformation Behavior of Al-Mg Alloy Bi-Crystal Micro-Pillar Evaluated by Micro-Compression Test}, booktitle = {The 40th International Conference on Micro and Nano Engineering, MNE2014}, year = 2014, } @inproceedings{CTT100673133, author = {Tso-Fu Mark Chang and Wei-Hao Lin and Takashi Nagoshi and Nao Shinoda and Yung-Jung Hsu and Tatsuo Sato and Masato Sone}, title = {Metals and Metal Oxides Electrodeposited with Supercritical Carbon Dioxide Emulsified Electrolyte}, booktitle = {}, year = 2014, } @inproceedings{CTT100665970, author = {Yoshiaki Kihara and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Micro-Tensile Test Using Micro-Sized Gripper and Specimen Fabricated by FIB}, booktitle = {IUMRS-ICEM 2014,International Union of Materials Research Societies - International Conference on Electronic Materials 2014}, year = 2014, } @inproceedings{CTT100665562, author = {Masato Sone and Tetsuya Shimizu and Tso-Fu Mark Chang and Nao Shinoda and Takashi Nagoshi and Tatsuo Sato}, title = {Nanoscale Cu Wiring by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte toward 3D Integrated Circuits (Invited Lecture)}, booktitle = {IUMRS-ICEM 2014}, year = 2014, } @inproceedings{CTT100659270, author = {名越貴志 and 木梨光 and 武藤雅英 and Tso-Fu Mark Chang and 里達雄 and 曽根正人}, title = {マイクロ圧縮試験を用いた銅めっき膜の力学的特性評価}, booktitle = {日本銅学会第53回講演大会}, year = 2013, } @inproceedings{CTT100658586, author = {Masato Sone and Tetsuya Shimizu and Tso-Fu Mark Chang and Yuma Ishimoto and Hikaru Kinashi and Takashi Nagoshi and Tatsuo Sato}, title = {Nanoscale Wiring By Cu Electrodeposition in Supercritical Carbon Dioxide (Invited Lecture)}, booktitle = {ECS}, year = 2013, } @inproceedings{CTT100659620, author = {Tso-Fu Mark Chang and Takashi Nagoshi and Nao Shinoda and HIkaru Kinashi and Tatsuo Sato and Masato Sone}, title = {Application of Supercritical CO2 in Electroplating of Ni and Cu}, booktitle = {SuperGreen 2013,The 8th International Conference on Supercritical Fluids}, year = 2013, } @inproceedings{CTT100658137, author = {Hikaru Kinashi and Tetsuya Shimizu and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Glow discharge optical emission spectroscopic study of Cu film fabricated by electrodepostion using supercritical CO2 emulsified electrolyte}, booktitle = {TACT2013}, year = 2013, } @inproceedings{CTT100658459, author = {Hikaru Kinashi and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Mechanical Strength of Cu Electroplated in Supercritical CO2 Emulsion Using Micro-Compression Test}, booktitle = {MNE2013}, year = 2013, } @inproceedings{CTT100658461, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Effect of Pressure on Mechanical Properties of Nickel Film Electrodeposited Using Supercritical CO2 Emulsion Evaluated by Micro-Compression Test}, booktitle = {MNE2013}, year = 2013, } @inproceedings{CTT100659618, author = {Takashi Nagoshi and Masahide Mutoh and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Sample size effect of electrodeposited nanocrystalline nickel}, booktitle = {Program & Abstracts of Intenational Symposium on Strength of Fine Grained Materials - 60 years of Hall-Petch-}, year = 2013, } @inproceedings{CTT100641720, author = {Hirohito Imamura and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Deformation behavior of electrodeposited Ni film by using micro-compression test}, booktitle = {MRS Proceeding}, year = 2012, } @inproceedings{CTT100641719, author = {Takashi Nagoshi and Yuuki Karasawa and Akinobu Shibata and Tatsuo Sato and Masato Sone}, title = {Deformation Behavior of Fully Nano-Twinned BCT Material in a Micro-Compression Test}, booktitle = {MRS Proceeding}, year = 2012, } @inproceedings{CTT100640154, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Micro-compression test of nanocrystalline Nickel deposited by supercritical carbon dioxide emulsion}, booktitle = {}, year = 2012, } @inproceedings{CTT100640155, author = {Tso-Fu Mark Chang and Takashi Nagoshi and Chiemi Ishiyama and Tatsuo Sato and Masato Sone}, title = {Intact Ultrathin Ni Films Fabricated by Electroplating with Supercritical CO2 Emulsion}, booktitle = {}, year = 2012, } @inproceedings{CTT100640072, author = {Masahide Mutoh and Takashi Nagoshi and Tso-Fu Mark Chang and Masato Sone}, title = {Micro compression test using non-tapered micro-pillars of electrodeposited Cu}, booktitle = {38th International Conference on Micro and Nano Engineering, (MNE2012)}, year = 2012, } @inproceedings{CTT100640073, author = {Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Evaluation of Mechanical properties of electroplated Nickel}, booktitle = {38th International Conference on Micro and Nano Engineering, (MNE2012)}, year = 2012, } @inproceedings{CTT100640118, author = {Hirohito Imamura and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone}, title = {Multidirectional strength of micro-sized cantilever composed of columnar grains in electrodeposited Ni}, booktitle = {}, year = 2012, } @inproceedings{CTT100635717, author = {Masahide Mutoh and Takashi Nagoshi and Tso-Fu Mark Chang and Masato Sone}, title = {Effect of current density on mechanical properties of electrodeposited Cu film evaluated by micro-pillar compression test method}, booktitle = {}, year = 2012, } @inproceedings{CTT100626021, author = {Hirohito Imamura and Takashi Nagoshi and Masato Sone}, title = {Mechanical testing of electrodeposited Ni film parallel and vertical to crystal growth direction using micro-sized cantilever specimens}, booktitle = {TACT2011,International Thin Film Conference}, year = 2011, } @inproceedings{CTT100622487, author = {Takashi Nagoshi and Akinobu Shibata and Masato Sone and Yoshikazu Todaka}, title = {Uniform elongation of ultra-fine grained steels evaluated by micro-compression tests}, booktitle = {MS&T 2011 meeting}, year = 2011, } @inproceedings{CTT100625611, author = {Hirohito Imamura and Takashi Nagoshi and Akari Yoshida and Tso-Fu Mark Chang and Susumu Onaka and Masato Sone}, title = {Evaluation of anisotropic structure in electrodeposited Ni film using micro-sized cantilever}, booktitle = {}, year = 2011, } @inproceedings{CTT100624665, author = {Takashi Nagoshi and Akinobu Shibata and Masato Sone and Yoshikazu Todaka}, title = {The role of grain boundary character distribution on the mechanical behavior of ultra-fine grained ferrite}, booktitle = {E-MRS 2011 FALL MEETING}, year = 2011, } @inproceedings{CTT100605355, author = {Akinobu Shibata and Takashi Nagoshi and Masato Sone and Shigekazu Morito and YAKICHI HIGO}, title = {Micromechanical characterization of boundary strength in martensitic steel}, booktitle = {Materials Science & Technology 2010}, year = 2010, } @inproceedings{CTT100605356, author = {Akinobu Shibata and Takashi Nagoshi and Masato Sone and Shigekazu Morito and YAKICHI HIGO}, title = {Characterization of local deformation behavior of martensitic steel using a micro-sized cantilever-beam specimen}, booktitle = {31st Risoe International Symposium on Materials Science}, year = 2010, } @inproceedings{CTT100610545, author = {名越貴志 and 柴田曉伸 and 曽根正人}, title = {HPT加工により作成された鉄フェライトの微小角柱圧縮試験における機械的適挙動}, booktitle = {}, year = 2010, } @misc{CTT100691061, author = {Takashi Nagoshi}, title = {Mechanical Property Evaluation of Electrodeposited Metals by Using Micro-Compression Test}, year = 2014, } @misc{CTT100667358, author = {Takashi Nagoshi}, title = {Mechanical Property Evaluation of Electrodeposited Metals by Using Micro-Compression Test}, year = 2014, } @misc{CTT100690127, author = {Takashi Nagoshi}, title = {Mechanical Property Evaluation of Electrodeposited Metals by Using Micro-Compression Test}, year = 2014, } @phdthesis{CTT100691061, author = {Takashi Nagoshi}, title = {Mechanical Property Evaluation of Electrodeposited Metals by Using Micro-Compression Test}, school = {東京工業大学}, year = 2014, } @phdthesis{CTT100667358, author = {Takashi Nagoshi}, title = {Mechanical Property Evaluation of Electrodeposited Metals by Using Micro-Compression Test}, school = {東京工業大学}, year = 2014, } @phdthesis{CTT100690127, author = {Takashi Nagoshi}, title = {Mechanical Property Evaluation of Electrodeposited Metals by Using Micro-Compression Test}, school = {東京工業大学}, year = 2014, }