@article{CTT100796028, author = {Kyotaro Nitta and Tso-Fu Mark Chang and Koichiro Tachibana and Hao-chun Tang and Chun-Yi Chen and Shinichi Iida and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test}, journal = {Microelectronic Engineering}, year = 2019, } @article{CTT100786193, author = {Koichiro Tachibana and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test}, journal = {Microelectronic Engineering}, year = 2019, } @article{CTT100751410, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY}, journal = {Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)}, year = 2017, } @inproceedings{CTT100881436, author = {Tomoyuki Kurioka and Koichiro Tachibana and Kyotaro Nitta and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Daisuke Yamane and Hiroyuki Ito and Katsuyuki. Machida and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of Streucture Stability of Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests}, booktitle = {}, year = 2022, } @inproceedings{CTT100769735, author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyotaro Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100769736, author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever}, booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)}, year = 2018, } @inproceedings{CTT100768307, author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components}, booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan}, year = 2018, } @inproceedings{CTT100768387, author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyoutarou Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone}, title = {Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test}, booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan}, year = 2018, } @inproceedings{CTT100758671, author = {Kyoutarou Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices}, booktitle = {233rd ECS Meeting}, year = 2018, } @inproceedings{CTT100758967, author = {新⽥ 京太朗 and 橘 航⼀朗 and TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根 ⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈}, title = {⻑期振動試験によるAu-Cu合⾦微⼩カンチレバーの構造安定性}, booktitle = {応用物理学会第65回春季講演会}, year = 2018, } @inproceedings{CTT100751724, author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components}, booktitle = {}, year = 2017, } @inproceedings{CTT100751439, author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100755522, author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉}, title = {積層メタルMEMS慣性センサの長期振動特性評価}, booktitle = {}, year = 2017, } @inproceedings{CTT100752534, author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉}, title = {金めっきで形成したMEMS加速度センサの長期振動特性に関する検討}, booktitle = {}, year = 2017, } @inproceedings{CTT100745680, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology}, booktitle = {}, year = 2017, } @inproceedings{CTT100735888, author = {橘 航一朗 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人}, title = {積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討}, booktitle = {応用物理学会 2017年春季講演会}, year = 2017, }