@inproceedings{CTT100830478, author = {T. Kato and T.Inamura and A.Sasaki and K.Aoki and K.Kakushima and Y.Kataoka and A. Nishiyama and N. Sugii and H.Wakabayashi and K. Tsutsui and K. Natori and H. Iwai}, title = {Thickness-dependent electrical characterization of β‐FeSi2}, booktitle = {}, year = 2014, } @inproceedings{CTT100672910, author = {Taichi Inamura and Takafumi Katou and 佐々木亮人 and 青木克明 and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A study on silicide semiconductors for high efficiency thin film photovoltaic devices}, booktitle = {}, year = 2014, } @inproceedings{CTT100672969, author = {Hiroaki Imamura and Taichi Inamura and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Characterization of Thin NiSi2 Films by Stacked Silicidation Sputtering Process with Kr Gas}, booktitle = {}, year = 2014, } @inproceedings{CTT100673095, author = {Takafumi Katou and Taichi Inamura and 佐々木亮人 and 青木克明 and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Electrical characteristic of b-FeSi2}, booktitle = {}, year = 2014, } @inproceedings{CTT100673466, author = {稲村太一 and 嘉藤貴史 and 佐々木亮人 and 青木克明 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {β-FeSi2の抵抗率熱処理依存性}, booktitle = {}, year = 2014, } @inproceedings{CTT100674045, author = {嘉藤貴史 and 岩井洋 and 稲村太一}, title = {β-FeSi2の電気特性-膜厚依存性}, booktitle = {}, year = 2014, } @inproceedings{CTT100674048, author = {佐々木亮人 and 青木克明 and 片岡好則 and 小林 薫平 and 稲村太一 and 角嶋邦之 and 岩井洋}, title = {バリウムシリサイド半導体を用いたショットキー型太陽電池に関する研究}, booktitle = {}, year = 2014, } @inproceedings{CTT100669354, author = {Taichi Inamura and 佐々木亮人 and 青木克明 and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A stacked sputtered process for β-FeSi2 formation}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100669355, author = {Taichi Inamura and 佐々木亮人 and 青木克明 and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A stacked sputtered process for β-FeSi2 formation}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100658362, author = {Taichi Inamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Formation of Fe-silicides using Multi-Stacking Sputtering Process}, booktitle = {}, year = 2013, } @inproceedings{CTT100661663, author = {嘉藤貴史 and 稲村太一 and 佐々木 亮人 and 青木 克明 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Fe層とSi層の積層スパッタにより形成されたβ-FeSi2のキャリア密度に関する研究}, booktitle = {}, year = 2013, } @inproceedings{CTT100662339, author = {今村浩章 and 稲村太一 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Krガスを用いた積層シリサイド化スパッタプロセスにより形成したNiSi2の薄膜評価}, booktitle = {}, year = 2013, } @inproceedings{CTT100658361, author = {Taichi Inamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Formation of Fe-silicides using Multi-Stacking Sputtering Process}, booktitle = {}, year = 2013, }