@inproceedings{CTT100882193, author = {日原弘喜 and MOATAZ Shaher Anis Mahmoud Eissa and 山口圭太 and 小野寺広夢 and 大磯義孝 and 雨宮智宏 and 沖野晃俊 and 西山伸彦}, title = {異種材料集積光回路に向けた大気圧プラズマによる半導体親水化の検討}, booktitle = {}, year = 2022, } @inproceedings{CTT100861050, author = {Hiromu Onodera and Takehiko Kikuchi and Yoshitaka Oiso and Tomohiro Amemiya and Nobuhiko Nishiyama}, title = {Bonding Position Accuracy of Direct Transfer Bonding, Chip-on-wafer Bonding for III-V/Si Heterogeneous Integration}, booktitle = {}, year = 2021, } @inproceedings{CTT100861048, author = {小野寺広夢 and 菊地健彦 and 大礒義孝 and 雨宮智宏 and 西山伸彦}, title = {ハイブリッド集積に向けたDirect Transfer Bondingによる接合位置精度の検討}, booktitle = {}, year = 2021, }