@article{CTT100849033, author = {Atsuo Katagiri and Mutsuo Uehara and Mao Kurokawa and Kensuke Akiyama and Takao Shimizu and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Hiroshi Funakubo}, title = {Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering}, journal = {Journal of ELECTRONIC MATERIALS}, year = 2020, } @article{CTT100803190, author = {Mutsuo Uehara and Atsuo Katagiri and Mao Kurokawa and Kensuke Akiyama and Takao Shimizu and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Hiroshi Funakubo}, title = {Preparation of CaMgSi and Ca7Mg7.25Si14 single phase films and their thermoelectric properties}, journal = {MRS Adv.}, year = 2019, } @article{CTT100769725, author = {Atsuo Katagiri and Shota Ogawa and Mutsuo Uehara and P. S. Sankara Rama Krishnan and Mao Kurokawa and Masaaki Matsushima and Takao Shimizu and Kensuke Akiyama and Hiroshi Funakubo}, title = {Growth of (111)-oriented epitaxial magnesium silicide (Mg2Si) films on (001) Al2O3 substrates by RF magnetron sputtering and their properties}, journal = {J. Mater. Sic.}, year = 2018, } @article{CTT100769728, author = {Mao Kurokawa and Takao Shimizu and Mutsuo Uehara and Atsuo Katagiri and Kensuke Akiyama and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Hiroshi Funakubo}, title = {Control of p- and n-type Conduction in Thermoelectric Non-doped Mg2Si Thin Films Prepared by Sputtering Method}, journal = {MRS Advances}, year = 2018, } @article{CTT100769727, author = {Tomoya Sato and Daichi Ichinose and Takaaki Inoue and Mutsuo Uehara and Kiriha Katayama and Hiroshi Funakubo and Kiyoshi Uchiyama}, title = {Evaluation of Chemical Stability in Perovskite-Type Proton-Conductive Oxide Thin-Films}, journal = {Science of Advanced Materials}, year = 2018, } @article{CTT100720418, author = {Mutsuo Uehara and Kensuke Akiyama and Takao Shimizu and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Hiroshi Funakubo}, title = {Preparation of Ca–Si Films on (001) Al2O3 Substrates by an RF Magnetron Sputtering Method and Their Electrical Properties}, journal = {Journal of Electronic Materials}, year = 2016, } @inproceedings{CTT100853256, author = {片桐淳生 and 上原睦雄 and 黒川満央 and 秋山賢輔 and 松島正明 and 内田寛 and 木村好里 and 舟窪浩}, title = {Ca- Mg-Si三元系熱電材料におけるSi含有量変化に伴う導電型の制御}, booktitle = {}, year = 2020, } @inproceedings{CTT100821697, author = {A. Katagiri and M. Uehara and T. Shimizu and M. Matsushima and K. Akiyama and H. Uchida and Y. Kimura and H. Funakubo}, title = {Preparation of Mg2Si-based thin films and these properties}, booktitle = {}, year = 2019, } @inproceedings{CTT100803841, author = {Hiroshi Funakubo and Mutsuo Uehara and Mao Kurokawa and Atsuo Katagiri and Kensuke Akiyama and Takao Shimizu and Masaaki Matsusima and Hiroshi Uchida and Yoshisato Kimura}, title = {Composition Dependency of Thermoelectric Properties in Ca-Mg-Si System Using Thin Films Prepared by RF Magnetron Sputtering Method}, booktitle = {}, year = 2018, } @inproceedings{CTT100803837, author = {Hiroshi Funakubo and Mutsuo Uehara and Mao Kurokawa and Atsuo Katagiri and Kensuke Akiyama and Takao Shimizu and Masaaki Matsusima and Hiroshi Uchida and Yoshisato Kimura}, title = {Growth of Mg-Ca-Si thick flms by RF sputtering method and their thermoelectric property}, booktitle = {}, year = 2018, } @inproceedings{CTT100771797, author = {Mao Kurokawa and Mutsuo Uehara and Daichi Ichinose and Takao Shimizu and Kensuke Akiyama and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Atsuo Katagiri and Hiroshi Funakubo}, title = {Control of P-Type and N-Type Conduction in Thermoelectric Mg2Si Thin Films Prepared by Sputtering Method}, booktitle = {}, year = 2017, } @inproceedings{CTT100722306, author = {黒川満央 and 上原睦雄 and 一ノ瀬大地 and 清水荘雄 and 秋山賢輔 and 松島正明 and 内田 寛 and 舟窪浩}, title = {Mg2Si薄膜の熱電特性に及ぼす歪みの影響}, booktitle = {}, year = 2016, } @inproceedings{CTT100722224, author = {M. Uehara and M. Kurokawa and K. Akiyama and T. Shimizu and M. Matsushima and H. Uchida and Y. Kimura and H. Funakubo}, title = {Thermoelectric characterization of sputtered Ca-Mg-Si films}, booktitle = {}, year = 2016, } @inproceedings{CTT100722199, author = {黒川満央 and 上原睦雄 and 秋山賢輔 and 松島正明 and 内田寛 and 木村好里 and 舟窪浩}, title = {Mg2Si 薄膜の熱電特性に及ぼす種々の因子の影響}, booktitle = {}, year = 2016, } @inproceedings{CTT100722197, author = {上原睦雄 and 黒川満央 and 秋山賢輔 and 清水荘雄 and 松島正明 and 内田寛 and 木村好里 and 舟窪浩}, title = {スパッタリング法によるCa-Mg-Si 基膜熱電材料の特性評価}, booktitle = {}, year = 2016, } @inproceedings{CTT100721711, author = {上原 睦雄 and 黒川 満央 and 秋山 賢輔 and 松島 正明 and 内田 寛 and 木村 好里 and 舟窪 浩}, title = {スパッタリング法によるCa-Mg-Si基膜の作製と特性評価}, booktitle = {}, year = 2015, } @inproceedings{CTT100721178, author = {M. Uehara and K. Akiyama and M. Matsushima and T. Shimizu and H. Uchida and Y. Kimura and H. Funakubo}, title = {Phase Identification of Ca-Si Films prepared on (001) Al2O3 Substrates Using X-ray Diffraction Wide Area Reciprocal Space Mapping Method}, booktitle = {}, year = 2015, } @misc{CTT100744886, author = {舟窪浩 and 上原睦雄 and 倉持 豪人 and 召田 雅実}, title = {合金膜}, howpublished = {公開特許}, year = 2017, month = {}, note = {特願2015-169146(2015/08/28), 特開2017-043821(2017/03/02)} }