@book{CTT100645577, author = {益一哉 and 町田克之 and 年吉洋 and 江刺 正喜 and 藤田博之 and 石田誠 and 田中 秀治 and 高橋 一浩 and 越田信義 and 小山 英樹 and 佐々木 実 and 秦誠一 and 橋口 原 and 高尾 英邦 and 永瀬 雅夫 and 山口 浩司 and 北澤 正志 and 前中 一介 and 澤田和明 and 柴崎 一郎 and 野村聡 and 竹内 幸裕 and 柴田 英毅 and 楢崎 祥一 and 鈴木 雄二 and 西岡 泰城 and 森村 浩季 and 日暮 栄治 and 千野 満 and 内山 直己 and 足立 秀喜 and 井上 晴伸 and 橋本 秀樹}, title = {異種機能デバイス集積化技術の基礎と応用?MEMS, NEMS, センサ, CMOSLSIの融合?}, publisher = {株式会社 シーエムシー出版}, year = 2012, } @book{CTT100635164, author = {大竹尚登 and 神崎昌郎 and 宇治原徹 and 高崎正也 and 赤坂大樹 and 秦誠一 and 伏信一慶}, title = {新幹線,スペースシャトル,切削工具,ハードディスクドライブ}, publisher = {講談社}, year = 2012, } @book{CTT100600602, author = {秦誠一}, title = {新機能材料 金属ガラスの基礎と産業への応用(基礎31.薄膜化,応用10. マイクロアクチュエータ 分担)}, publisher = {㈱テクノシステム}, year = 2009, } @book{CTT100540200, author = {秦誠一}, title = {ソフトアクチュエータ 開発の最前線~人工筋肉の実現をめざして~(Ⅴ部,第1章分担)}, publisher = {㈱エヌ・ティー・エス}, year = 2004, } @book{CTT100539271, author = {秦誠一}, title = {マイクロレンズ(アレイ)の超精密加工と量産化技術(6章分担)}, publisher = {㈱技術情報協会}, year = 2003, } @article{CTT100693654, author = {Shengxian Jiang and Mitsuhiro Abe and Masayuki Ando and Yuko Aono and Junpei Sakurai and Seiichi Hata}, title = {Ni–Nb–Zr–Ti amorphous alloys for glass lens molding die materials}, journal = {Microelectronic Engineering}, year = 2014, } @article{CTT100661532, author = {青野祐子 and 川口龍太郎 and 櫻井淳平 and 秦誠一}, title = {薄膜形状記憶合金のハイスループット評価法}, journal = {電気学会論文誌E}, year = 2013, } @article{CTT100630067, author = {Junpei Sakurai and Mitsuhiro Abe and Masayuki Ando and Yuko Aono and Seiichi Hata}, title = {Searching for Noble Ni-Nb-Zr Thin Film Amorphous Alloys for Optical Glass Device Molding Die Materials}, journal = {Precision Engineering}, year = 2011, } @article{CTT100631753, author = {Naoki Takahashi and Anna Gubarevich and Junpei Sakurai and Seiichi Hata and Takeharu Tsuge and Yoshitaka Kitamoto and Yohtaro Yamazaki and Osamu Odawara and Hiroyuki Wada}, title = {Preparation and Optical Properties of Rare Earth Doped Y2O3 Nanoparticles Synthesized by Thermal Decomposition with Oleic Acid}, journal = {Advanced Materials Research}, year = 2011, } @article{CTT100630066, author = {Yuko Aono and Junpei Sakurai and Akira Shimokohbe and Seiichi Hata}, title = {Novel Thermographic Method for Characterizing Transformation Temperatures of Thin Film Shape Memory Alloys Aimed at Combinatorial Approach}, journal = {Japanese Journal of Applied Physics}, year = 2011, } @article{CTT100622335, author = {Yuko Aono and Junpei Sakurai and Akira Shimokohbe and Seiichi Hata}, title = {High-Throughput Characterization Method for Characterization Temperature of Integrated Thin Film Amorphous Alloys Using Thermography}, journal = {Jpn. J. Appl. Phys.}, year = 2011, } @article{CTT100622334, author = {Sheng Wang and Dongming Sun and Junpei Sakurai and Kee-Bong Choi and Seiichi Hata and Akira Shimokohbe}, title = {Driving mechanism, design, fabrication process and experiments of a cylindrical ultrasonic linear microactuator}, journal = {IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control}, year = 2011, } @article{CTT100615688, author = {Yuko Aono and Junpei Sakurai and Tetsuo Ishida and Akira Shimokohbe and Seiichi Hata}, title = {High-Throughput Measurement Method for Time-Temperature-Transformation Diagram of Thin Film Amorphous Alloys}, journal = {Appl. Phys. Express}, year = 2010, } @article{CTT100617553, author = {Junpei Sakurai and Mitsuhiro Abe and Masayuki Ando and Yuko Aono and Shengxian Jiang and Akira Shimokohbe and Seiichi Hata}, title = {Effect of sputtering method on characteristics of amorphous Ni-Nb-Zr alloys for glass lenses molding die materials}, journal = {Journal of Solid Mechanics and Materials Engineering}, year = 2010, } @article{CTT100608127, author = {Junpei Sakurai and Yuko Aono and Yui Ishida and Seiichi Hata}, title = {Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses Exhibiting a Shape Memory Effect after Crystallization}, journal = {Materials Science Forum}, year = 2010, } @article{CTT100608128, author = {Yuko Aono and Junpei Sakurai and Akira Shimokohbe and Seiichi Hata}, title = {High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples}, journal = {Materials Science Forum}, year = 2010, } @article{CTT100608129, author = {Junpei Sakurai and Mitsuhiro Abe and Masayuki Ando and Seiichi Hata}, title = {Combinatorial searching for Ni-Nb-Zr amorphous alloys as glass lens molding die materials}, journal = {Key Engineering Materials}, year = 2010, } @article{CTT100608496, author = {Yuko Aono and Junpei Sakurai and Akira Shimokohbe and Seiichi Hata}, title = {Evaluation of the validity of crystallization temperature measurements using thermograpy with different sample configurations}, journal = {Japanese Journal of Applied Physics}, year = 2010, } @article{CTT100608135, author = {秦誠一 and 櫻井淳平 and 阿部充博 and 安藤正将 and 青野祐子 and 下河邉明}, title = {ガラス成形金型用Ptフリーアモルファス合金のコンビナトリアル探索}, journal = {日本機械学会論文集(A編)}, year = 2010, } @article{CTT100604794, author = {Junpei Sakurai and Seiichi Hata and Ryusuke Yamauchi and Mitsuhiro Abe and Akira Shimokohbe}, title = {Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Optical Glass Lenses Molding Materials}, journal = {Precision Engineering}, year = 2010, } @article{CTT100600595, author = {Dongming Sun and Sheng Wang and Seiichi Hata and Akira Shimokohbe}, title = {Axial vibration characteristics of a cylindrical, radially polarized piezoelectric transducer with different electrode patterns}, journal = {Ultrasonics}, year = 2010, } @article{CTT100600676, author = {Dongming Sun and Sheng Wang and Junpei Sakurai and Kee-Bong Choi and Akira Shimokohbe and Seiichi Hata}, title = {A piezoelectric linear ultrasonic motor with the structure of circular cylindrical stator and slider}, journal = {SMART MATERIALS AND STRUCTURES}, year = 2010, } @article{CTT100600596, author = {Dongming Sun and Sheng Wang and Seiichi Hata and Junpei Sakurai and Akira Shimokohbe}, title = {Cylindrical ultrasonic linear microactuator based on quasi-traveling wave propagation on a thin film metallic glass pipe supported by a piezoelectric ceramic tube}, journal = {Sensors and Actuators, A: physical}, year = 2009, } @article{CTT100600597, author = {秦 誠一 and 藤田敏充 and 櫻井淳平 and 下河邉明}, title = {単一アークプラズマガンを用いたコンビナトリアル蒸着法}, journal = {材料}, year = 2009, } @article{CTT100590324, author = {Junpei Sakurai and Seiichi Hata and Ryusuke Yamauchi and Akira Shimokohbe}, title = {Characterization of the Pt-Hf-Zr-Ni Thin Film Amorphous Alloys for Precise Optical Glass Lens Mold}, journal = {Journal of Solid Mechanics and Materials Engineering}, year = 2009, } @article{CTT100600594, author = {Sheng Wang and Dongming Sun and Seiichi Hata and Junpei Sakurai and Akira Shimokohbe}, title = {Fabrication of thin film metallic glass (TFMG) pipe for a cylindrical ultrasonic linear micro-actuator}, journal = {Sensor and Actuator A Physical}, year = 2009, } @article{CTT100600589, author = {Dongming Sun and Sheng Wang and Seiichi Hata and Junpei Sakurai and Akira Shimokohbe}, title = {Driving mechanism and experimental realization of a cylindrical ultrasonic linear microactuator}, journal = {Microelectronic Engineering}, year = 2009, } @article{CTT100600592, author = {Dongming Sun and Sheng Wang and Seiichi Hata and Junpei Sakurai and Akira Shimokohbe}, title = {Vibration characteristics of a cylindrical shell with 25 µm thickness fabricated by the rotating sputtering system}, journal = {IEEE Transactions on Ultrasonics}, year = 2009, } @article{CTT100600591, author = {Seiichi Hata and Yuko Aono and Junpei Sakurai and Akira Shimokohbe}, title = {Measurement of Crystallization Temperature Using Thermography for Thin Film Amorphous Alloy Samples}, journal = {Applied Physics Express}, year = 2009, } @article{CTT100600593, author = {Dongming Sun and Sheng Wang and Junpei Sakurai and Kee-Bong Choi and Seiichi Hata and Akira Shimokohbe}, title = {A traveling wave type of piezoelectric ultrasonic bidirectional linear microactuator}, journal = {Applied Physics Express}, year = 2009, } @article{CTT100567331, author = {Junpei SAKURAI and Seiichi HATA and Akira SHIMOKOHBE}, title = {Characteristics of Cu-Zr Thin Film Metallic Glasses Fabricated by a Carousel-Type Sputtering System}, journal = {Japanese Journal of Applied Physics}, year = 2009, } @article{CTT100572110, author = {Masaaki Otsu and Junpei Sakurai and Seiichi Hata and Kazuki Takashima}, title = {Laser Forming of Thin Film Metallic Glass}, journal = {Journal of Solid Mechanics and Materials Engineering}, year = 2009, } @article{CTT100566977, author = {田邊力也 and 秦 誠一 and 下河邉明}, title = {積層型MEMS血球分析チップの開発}, journal = {精密工学会誌}, year = 2008, } @article{CTT100566980, author = {秦 誠一 and 櫻井淳平 and 下河邉明}, title = {新しいPt基アモルファス合金を用いたガラスレンズ成形用金型の試作}, journal = {日本機械学会論文集C編}, year = 2008, } @article{CTT100570375, author = {山内隆介 and 秦 誠一 and 櫻井淳平 and 下河邉明}, title = {ガラスレンズ成形金型用の新しいアモルファス合金のコンビナトリアル探索―結晶化開始温度,機械特性の評価―}, journal = {精密工学会誌}, year = 2008, } @article{CTT100566978, author = {Seiichi Hata and Ryusuke Yamauchi and Junpei Sakurai and Akira Shimokohbe}, title = {Behavior of Joining Interface between Thin Film Metallic Glass and Silicon Nitride at Heating}, journal = {Materials Science & Engineering B}, year = 2008, } @article{CTT100566979, author = {Yuji Matsumoto and Miki Hiraoka and Masao Katayama and Seiichi Hata and Mikio Fukuhara and Takeshi Wada and Hisamichi Kimura and Akihisa Inoue}, title = {In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system}, journal = {Materials Science & Engineering B}, year = 2008, } @article{CTT100547808, author = {Junpei Sakurai and Seiichi Hata and Ryusuke Yamauchi and Akira Shimokohb}, title = {Combinatorial arc plasma deposition search for Ru-based thin film metallic glass}, journal = {Applied Surface Science}, year = 2007, } @article{CTT100547837, author = {Seiichi Hata and Junpei Sakurai and Ryusuke Yamauchi and Akira Shimokohbe}, title = {Search for novel amorphous alloys with high crystallization temperature by combinatorial arc plasma deposition}, journal = {Applied Surface Science}, year = 2007, } @article{CTT100508593, author = {Junpei SAKURAI and Seiichi HATA and Ryusuke YAMAUCHI and Akira SHIMOKOHBE}, title = {Searching for Novel Ru-Based Thin Film Metallic Glass by Combinatorial Arc Plasma Deposition}, journal = {Japanese Journal of Applied Physics}, year = 2007, } @article{CTT100535154, author = {Rikiya Tanabe and Seiichi Hata and Akira Shimokohbe}, title = {A Hemoglobin and Volum Measurement Sensor for Point of Care Testing Analyzer using MEMS Process}, journal = {IEEJ Transactions on Sensors and Micromachines}, year = 2007, } @article{CTT100535191, author = {Junpei Sakurai Seiichi Hata and Ryusuke Yamauchi and Akira Shimokohbe}, title = {Searching for Novel Ru-Based Thin Film Metallic Glass by Combinatorial Arc Plasma Deposition}, journal = {Jpn. J. Appl. Phys.}, year = 2007, } @article{CTT100541884, author = {Seiichi HATA and Ryusuke YAMAUCHI and Junpei SAKURAI and Akira SHIMOKOHBE}, title = {Combinatorial Arc Plasma Deposition of Thin Films}, journal = {Jpn. J. Appl. Phys}, year = 2006, } @article{CTT100529021, author = {Takashi Fukushige and Takehiko Hayashi and Seiichi Hata and Akira Shimokohbe}, title = {Built-in Capacitive Displacement Sensor with Long Full-Scale Range for Electrostatic Microactuators}, journal = {IEEJ Transactions on Sensors and Micromachines}, year = 2006, } @article{CTT100529020, author = {Rikiya Tanabe and Seiichi Hata and Akira Shimokohbe}, title = {A MEMS complete blood count sensor with vanes for reduction in influence of electrolysis gas}, journal = {IEEJ Transactions on Sensors and Micromachines}, year = 2006, } @article{CTT100529018, author = {Ryusuke YAMAUCHI and Seiichi HATA and Junpei SAKURAI and Akira SHIMOKOHBE}, title = {Combinatorial Search for Low Resistivity PdCuSi Thin Film Metallic Glass}, journal = {Jpn. J. Appl. Phys}, year = 2006, } @article{CTT100529017, author = {Rikiya Tanabe and Seiichi Hata and Akira Shimokohbe}, title = {MEMS complete blood count sensors designed to reduce noises from electolysis gas}, journal = {Microelectronic Engineering}, year = 2006, } @article{CTT100535198, author = {T. Fukushige and S. Hata and A. Shimokohbe}, title = {A MEMS Conical Spring Actuator Array}, journal = {IEEE/ASME Journal of Microelectromechanical Systems}, year = 2005, } @article{CTT100540196, author = {T. Fukushige and S. Hata and A. Shimokohbe}, title = {A MEMS Conical Spring Actuator Array}, journal = {IEEE/ASME Journal of Microelectromechanical Systems}, year = 2005, } @article{CTT100387987, author = {T. Fukushige and S. Hata and A. Shimokohbe}, title = {Large-output-force out-of-plane MEMS actuator array}, journal = {Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology}, year = 2004, } @article{CTT100388041, author = {福重孝志 and 秦 誠一 and 下河辺明}, title = {静電型MEMSアクチュエータの新しい固着防止駆動方法}, journal = {2004年度精密工学会春季大会学術講演会講演論文集}, year = 2004, } @article{CTT100388040, author = {西ヶ谷啓太 and 秦 誠一 and 桜井淳平 and 下河辺明}, title = {薄膜金属ガラスを用いた微細中空構造の製作―窒化銅を発ガス材として用いたマイクロブロー成形―}, journal = {2004年度精密工学会秋季大会学術講演会講演論文集}, year = 2004, } @article{CTT100387985, author = {T. Fukushige and S. Hata and A. Shimokohbe}, title = {A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking}, journal = {Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004)}, year = 2004, } @article{CTT100388039, author = {秦 誠一 and 林 健彦 and 福重孝志 and 下河辺明}, title = {アナログ的基板面外変位静電マイクロアクチュエータ}, journal = {2004年度精密工学会秋季大会学術講演会講演論文集}, year = 2004, } @article{CTT100388043, author = {秦誠一}, title = {マイクロ/ナノシステム材料としての薄膜金属ガラスとその応用}, journal = {精密工学会第21回マイクロ/ナノシステム研究専門委員会}, year = 2004, } @article{CTT100388042, author = {上島太陽 and 秦 誠一 and 桜井淳平 and 下河辺明}, title = {集積化薄膜金属ガラスマイクロプローブ}, journal = {2004年度精密工学会春季大会学術講演会講演論文集}, year = 2004, } @article{CTT100486890, author = {Kaiji SATO and Kentaro ITO and SEIICHI HATA and Akira Shimokohbe}, title = {Self-alignment of Microparts Using Liquid Surface Tension - Behavior of Micropart and alignment characteristics}, journal = {Precision Engineering}, year = 2003, } @article{CTT100489252, author = {Seiichi Hata}, title = {The Application of Thin Film Metallic Glasses to 3D Micro Actuators}, journal = {Proceedings of International Symposium on Smart Actuators and Sensors}, year = 2003, } @article{CTT100489251, author = {Yoshisato YOKOYAMA and Takashi FUKUSHIGE and Seiichi HATA and Kazuya MASU and Akira SHIMOKOHBE}, title = {On-Chip Variable Inductor Using Microelectromechanical Systems Technology}, journal = {Jpn. J. Appl. Phys}, year = 2003, } @article{CTT100489263, author = {秦 誠一}, title = {金属ガラスの微細加工とその応用}, journal = {第23回過冷金属研究会}, year = 2003, } @article{CTT100489247, author = {Hee-Won Jeong and Seiichi Hata and Akira Shimokohbe}, title = {Microforming of Three-Dimensional Microstructures from Thin Film Metallic Glass}, journal = {IEEE/ASME Journal of Microelectromechanical Systems}, year = 2003, } @article{CTT100489248, author = {Seiichi Hata and Tokokazu Kato and Takashi Fukushige and Akira Shimokohbe}, title = {Integrated Conical Soring Linear Actuator}, journal = {Microelectronic Engineering}, year = 2003, } @article{CTT100489249, author = {Takashi Fukushige and Yoshisato Yokoyama and Seiichi Hata and Kazuya Masu and Akira Shimokohbe}, title = {Fabrication and Evaluation of On-Chip Micro Variable Inductor}, journal = {Microelectronic Engineering}, year = 2003, } @article{CTT100489245, author = {Kaiji Sato and Kentaro Ito and Seiichi Hata and Akira Shimokohbe}, title = {Self-alignment of microparts using liquid surface tension - behavior of microparts and alignment characteristics -}, journal = {Precision Engineering}, year = 2003, } @article{CTT100489261, author = {桜井淳平 and 秦 誠一 and 下河辺明}, title = {CuTi合金スパッタ薄膜の機械的特性及び電気抵抗率に及ぼす時効の効果}, journal = {日本金属学会講演概要}, year = 2003, } @article{CTT100489260, author = {福重孝志 and 秦 誠一 and 下河辺明}, title = {高出力・高集積基板面外駆動マイクロアクチュエータ}, journal = {2003年度精密工学会秋季大会学術講演会講演論文集}, year = 2003, } @article{CTT100489259, author = {秦 誠一 and 山中 崇 and 桜井淳平・下河辺明}, title = {薄膜金属ガラスを用いた微細中空構造の製作―プロセスの改良と変形に関する考察―}, journal = {2003年度精密工学会秋季大会学術講演会講演論文集}, year = 2003, } @article{CTT100489258, author = {桜井淳平 and 秦 誠一 and 下河辺明}, title = {薄膜金属ガラスを用いた集積化マイクロプローブ(第2報)- 薄膜金属ガラスの低電気抵抗化-}, journal = {2003年度精密工学会秋季大会学術講演会講演論文集}, year = 2003, } @article{CTT100489257, author = {和田晃一 and 北爪秀憲 and 奈良崎亘 and 斉藤忠男 and 秦 誠一 and 桜井淳平 and 下河辺明}, title = {薄膜金属ガラスを用いた集積化マイクロプローブ(第1報)-薄膜金属ガラスマイクロプローブとその特性-}, journal = {2003年度精密工学会秋季大会学術講演会講演論文集}, year = 2003, } @article{CTT100489255, author = {Seiichi Hata and Takashi Yamanaka and Jyunpei Sakurai and Akira Shimokohbe}, title = {Micro dome shape structures made of thin film metallic glass}, journal = {Micro System Technology 2003 (MST '03)}, year = 2003, } @article{CTT100489253, author = {J. Sakurai and S. Hata and A. Shimokohbe}, title = {Reduction of electrical resistivity in PdCuSi thin film metallic glass}, journal = {Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM’03)}, year = 2003, } @article{CTT100539017, author = {秦 誠一 and 加藤友和 and 福重孝志 and 下河辺 明}, title = {集積化円すいばねマイクロアクチュエータ}, journal = {精密工学会誌}, year = 2003, } @article{CTT100471477, author = {Seiichi Hata and Tokokazu Kato and Takashi Fukushige and Akira Shimokohbe}, title = {Integrated Conical Soring Linear Actuator}, journal = {Proceedings of Micro- and Nanoengineering International Conference (MNE 2002)}, year = 2002, } @article{CTT100471484, author = {秦誠一}, title = {驚異の技術マイクロマシン}, journal = {目黒区社会教育講座テキスト}, year = 2002, } @article{CTT100471483, author = {秦 誠一 and 加藤友和 and 下河辺明}, title = {集積化円錘ばねマイクロアクチュエータ}, journal = {2002年度精密工学会秋期大会学術講演会講演集}, year = 2002, } @article{CTT100471482, author = {鄭 希元 and 秦 誠一 and 下河辺明}, title = {薄膜金属ガラスを用いた2自由度マイクロアクチュエータの製作}, journal = {2002年度精密工学会秋期大会学術講演会講演集}, year = 2002, } @article{CTT100471481, author = {山中 崇 and 秦 誠一 and 桜井淳平 and 下河辺明}, title = {薄膜金属ガラスを用いた微細中空構造の製作}, journal = {2002年度精密工学会秋期大会学術講演会講演集}, year = 2002, } @article{CTT100471480, author = {福重孝志 and 横山佳巧 and 秦 誠一 and 益 一哉 and 下河辺明}, title = {高周波回路用可変マイクロインダクタの製作と評価}, journal = {2002年度精密工学会秋期大会学術講演会講演集}, year = 2002, } @article{CTT100471479, author = {Seiichi HATA and Yutaka YAMADA and Junichi ICHIHARA and Akira SHIMOKOHBE}, title = {A Micro Lens Actuator for Optical Flying Head}, journal = {Technical Digest of The 15th IEEE International Conference on MEMS 2002}, year = 2002, } @article{CTT100471478, author = {Hee-Won JEONG and Seiichi HATA and Akira SHIMOKOHBE}, title = {Micro-Forming of Thin Film Metallic Glass by Local Laser Heating}, journal = {Technical Digest of The 15th IEEE International Conference on MEMS 2002}, year = 2002, } @article{CTT100471485, author = {秦誠一}, title = {マイクロマシンの実用化と研究動向の最先端}, journal = {横浜市工業技術支援センター テクノパートナー推進プロジェクト「先端・機械技術の応用」技術交流会テキスト}, year = 2002, } @article{CTT100471476, author = {Takashi Fukushige and Yoshisato Yokoyama and Seiichi Hata and Kazuya Masu and Akira Shimokohbe}, title = {Fabrication and Evaluation of On-Chip Micro Variable Inductor}, journal = {Proceedings of Micro- and Nanoengineering International Conference (MNE 2002)}, year = 2002, } @article{CTT100471475, author = {Seiichi Hata and Takashi Fukushige and Akira Shimokohbe}, title = {Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass}, journal = {Proceedings of CPT2002}, year = 2002, } @article{CTT100538440, author = {秦 誠一 and 下河辺明}, title = {薄膜金属ガラスアクチュエータ}, journal = {精密工学会誌}, year = 2002, } @article{CTT100455864, author = {鄭 希元 and 秦 誠一 and 下河辺明}, title = {レーザ局所加熱による薄膜金属ガラスのマイクロフォーミング}, journal = {2001年度精密工学会秋季大会学術講演会講演論文集}, year = 2001, } @article{CTT100455861, author = {S. HATA and Y. LIU and T. KATO and A. SHIMOKOHBE}, title = {Three-Dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region}, journal = {Proceedings of 10th International Conference on Precision Engineering}, year = 2001, } @article{CTT100455860, author = {Y. LIU and S. HATA and K. WADA and A. SHIMOKOHBE}, title = {Thin Film Metallic Glasses: Fabrication and Property Test}, journal = {The 14th IEEE International Conference on MEMS 2001}, year = 2001, } @article{CTT100455863, author = {秦 誠一 and 山田 裕 and 市原順一 and 下河辺明}, title = {薄膜金属ガラスを用いたマイクロレンズアクチュエータ}, journal = {2001年度精密工学会秋季大会学術講演会講演論文集}, year = 2001, } @article{CTT100455865, author = {加藤友和 and 秦 誠一 and 下河辺明}, title = {基板面外円錐ばねマイクロアクチュエータ}, journal = {2001年度精密工学会秋季大会学術講演会講演論文集}, year = 2001, } @article{CTT100455862, author = {蛸島武尚 and 奈良崎亘 and 和田晃一 and 北爪秀憲 and 本山慎一 and 柳 永勛 and 江刺正喜 and 秦 誠一 and 下河辺明}, title = {マイクロマシン技術を用いたLSIテスト用微細プローブ・ピンの開発}, journal = {平成13年電気学会全国大会講演論文集}, year = 2001, } @article{CTT100537992, author = {YONGDONG LIU and SEIICHI HATA and KOUICHI WADA and AKIRA SHIMOKOHBE}, title = {Thermal, Mechanical and Electrical Properties of Pd-based Thin Film Metallic Glass}, journal = {JJAP}, year = 2001, } @article{CTT100537991, author = {秦 誠一 and 劉 永東 and 長峯靖之 and 下河辺明}, title = {金属ガラスの精密・微細加工に関する基礎的研究(Zr基バルク金属ガラスの引張変形挙動)}, journal = {日本機械学会論文集(C編)}, year = 2001, } @article{CTT100537993, author = {秦 誠一 and 劉 永東 and 和田晃一 and 下河辺明}, title = {薄膜金属ガラスの成膜と物性}, journal = {精密工学会誌}, year = 2001, } @article{CTT100442648, author = {秦 誠一 and 後藤 潤 and 佐藤海二 and 下河辺明}, title = {薄膜金属ガラスを用いた微細構造物の製作(第1報) -薄膜金属ガラスの製作と過冷却液体域を利用した微細成形-}, journal = {精密工学会誌}, year = 2000, } @article{CTT100442649, author = {秦 誠一 and 後藤 潤 and 佐藤海二 and 下河辺明}, title = {薄膜金属ガラスを用いた微細構造物の製作(第2報)-薄膜金属ガラス静電マイクロアクチュエータの提案と試作-}, journal = {精密工学会誌}, year = 2000, } @article{CTT100442650, author = {佐藤海二 and 関 智紀 and 秦 誠一 and 下河辺明}, title = {液体の表面張力を利用したマイクロ部品のセルフアライメントの原理と特性}, journal = {精密工学会誌}, year = 2000, } @article{CTT100442651, author = {早乙女康典 and 秦 誠一 and 坂口幸二}, title = {超塑性複合加工によるマイクロ2段歯車の創製}, journal = {塑性と加工}, year = 2000, } @article{CTT100442655, author = {秦 誠一 and 和田晃一 and 佐藤海二 and 下河辺明}, title = {薄膜金属ガラスを用いた微細構造物の製作(第2報)-Pd基薄膜金属ガラスの成膜とその微細加工-}, journal = {2000年度精密工学会春季講演会論文集}, year = 2000, } @article{CTT100442656, author = {秦 誠一 and 松崎将健 and 崔 起鳳 and 佐藤海二 and 下河辺明}, title = {バルク金属ガラスを用いた微小球面軸受}, journal = {日本機械学会IIP2000 情報・知能・精密機器部門講演会講演論文集}, year = 2000, } @article{CTT100442678, author = {佐藤海二 and 伊藤健太郎 and 秦 誠一 and 下河辺明}, title = {液体の表面張力を利用したマイクロ部品のセルフアライメント(マイクロ部品や液滴の挙動とセルフアライメント精度)}, journal = {日本機械学会IIP2000情報・知能・情報機器部門講演会講演論文集}, year = 2000, } @article{CTT100442689, author = {秦 誠一 and 劉 永東 and 加藤友和 and 下河辺明}, title = {薄膜金属ガラスを用いた微細構造物の製作(第3報)-過冷却液体域を利用した立体構造製作法の検討-}, journal = {2000年度精密工学会秋季講演会論文集}, year = 2000, } @article{CTT100442690, author = {Liu Yongdong and Seiichi Hata and Kouichi Wada and Akira Shimokohbe}, title = {Physical properties of Pd-based thin film metallic glass}, journal = {Proc. 2000 Autumn meeting of JSPE}, year = 2000, } @article{CTT100443690, author = {和田晃一 and 安岡正純 and 渡辺一貴 and 蛸島武尚 and 秦誠一 and 下河辺明}, title = {Zr系およびPd系金属ガラス薄膜の抵抗率測定}, journal = {第47回応用物理学関係連合講演会講演予稿集}, year = 2000, } @article{CTT100455856, author = {早乙女康典 and 秦 誠一 and 坂口幸二}, title = {超塑性複合加工によるマイクロ2段歯車の創製}, journal = {塑性と加工}, year = 2000, } @article{CTT100426854, author = {秦 誠一 and 後藤 潤 and 佐藤海二 and 下河辺明}, title = {ステップ駆動静電マイクロアクチュエータの研究}, journal = {1999年度精密工学会秋季講演会論文集}, year = 1999, } @article{CTT100423393, author = {秦 誠一 and 後藤 潤 and 長峯靖之 and 佐藤海二 and 下河辺明}, title = {薄膜金属ガラスを用いた微細構造物の製作-過冷却液体域を利用した微細成形法-}, journal = {1999年度精密工学会秋季講演会論文集}, year = 1999, } @article{CTT100422288, author = {秦 誠一 and 山田典弘 and 早乙女康典 and 井上明久 and 下河辺明}, title = {金属ガラスの精密・微細加工に関する研究 (Zr基金属ガラスの過冷却液体域における成形性)}, journal = {日本機械学会論文集(C編)}, year = 1999, } @article{CTT100423392, author = {秦 誠一 and 石井達史 and 佐藤海二 and 下河辺明}, title = {過冷却液体域を利用した金属ガラスの微細加工法}, journal = {日本機械学会1999年度年次大会講演論文集(Ⅰ)}, year = 1999, } @article{CTT100423394, author = {S. HATA and N. YAMADA and Y. SAOTOME and A. INOUE and A. SHIMOKOHBE}, title = {Precision and Micro Machining of Metallic Glasses -Formability of Zr Based Metallic Glasses in the Supercooled Liquid State-}, journal = {Proceedings of China-Japan Bilateral Symposium on Advanced Manufacturing Engineering}, year = 1998, } @article{CTT100442677, author = {渡辺和俊 and 秦 誠一 and 太刀川博之 and 佐藤海二 and 下河辺明}, title = {二次元アブソリュートエンコーダの原理とその応用}, journal = {1998年度精密工学会春季講演会論文集}, year = 1998, } @article{CTT100423391, author = {大塚二郎 and 秦 誠一 and 下河辺明 and 越水重臣}, title = {延性モード切削加工用の超精密変位台の開発}, journal = {精密工学会誌}, year = 1998, } @article{CTT100442676, author = {秦 誠一 and 山田典弘 and 早乙女康典 and 井上明久}, title = {Zr基バルクアモルファス合金の過冷却液体域に於ける圧縮応力下の変形特性}, journal = {第28回塑性加工春季講演会講演論文集}, year = 1997, } @article{CTT100442654, author = {千賀 徹 and 秦 誠一 and 小川治男}, title = {微小領域における振動加工装置に関する研究(第2報)}, journal = {1995年度精密工学会春季講演会論文集}, year = 1995, } @article{CTT100442653, author = {秦誠一 and 佐藤海二 and 大塚二郎 and 吉村靖夫 and 下河辺明}, title = {加工点制御型微小変位台の開発}, journal = {日本機械学会第71期通常総会講演会講演論文集[Ⅳ]}, year = 1994, } @article{CTT100442652, author = {早乙女康典 and 秦 誠一 and 伊藤明俊 and 坂口幸二}, title = {超塑性の微細成形特性とマイクロ2段歯車の創成}, journal = {平成4年塑性加工春季講演会論文集}, year = 1992, } @inproceedings{CTT100909784, author = {櫻井淳平 and 乾和雅 and 村瀬正憲 and 岡智絵美 and 秦誠一 and 細田秀樹}, title = {高成形性形状記憶合金製反力可変受動形触覚ディスプレイ用アクチュエータの作製}, booktitle = {}, year = 2024, } @inproceedings{CTT100865127, author = {Shin Inoue and Takanori Yamazaki and Chiemi Oka and Seiichi Hata and Junpei Sakurai and Hideki Hosoda}, title = {Combinatorial Searching of Ti-Ni-Hf High Formable Shape Memory Alloys for Medical Devices}, booktitle = {The 6th International Symposium on Biomedical Engineering (ISBE2021)}, year = 2021, } @inproceedings{CTT100820559, author = {櫻井淳平 and 千須和要 and 岡智絵美 and 秦誠一 and 細田秀樹}, title = {高成形性形状記憶合金の生体適合性評価}, booktitle = {令和元年度生体医歯工学共同研究拠点 成果報告会}, year = 2020, } @inproceedings{CTT100810792, author = {Kaname Chizuwa and Chiemi Oka and Seiichi Hata and Junpei Sakurai and Hideki Hosoda}, title = {Combinatorial Evaluation for Corrosion Resistance of Ti-Ni-based High Formable Shape Memory Alloys}, booktitle = {The 4th International Symposium on Biomedical Engineering(ISBE2019)}, year = 2019, } @inproceedings{CTT100782993, author = {Kaname Chizuwa and Chiemi Oka and Seiichi Hata and Junpei Sakurai and Hideki Hosoda}, title = {Combinatorial Evaluation for Biocompatibility of High Formable Shape Memory Alloys}, booktitle = {}, year = 2018, } @inproceedings{CTT100758882, author = {Hiroto Watanabe and Mizue Mizoshiri and Seiichi Hata and Junpei Sakurai and Hideki Hosoda}, title = {MICRO FOLDABLE PIPE STRUCTURES USING TI-NI-ZR HIGH FORMABLE SHAPE MEMORY ALLOYS}, booktitle = {The 2nd International Symposium on Biomedical Engineering}, year = 2017, } @inproceedings{CTT100734935, author = {Shengxian Jiang and Mitsuhiro Abe and Masayuki Ando and Yuko Aono and Junpei Sakurai and Seiichi Hata}, title = {Search for Ni-Nb-Zr-X amorphous alloys for glass lens molding die materials}, booktitle = {}, year = 2016, } @inproceedings{CTT100664525, author = {JIANG SHENGXIAN and 櫻井淳平 and 青野祐子 and 秦誠一}, title = {Ni-Nb-Ti 合金材料の切削性のコンビナトリアル探索}, booktitle = {日本機械学会第21回機械材料・材料加工技術講演会CD-ROM論文集}, year = 2013, } @inproceedings{CTT100647920, author = {川口龍太郎 and 青野祐子 and 櫻井淳平 and 中光豊 and 秦誠一}, title = {薄膜形状記憶合金の変態温度ハイスループット測定法}, booktitle = {第59回応用物理学関係連合講演会講演予稿集}, year = 2012, } @inproceedings{CTT100647922, author = {Yuko Aono and Junpei Sakurai and Akira Shimokohbe and SEIICHI HATA}, title = {High-Throughput Characterization of Time-Dependent Crystallization of Ni-Nb-Zr Thin Film Alloys}, booktitle = {Abstract of Materials Research Society Symposium}, year = 2011, } @inproceedings{CTT100631755, author = {Naoki Takahashi and Anna Gubarevich and Junpei Sakurai and Seiich Hata and Takeharu Tsuge and Yoshitaka Kitamoto and Yohtaro Yamazaki and Osamu Odawara and Hiroyuki Wada}, title = {Preparation of Rare Earth Doped Y2O3 Nanoparticles Synthesized by Thermal Decomposition}, booktitle = {}, year = 2011, } @inproceedings{CTT100647918, author = {川口龍太郎 and 青野祐子 and 櫻井淳平 and 秦誠一}, title = {薄膜ライブラリを用いた形状記憶合金の変態温度測定法}, booktitle = {日本機械学会第3回マイクロ・ナノ工学シンポジウム講演論文集}, year = 2011, } @inproceedings{CTT100647916, author = {川口龍太郎 and 青野祐子 and 櫻井淳平 and 秦誠一}, title = {薄膜金属材料の相変態コンビナトリアル評価法における検出感度向上}, booktitle = {日本機械学会2011年度年次大会講演論文集}, year = 2011, } @inproceedings{CTT100647914, author = {青野祐子 and 櫻井淳平 and 下河邉明 and 秦誠一}, title = {サーモグラフィによる薄膜アモルファス合金のハイスループット結晶化挙動解明法II}, booktitle = {日本機械学会2011年度年次大会講演論文集}, year = 2011, } @inproceedings{CTT100647913, author = {青野祐子 and 櫻井淳平 and 下河邉明 and 秦誠一}, title = {サーモグラフィによる薄膜アモルファス合金のハイスループット結晶化挙動解明法I}, booktitle = {日本機械学会2011年度年次大会講演論文集}, year = 2011, } @inproceedings{CTT100622333, author = {渡辺茂高 and 櫻井淳平 and 秦誠一}, title = {Cu基薄膜金属ガラスを用いたマイクロミラーデバイスの光走査評価}, booktitle = {粉体粉末冶金協会講演概要集平成23年度春季大会}, year = 2011, } @inproceedings{CTT100622332, author = {櫻井淳平 and 秦誠一}, title = {等原子比組成近傍擬二元系(Ti,Zr)‐Ni薄膜金属ガラスの特性評価}, booktitle = {粉体粉末冶金協会講演概要集平成23年度春季大会}, year = 2011, } @inproceedings{CTT100622331, author = {秦誠一 and 櫻井淳平 and 川口龍太郎 and 青野祐子}, title = {Pd基薄膜金属ガラスの放射率変化を利用した熱的特性の迅速評価}, booktitle = {粉体粉末冶金協会講演概要集平成23年度春季大会}, year = 2011, } @inproceedings{CTT100620476, author = {青野祐子 and 櫻井淳平 and 下河邉明 and 秦誠一}, title = {サーモグラフィによる薄膜形状記憶合金の変態温度測定法}, booktitle = {第18回機械材料・材料加工技術講演会論文集}, year = 2010, } @inproceedings{CTT100622336, author = {渡辺茂高 and 櫻井淳平 and 秦誠一}, title = {マイクロミラーデバイスの複合マイクロ加工}, booktitle = {第18回機械材料・材料加工技術講演会論文集}, year = 2010, } @inproceedings{CTT100615690, author = {S. Hata and J. Sakurai and Y. Aono and N. Tamujini and Y. Matsumoto and A. Shimokohbe}, title = {Combinatorial Technology on Searching for Novel Amorphous Alloys}, booktitle = {Book of Abstract, 6th Inter. Workshop on Combinatorial materials Science & Technology}, year = 2010, } @inproceedings{CTT100620471, author = {Yuko Aono and Junpei Sakurai and Tetsuo Ishida and Akira Shimokohbe and Seiichi Hata}, title = {Temperature gradient heating system for high-throughput method for determining time-temperature-transformation diagram using thin film samples}, booktitle = {Book of Abstract, 6th International Workshop on Combinatorial Materials Science and Technology}, year = 2010, } @inproceedings{CTT100622338, author = {小迫 景嗣 and 櫻井淳平 and 秦誠一 and 向井伸幸 and 大沼 恵則 and 高橋 勉}, title = {薄膜金属ガラスを用いた新しいダイアフラム形真空センサ}, booktitle = {第2回マイクロ・ナノ加工シンポジウム}, year = 2010, } @inproceedings{CTT100622337, author = {高垣輝多 and 孫東明 and 汪盛 and 櫻井淳平 and 下河邉 明 and 秦誠一}, title = {円筒形超音波リニアマイクロアクチュエータ}, booktitle = {第2回マイクロ・ナノ加工シンポジウム}, year = 2010, } @inproceedings{CTT100630059, author = {Yuko Aono and Junpei Sakurai and Akira Shimokohbe and Seiichi Hata}, title = {High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples}, booktitle = {Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing}, year = 2010, } @inproceedings{CTT100630065, author = {Junpei Sakurai and Yuko Aono and Yui Ishida and Seiichi Hata}, title = {Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses Exhibiting a Shape Memory Effect after Crystallization}, booktitle = {Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing}, year = 2010, } @inproceedings{CTT100604796, author = {櫻井淳平 and 青野祐子 and 石田ゆい and 秦誠一}, title = {結晶化処理により形状記憶特性を示すTi-Ni-Zr薄膜金属ガラスの特性評価}, booktitle = {日本金属学会講演概要}, year = 2010, } @inproceedings{CTT100608495, author = {青野祐子 and 櫻井淳平 and 下河邉明 and 秦誠一}, title = {サーモグラフィによる結晶化開始温度のコンビナトリアル評価のための新薄膜ライブラリの検討}, booktitle = {2010年春期第57回応用物理学関係連合講演会}, year = 2010, } @inproceedings{CTT100620474, author = {秦誠一 and 櫻井淳平 and 阿部充博 and 安藤正将 and 青野祐子 and 下河邉明}, title = {ガラス成形金型用Ptフリー非晶質合金のコンビナトリアル探索}, booktitle = {第17回機械材料・材料加工技術講演会論文集}, year = 2009, } @inproceedings{CTT100620475, author = {櫻井淳平 and 秦誠一 and 山内隆介 and 青野祐子 and 下河邉明}, title = {高機能ガラスレンズ金型Pt基非晶質合金の探索}, booktitle = {第17回機械材料・材料加工技術講演会論文集}, year = 2009, } @inproceedings{CTT100620473, author = {青野祐子 and 秦誠一 and 櫻井淳平 and 下河邉明}, title = {サーモグラフィによる薄膜アモルファス合金ライブラリの結晶化開始温度測定法}, booktitle = {第17回機械材料・材料加工技術講演会論文集}, year = 2009, } @inproceedings{CTT100608136, author = {安藤正将 and 櫻井淳平 and 青野祐子 and 秦誠一}, title = {薄膜ライブラリを用いた高耐熱性を有するアモルファス合金の探索}, booktitle = {第26回センサシンポ 集積化MEMSシンポジウム講演集}, year = 2009, } @inproceedings{CTT100590327, author = {櫻井淳平 and 秦誠一 and 阿部充博 and 青野祐子 and 下河邉明}, title = {高機能ガラスレンズ金型材料の探索III}, booktitle = {2009年度精密工学会秋季大会学術講演会講演論文集}, year = 2009, } @inproceedings{CTT100608137, author = {Seiichi Hata and Junpei Sakurai and Hiroshi Kozako and Yukiko Matsumoto and Akira Shimokohbe and Nobuyuki Mukai and Yoshinori Ohnuma and Tsutomu Takahashi and Yasunori Saotome and Hisamichi Kimura and Parmanand Sharma and Akihisa Inoue}, title = {DEVELOPMENT OF HIGH-PERFORMANCE VACUUM SENSOR USING JOINING METHOD FOR THIN FILM METALLIC GLASS}, booktitle = {The Third International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials, and Joining Technology for New Metallic Glasses and Inorganic Materials}, year = 2009, } @inproceedings{CTT100608130, author = {Yuki Ide and Masaaki Otstu and Junpei Sakurai and Seiichi Hata and Kazuki Takashima}, title = {Bending of Pd-based thin film metallic glasses by laser forming process}, booktitle = {MRS Proceeding}, year = 2009, } @inproceedings{CTT100590326, author = {青野祐子 and 秦誠一 and 櫻井淳平 and 下河邉明}, title = {サーモグラフィを用いた薄膜アモルファス合金の結晶化開始温度のコンビナトリアル評価法}, booktitle = {2009年春季 第56回応用物理学関係連合講演会予稿集No.2}, year = 2009, } @inproceedings{CTT100590325, author = {Yuko Aono and Seiichi Hata and Junpei Sakurai and Akira Shimokohbe}, title = {Novel Crystallization Temperature Measurement Method for Combinatorial Evaluation using Infrared Thermography}, booktitle = {Proc. of 2009 MRS Spring Meeting}, year = 2009, } @inproceedings{CTT100570380, author = {Sheng Wang and Dongming Sun and Seiichi Hata and Akira Shimokohbe}, title = {A cylindrical ultrasonic linear microactuator}, booktitle = {Abstracts of 3rd JSME/ASME International Conference on Materials andProcessing (ICM&P 2008)}, year = 2008, } @inproceedings{CTT100600601, author = {Seiichi Hata and Ryusuke Yamauchi and Taiyo Ueshima and Junpei Sakurai and Akira Shimokohbe}, title = {Search for Novel MEMS Materials using a Combinatorial Method}, booktitle = {Proceedings of 3rd JSME/ASME International Conference on Materials and Processing (ICM&P 2008)}, year = 2008, } @inproceedings{CTT100570407, author = {Seiichi Hata and Yuko Aono and Junpei Sakurai and Akira Shimokohbe}, title = {Need-based development of materials for micro and nano scale stractures using combinatorial technology}, booktitle = {Processings of the 25th Sensor Symposium, IEEJ SMS Symposium on Sensors, Micromachines & Applied Systems}, year = 2008, } @inproceedings{CTT100566243, author = {Dongming Sun and Sheng Wang and Seiichi Hata and Junpei Sakurai and Akira Shimokohbe}, title = {Development of the cylindrical ultrasonic linear microactuator}, booktitle = {Processings of the 25th Sensor Symposium, IEEJ SMS Symposium on Sensors, Micromachines & Applied Systems}, year = 2008, } @inproceedings{CTT100565997, author = {井手雄紀 and 大津雅亮 and 櫻井淳平 and 秦誠一 and 高島和希}, title = {Pd基金属ガラス箔のレーザフォーミング}, booktitle = {日本金属学会九州支部日本鉄鋼協会九州支部共催平成20年度合同学術講演大会講演概要集}, year = 2008, } @inproceedings{CTT100566050, author = {Junpei Sakurai and Seiichi Hata and Mitsuhiro Abe and Yuko Aono and Akira Shimokohbe}, title = {Combinatorial evaluation of heat and oxidation resistances of Ni-Nb-Zr thin film amorphous alloys}, booktitle = {5th International Conference on Combinatorial and High-Throughput Materials Science}, year = 2008, } @inproceedings{CTT100566242, author = {Dongming Sun and Sheng Wang and Seiichi Hata and Junpei Sakurai and Akira Shimokohbe}, title = {Driving mechanism and experimental realization of a cylindrical ultrasonic linear microactuator}, booktitle = {34th International Conference on Micro & Nano Engineering}, year = 2008, } @inproceedings{CTT100566013, author = {Yuko Aono and Seiichi Hata and Junpei Sakurai and Akira Shimokohbe}, title = {New Measurement Method for Crystallization Temperature of Thin Film Amorphous Alloy}, booktitle = {Programme of JUNIOR EUROMAT 2008}, year = 2008, } @inproceedings{CTT100566003, author = {Masaaki Otsu and Yuki IDE and Junpei Sakurai and Seiichi Hata and Kazuki Takashima}, title = {Laser Forming of Pd-Based Thin Film Metallic Glass}, booktitle = {Proc. 4th KU-KITECH Symposium on Bulk Metallic Glasses and Advanced Materials}, year = 2008, } @inproceedings{CTT100570385, author = {Wang Sheng and Dongming Sun and Seiichi Hata and Akira Shimokohbe}, title = {A novel cylindrical ultrasonic linear microactuator}, booktitle = {Proceedings of European Society for Precision Engineering and Nanotechnology}, year = 2008, } @inproceedings{CTT100570403, author = {秦 誠一 and 青野祐子 and 櫻井淳平 and 下河邉 明}, title = {線膨張係数のコンビナトリアル評価法}, booktitle = {3大学3研究所連携プロジェクト公開討論会講演概要}, year = 2008, } @inproceedings{CTT100570404, author = {Wang Sheng and Sun Dongming and Hata Seiichi and Shimokohbe Akira}, title = {Standing wave type of the cylindrical ultrasonic linear microactuator(CULM)}, booktitle = {2008年度精密工学会春季大会学術講演会講演論文集}, year = 2008, } @inproceedings{CTT100570405, author = {Sun Dongming and Wang Sheng and Hata Seiichi and Shimokohbe Akira}, title = {Cylindrical ultrasonic linear microactuator with 10mm length stator}, booktitle = {2008年度精密工学会春季大会学術講演会講演論文集}, year = 2008, } @inproceedings{CTT100570406, author = {秦 誠一 and 田邊力也 and 櫻井淳平 and 下河邉 明}, title = {集積化MEMS血球分析チップ}, booktitle = {日本機械学会IIP2008情報・知能・精密機器部門講演会講演論文集}, year = 2008, } @inproceedings{CTT100566012, author = {秦誠一 and 櫻井淳平 and 青野祐子 and 下河邉明}, title = {コンビナトリアル手法によるMEMS用新材料の探索}, booktitle = {日本機械学会情報・知能・精密機器部門講演会講演論文集}, year = 2008, } @inproceedings{CTT100566011, author = {青野祐子 and 櫻井淳平 and 秦誠一}, title = {赤外線カメラを用いたアモルファス合金の結晶化開始温度測定}, booktitle = {2008年第55回応用物理学関係連合講演会講演予稿集}, year = 2008, } @inproceedings{CTT100566000, author = {大津雅亮 and 井手雄紀 and 櫻井淳平 and 秦誠一 and 高島和希}, title = {金属ガラス箔のレーザフォーミング}, booktitle = {平成20年度塑性加工春季講演会講演論文集,}, year = 2008, } @inproceedings{CTT100547829, author = {Junpei Sakurai and Seiichi Hata and Ryusuke Yamauchi and Hiroyuki Tachikawa and Akira Shimokohbe}, title = {Combinatorial Searching for Noble Metal-based Amorphous Alloy Thin Films for Glass Lens Mold}, booktitle = {Proc. of 2007 MRS Fall Meeting}, year = 2007, } @inproceedings{CTT100547834, author = {Yuko Aono and Seiichi Hata and Junpei Sakurai and Ryusuke Yamauchi and Hiroyuki Tachikawa and Akira Shimokohbe}, title = {Basic Research on Combinatorial Evaluation Method for Coefficient of Thermal Expansion}, booktitle = {MRS Proc.}, year = 2007, } @inproceedings{CTT100547831, author = {Mitsuhiro Abe and Seiichi Hata and Ryusuke Yamauchi and Junpei Sakurai and Akira Shimokohbe}, title = {Combinatorial Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Glass Lens Mold}, booktitle = {MRS Proc.}, year = 2007, } @inproceedings{CTT100547817, author = {青野祐子 and 秦誠一 and 山内隆介 and 櫻井淳平 and 下河邉明}, title = {MEMS材料のコンビナトリアル評価 -線膨張係数と縦弾性係数の同時評価法ー}, booktitle = {2007年度 精密工学会秋季大会学術講演会 講演論文集}, year = 2007, } @inproceedings{CTT100547814, author = {櫻井淳平 and 秦誠一 and 山内隆介 and 下河邉明}, title = {高機能ガラスレンズ金型材料の探索I-白金族基非晶質合金の探索-}, booktitle = {2007年度 精密工学会秋季大会学術講演会 講演論文集}, year = 2007, } @inproceedings{CTT100547816, author = {山内隆介 and 秦誠一 and 櫻井淳平 and 下河邉明}, title = {高機能ガラスレンズ金型材料の探索Ⅱ -機械的特性,切削特性の改善ー}, booktitle = {2007年度 精密工学会秋季大会学術講演会 講演論文集}, year = 2007, } @inproceedings{CTT100547819, author = {櫻井淳平 and 山内隆介 and 秦誠一 and 下河邉明}, title = {ガラスレンズ金型白金族アモルファス合金の探索}, booktitle = {日本金属学会講演概要}, year = 2007, } @inproceedings{CTT100547846, author = {Sun Dongming and Wang Sheng and Hata Seiichi and Shimokohbe Akira}, title = {Research on the driving mechanism for a new type of ultrasonic linear microactuator}, booktitle = {2007年度 精密工学会秋季大会学術講演会 講演論文集}, year = 2007, } @inproceedings{CTT100547848, author = {汪 盛 and SUN DONGMING and 秦 誠一 and 下河邉 明}, title = {Design and simulation of cylindrical ultrasonic linear microactuator}, booktitle = {2007年度 精密工学会秋季大会学術講演会 講演集}, year = 2007, } @inproceedings{CTT100547813, author = {Junpei Sakurai and Seiichi Hata and Akira Shimokohbe}, title = {Characteristics of Thin Film Metallic Glass for MEMS and Precise Part}, booktitle = {Proc. Second TIT-BIT Joint Work Shop on Mechanical Engineering}, year = 2007, } @inproceedings{CTT100608134, author = {秦誠一 and 藤田敏充 and 山内隆介 and 櫻井淳平 and 下河邉明}, title = {合金カソードを用いたコンビナトリアルアークプラズマ蒸着法の基礎的研究}, booktitle = {2007年春季第54回応用物理学関連連合講演会講演予稿集}, year = 2007, } @inproceedings{CTT100608133, author = {秦誠一 and 山内隆介 and 櫻井淳平 and 下河邉明}, title = {薄膜金属ガラスと窒化シリコン接合界面の加熱時挙動}, booktitle = {3大学3研究所連携プロジェクト公開討論会講演概要}, year = 2007, } @inproceedings{CTT100508670, author = {木村友治 and 秦誠一 and 櫻井淳平 and 下河邉 明}, title = {バイメタルカンチレバーのプロセス条件のコンビナトリアル探索法}, booktitle = {2007年度精密工学会春季大会 }, year = 2007, } @inproceedings{CTT100535207, author = {木村友治 and 秦 誠一 and 桜井淳平 and 下河辺 明}, title = {バイメタルカンチレバーのプロセス条件のコンビナトリアル探索法}, booktitle = {2007年度精密工学会春季大会学術講演会講演論文集}, year = 2007, } @inproceedings{CTT100535209, author = {秦 誠一 and 山内隆介 and 桜井淳平 and 下河邉 明}, title = {薄膜金属ガラスと窒化シリコン接合界面の加熱時挙動}, booktitle = {3大学3研究所連携プロジェクト公開討論会講演概要}, year = 2007, } @inproceedings{CTT100508450, author = {秦 誠一 and 藤田敏充 and 山内 隆介 and 櫻井 淳平 and 下河邉 明}, title = {合金カソードを用いたコンビナトリアルアークプラズマ蒸着法の基礎的研究}, booktitle = {}, year = 2007, } @inproceedings{CTT100508451, author = {知京豊裕 and 櫻井淳平 and 秦 誠一 and 松本祐司 and 大毛利健治 and 柳生進二郎 and 吉武道子 and 渡部平司 and 山田啓作 and 下河邉 明}, title = {次世代メタルゲート材料としてのアモルファス合金の探査}, booktitle = {}, year = 2007, } @inproceedings{CTT100535201, author = {田邊力也 and 秦 誠一 and 下河辺 明}, title = {MEMSプロセスを応用した,積層型血球分析チップの製作}, booktitle = {2007年度精密工学会春季大会学術講演会講演論文集}, year = 2007, } @inproceedings{CTT100508260, author = {Seiichi Hata and Ryusuke Yamauchi and Junpei Sakurai and Akira Shimokohbe}, title = {The Search for Novel Amorphous Thin Films using Combinatorial Arc Plasma Deposition}, booktitle = {Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology}, year = 2006, } @inproceedings{CTT100506912, author = {Junpei Sakurai and Seiichi Hata and Ryusuke Yamauchi and Akira SHimokohbe}, title = {Searching for Ru-based Amorphous Thin Film and Thin Film Metallic Glass with Combinatorial Arc Plasma Deposition}, booktitle = {Book of Abstract, 4th Inter. Workshop on Combinatorial materials Science & Technology}, year = 2006, } @inproceedings{CTT100566975, author = {秦誠一 and 櫻井淳平 and 下河邉 明}, title = {高機能光学素子金型用アモルファス合金のコンビナトリアル探索}, booktitle = {第14回機械材料・材料加工技術講演会講演論文集}, year = 2006, } @inproceedings{CTT100411556, author = {吉田和弘 and 堀井宣孝 and 秦 誠一 and 横田眞一 and 下河邉明}, title = {薄膜金属ガラスを応用した集積形ERマイクロアクチュエータの開発}, booktitle = {平成18年秋季フルードパワーシステム講演会講演論文集}, year = 2006, } @inproceedings{CTT100529039, author = {吉田和弘 and 堀井宣孝 and 秦 誠一 and 横田眞一 and 下河辺 明}, title = {薄膜金属ガラスを応用した集積形ERマイクロアクチュエータの開発}, booktitle = {平成18年度秋季フィールドパワーシステム講演会講演論文集}, year = 2006, } @inproceedings{CTT100508182, author = {Rikiya Tanabe and Seiichi Hata and Akira Shimokohbe}, title = {A MEMS homoglobin and volume measurement sensor}, booktitle = {Proc. of 23nd Sensor Symposium on Sensors, Micromachines, and Applied Systems}, year = 2006, } @inproceedings{CTT100529044, author = {秦 誠一}, title = {新しいアモルファス合金薄膜のコンビナトリアル創成}, booktitle = {*}, year = 2006, } @inproceedings{CTT100529079, author = {秦 誠一}, title = {薄膜金属ガラスとそのマイクロマシンへの応用}, booktitle = {}, year = 2006, } @inproceedings{CTT100409674, author = {吉田和弘 and 堀井宣孝 and 秦 誠一 and 横田眞一 and 下河邉明}, title = {薄膜金属ガラスを用いた集積形ERマイクロアクチュエータ}, booktitle = {日本機械学会第6回機素潤滑設計部門講演会講演論文集}, year = 2006, } @inproceedings{CTT100529035, author = {秦 誠一 and 赤松宏明 and 福重孝志 and 下河辺 明}, title = {回転型マイクロアクチュエータ ―形状,駆動方法の検討―}, booktitle = {2006年度精密工学会春季大会学術講演会講演論文集}, year = 2006, } @inproceedings{CTT100529032, author = {林 健彦 and 福重孝志 and 秦 誠一 and 下河辺 明}, title = {ビルトインセンサによる静電マイクロアクチュエータの変位制御}, booktitle = {2006年度精密工学会春季大会学術講演会講演論文集}, year = 2006, } @inproceedings{CTT100405110, author = {Seiichi Hata and Ryusuke Yamauchi and Junpei Sakurai and Akira Shimokohbe}, title = {Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy}, booktitle = {Proc. of 2005 MRS Fall Meeting}, year = 2005, } @inproceedings{CTT100405111, author = {Junpei Sakurai and Seiichi Hata and Ryusuke Yamauchi and Akira Shimokohbe}, title = {Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature}, booktitle = {Proc. of 2005 MRS Fall Meeting}, year = 2005, } @inproceedings{CTT100541924, author = {Ryusuke Yamauchi and Seiichi Hata and Junpei Sakurai and Akira Shimokohbe}, title = {Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses}, booktitle = {Proc. of 2005 MRS Fall Meeting}, year = 2005, } @inproceedings{CTT100405114, author = {Rikiya Tanabe and Seiichi Hata and Akira Shimokohbe}, title = {A MEMS complete blood count sensor with vanes}, booktitle = {Proc. of 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems}, year = 2005, } @inproceedings{CTT100391049, author = {吉田和弘 and 堀井宣孝 and 秦 誠一 and 横田眞一 and 下河邉明}, title = {薄膜金属ガラスを用いた多自由度流体マイクロアクチュエータの提案}, booktitle = {日本機械学会山梨講演会講演論文集}, year = 2005, } @inproceedings{CTT100405113, author = {Seiichi Hata and Takashi Fukushige and Hiroyuki Tachikawa and Akira Shimokohbe}, title = {Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass}, booktitle = {Proc. of 18th International Congress of Mechanical Engineering (COBEM 2005)}, year = 2005, } @inproceedings{CTT100405118, author = {赤松宏明 and 秦 誠一 and 福重 孝志 and 下河辺 明}, title = {基板面外回転マイクロアクチュエータの基礎研究}, booktitle = {2005年度精密工学会秋季大会学術講演会講演論文集}, year = 2005, } @inproceedings{CTT100405116, author = {R. Tanabe and S. Hata and A. Shimokohbe}, title = {A complete blood count micro sensor designed to reduce noise from electrolysis gas}, booktitle = {Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005)}, year = 2005, } @inproceedings{CTT100405115, author = {T. Fukushige and S. Hata and A. Shimokohbe}, title = {Integrated conical spring linear actuators for tilting-mirror applications}, booktitle = {Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005)}, year = 2005, } @inproceedings{CTT100405119, author = {秦 誠一 and 山内隆介 and 桜井淳平 and 下河邉 明}, title = {カソーディックアークプラズマ蒸着を用いたコンビナトリアルマテリアル合成Ⅰ}, booktitle = {2005年秋季第66回応用物理学会学術講演会予稿集}, year = 2005, } @inproceedings{CTT100405120, author = {山内隆介 and 秦 誠一 and 桜井淳平 and 下河邉 明}, title = {カソーディックアークプラズマ蒸着を用いたコンビナトリアルマテリアル合成Ⅱ}, booktitle = {2005年秋季第66回応用物理学会学術講演会予稿集}, year = 2005, } @inproceedings{CTT100608132, author = {秦誠一 and 櫻井淳平 and 下河邉明}, title = {MEMS用材料としての薄膜金属ガラスとその微細加工}, booktitle = {日本鉄鋼協会第11回ヤングサイエンティストフォーラム講演論文集}, year = 2005, } @inproceedings{CTT100405121, author = {吉田和弘 and 堀井宣孝 and 秦 誠一 and 横田眞一 and 下河辺 明}, title = {薄膜金属ガラスを用いた多自由度流体マイクロアクチュエータの提案}, booktitle = {日本機械学会関東支部山梨ブロック山梨講演会講演論文集}, year = 2005, } @inproceedings{CTT100405117, author = {T. Fukushige and S. Hata and Takehiko Hayashi and A. Shimokohbe}, title = {Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range}, booktitle = {Proc. IPACK2005}, year = 2005, } @inproceedings{CTT100405122, author = {秦 誠一 and 桜井淳平 and 下河辺明}, title = {MEMS用材料としての薄膜金属ガラスとその微細加工}, booktitle = {日本鉄鋼協会第11回ヤングサイエンティストフォーラム講演論文集}, year = 2005, } @inproceedings{CTT100405123, author = {西ヶ谷啓太 and 秦 誠一 and 桜井淳平 and 下河辺明}, title = {薄膜金属ガラスのマイクロブロー成形}, booktitle = {2005年度精密工学会春季大会学術講演会講演論文集}, year = 2005, } @inproceedings{CTT100405124, author = {秦 誠一}, title = {マイクロ機能デバイス用材料としての薄膜金属ガラスとその応用}, booktitle = {日本機械学会第18回マイクロデバイス設計・製造・実装に関する研究会資料}, year = 2005, } @inproceedings{CTT100540197, author = {Seiichi Hata and Junpei Sakurai and Akira Shimokohbe}, title = {Thin Film Metallic Glasses as New MEMS Materials}, booktitle = {Technical Digest of The 18th IEEE International Conference on MEMS 2005}, year = 2005, } @inproceedings{CTT100540201, author = {秦 誠一 and 福重孝志}, title = {新しい静電型MEMSアクチュエータ=円すいばねMEMSアクチュエータとその固着防止駆動法=}, booktitle = {光アライアンス}, year = 2004, } @inproceedings{CTT100540198, author = {秦誠一}, title = {薄膜金属ガラスを用いた新形態のマイクロアクチュエータ}, booktitle = {精密工学会超精密位置決め専門委員会定例会講演前刷集}, year = 2004, } @inproceedings{CTT100540199, author = {秦誠一}, title = {薄膜金属ガラスの微細成形加工とそのMEMSへの応用}, booktitle = {第2回塑性加工フォーラム}, year = 2004, } @inproceedings{CTT100387986, author = {S. Hata and H. W. JEONG and A. Shimokohbe}, title = {2-DOF thin film metallic glass microactuator}, booktitle = {Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004)}, year = 2004, } @inproceedings{CTT100608131, author = {Seiichi Hata and Takashi Yamanaka and Junpei Sakurai and Akira Shimokohbe}, title = {Micro dome shape structures made of thin film metallic glass}, booktitle = {Micro System Technology 2003 (MST '03)}, year = 2003, } @inproceedings{CTT100489505, author = {J. Sakurai and S. Hata and A. Shimokohbe}, title = {Reduction of Electrical Resistivity in PdCuSi Thin Film Metallic Glass}, booktitle = {Proc. International Conference on Advanced Technology in Experimental Mechnics 2003}, year = 2003, } @misc{CTT100620477, author = {青野祐子 and 秦誠一}, title = {薄膜アモルファス合金のコンビナトリアル評価法}, year = 2009, } @misc{CTT100570408, author = {秦誠一}, title = {コンビナトリアル技術を用いた新しいMEMS材料の探索}, year = 2008, } @misc{CTT100570409, author = {秦誠一}, title = {2008年機械工学年鑑,6.2.6特殊加工}, year = 2008, } @misc{CTT100595943, author = {Seiichi Hata}, title = {薄膜金属ガラスとその三次元マイクロ構造体への応用}, year = 2002, } @misc{CTT100594767, author = {Seiichi Hata}, title = {超精密加工用微小変位台の研究}, year = 1994, } @misc{CTT100674899, author = {秦誠一 and 渡辺 茂高 and 新井 克美}, title = {揺動素子、アクチュエータ装置、光走査装置、並びに金属薄膜体及び光走査装置の製造方法}, howpublished = {公開特許}, year = 2014, month = {}, note = {特願2013-175803(2013/08/27), 特開2014-063152(2014/04/10)} } @misc{CTT100645051, author = {秦誠一 and 櫻井淳平 and 小迫 景嗣 and 向井 伸幸 and 大沼 恵則}, title = {圧力検出装置}, howpublished = {登録特許}, year = 2014, month = {}, note = {特願2010-291240(2010/12/27), 特開2012-137435(2012/07/19), 特許第5663120号(2014/12/12)} } @misc{CTT100644409, author = {秦誠一 and 渡辺 茂高 and 鈴木 成己 and 新井 克美}, title = {振動素子、光走査装置、アクチュエータ装置、映像投影装置及び画像形成装置}, howpublished = {公開特許}, year = 2012, month = {}, note = {特願2010-262458(2010/11/25), 特開2012-113146(2012/06/14)} } @misc{CTT100617093, author = {秦誠一 and 下河邉明 and 孫 東明 and 汪 盛 and 根岸 真人 and 明正 謙}, title = {アクチュエータ}, howpublished = {公開特許}, year = 2010, month = {}, note = {特願2009-050105(2009/03/04), 特開2010-206950(2010/09/16)} } @misc{CTT100607744, author = {秦誠一 and 櫻井淳平 and 青野 祐子}, title = {相転移する試料の相転移条件の測定方法およびそのための測定装置}, howpublished = {公開特許}, year = 2010, month = {}, note = {特願2008-211974(2008/08/20), 特開2010-048618(2010/03/04)} } @misc{CTT100593870, author = {秦誠一 and 竹村 統治}, title = {アモルファス円筒製造装置及びアモルファス円筒製法}, howpublished = {登録特許}, year = 2012, month = {}, note = {特願2008-063303(2008/03/12), 特開2009-215636(2009/09/24), 特許第5163875号(2012/12/28)} } @misc{CTT100592298, author = {秦誠一 and 阿川 義昭 and 山口 広一 and 松浦 正道 and 伊藤 久美}, title = {同軸型真空アーク蒸着源及び蒸着装置}, howpublished = {公開特許}, year = 2009, month = {}, note = {特願2008-021310(2008/01/31), 特開2009-179863(2009/08/13)} } @misc{CTT100572941, author = {秦誠一 and 下河邉明 and 田邊 力也 and 末沢 真樹}, title = {血球計数検査チップおよびこれを使用する血球計数検査装置}, howpublished = {公開特許}, year = 2008, month = {}, note = {特願2006-269553(2006/09/29), 特開2008-089382(2008/04/17)} } @misc{CTT100573060, author = {秦誠一 and 山内 隆介 and 櫻井淳平 and 下河邉明 and 栄 顕一郎 and 齋藤 敦史 and 原 泰博 and 阿川 義昭}, title = {同軸型真空アーク蒸着源及びこれを用いた蒸着装置}, howpublished = {登録特許}, year = 2011, month = {}, note = {特願2006-118144(2006/04/21), 特開2007-291426(2007/11/08), 特許第4725969号(2011/04/22)} } @misc{CTT100626134, author = {秦誠一 and 山内 隆介 and 櫻井淳平 and 下河邉明 and 栄 顕一郎 and 齋藤 敦史 and 原 泰博 and 阿川 義昭}, title = {同軸型真空アーク蒸着源及びこれを用いた蒸着装置}, howpublished = {登録特許}, year = 2011, month = {}, note = {特願2006-118144(2006/04/21), 特開2007-291426(2007/11/08), 特許第4725969号(2011/04/22)} } @misc{CTT100572973, author = {秦誠一 and 山内 隆介 and 櫻井淳平 and 下河邉明 and 栄 顕一郎 and 齋藤 敦史 and 原 泰博 and 阿川 義昭}, title = {同軸型真空アーク蒸着源及びこれを用いた蒸着装置}, howpublished = {登録特許}, year = 2012, month = {}, note = {特願2006-118143(2006/04/21), 特開2007-291425(2007/11/08), 特許第4977864号(2012/04/27)} } @misc{CTT100626424, author = {秦誠一 and 下河邉 明 and 田邊 力也}, title = {CBCセンサの製造方法}, howpublished = {登録特許}, year = 2010, month = {}, note = {特願2005-238268(2005/08/19), 特開2007-051964(2007/03/01), 特許第4595137号(2010/10/01)} } @misc{CTT100572797, author = {秦誠一 and 山内 隆介 and 櫻井淳平 and 下河邉 明}, title = {コンビナトリアルマテリアル用評価基板}, howpublished = {登録特許}, year = 2010, month = {}, note = {特願2005-131915(2005/04/28), 特開2006-308443(2006/11/09), 特許第4560628号(2010/08/06)} } @phdthesis{CTT100595943, author = {Seiichi Hata}, title = {薄膜金属ガラスとその三次元マイクロ構造体への応用}, school = {東京工業大学}, year = 2002, } @mastersthesis{CTT100594767, author = {Seiichi Hata}, title = {超精密加工用微小変位台の研究}, school = {東京工業大学}, year = 1994, }