@article{CTT100830088, author = {"M.S. Hadi" and "N. Sugii" and "H. Wakabayashi" and "K. Tsutsui" and "H. Iwai" and "K. Kakushima"}, title = {Resistive switching properties of a thin SiO2 layer with CeOx buffer layer on n+ and p+ Si bottom electrodes}, journal = {Microelectronics Reliability}, year = 2016, } @article{CTT100830371, author = {"Mokh Hadi" and "Shinichi Kano" and "Kuniyuki Kakushima" and "Yoshinori Kataoka" and "Akira Nishiyama" and "Nobuyuki Sugii" and "Hitoshi Wakabayashi" and "Kazuo Tsutsui" and "Kenji Natori" and "Hiroshi Iwai"}, title = {A resistive switching device based on breakdown and anodic reoxidization of thin SiO2 on Si-based Electrodes using CeOx buffer layer}, journal = {Semiconductor Science and Technology}, year = 2014, } @article{CTT100830384, author = {"Y. Wu" and "H. Hasegawa" and "K. Kakushima" and "K. Ohmori" and "T. Watanabe" and "A. Nishiyama" and "N. Sugii" and "H. Wakabayashi" and "K. Tsutsui" and "Y. Kataoka" and "K. Natori" and "K. Yamada" and "H. Iwai"}, title = {A novel hetero-junction Tunnel-FET using Semiconducting silicide-Silicon contact and its scalability}, journal = {Microelectronics Reliability}, year = 2014, } @article{CTT100830585, author = {"Chunmeng Dou" and "Tomoya Shoji" and "Kazuhiro Nakajima" and "Kuniyuki Kakushima" and "Parhat Ahmet" and "Yoshinori Kataoka" and "Akira Nishiyama" and "Nobuyuki Sugii" and "Hitoshi Wakabayashi" and "Kazuo Tsutsui" and "Kenji Natori" and "Hiroshi Iwai"}, title = {Characterization of interface state density of three-dimensional Si nanostructure by charge pumping measurement}, journal = {Microelectronics Reliability}, year = 2014, } @article{CTT100830499, author = {"T. Kawanago" and "K. Kakushima" and "Y. Kataoka" and "A. Nishiyama" and "N. Sugii" and "H. Wakabayashi" and "K. Tsutsui" and "K. Natori" and "H. Iwai"}, title = {Gate Technology Contributions to Collapse of Drain Current in AlGaN/GaN Schottky HEMT}, journal = {IEEE Transaction on Electron Devices(T-ED)}, year = 2014, } @article{CTT100830501, author = {"K. Tuokedaerhan" and "K. Kakushima" and "Y. Kataoka" and "A. Nishiyama" and "N. Sugii" and "H. Wakabayashi" and "K. Tsutsui" and "K. Natori" and "H. Iwai"}, title = {Atomically flat La-silicate/Si interface using tungsten carbide gate electrode with nano-sized grain}, journal = {Applied Physics Letters (APL)}, year = 2014, } @article{CTT100830612, author = {"K. Tuokedaerhan" and "R. Tan and K. Kakushima" and "P. Ahmet" and "Y. Kataoka" and "A. Nishiyama" and "N. Sugii" and "H. Wakabayashi" and "K. Tsutsui" and "K. Natori" and "T. Hattori" and "H. Iwai"}, title = {Stacked sputtering process for Ti, Ta, and W carbide formation for gate metal application}, journal = {Applied Physics Letters (APL)}, year = 2013, } @article{CTT100658805, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and takeo hattori and Kenji Natori and HIROSHI IWAI}, title = {Comparative study of electrical characteristics in(100) and (110)surface-oriented nMOSFETs with direct contact La-silicate/Si interface structure}, journal = {Solid-State Electronics}, year = 2013, } @article{CTT100658723, author = {DARYOUSH ZADEH and Hiroshi Oomine and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and Hiroshi Nohira and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {La2O3/Ino.53Ga.0.47As metal-oxide-semiconductor capacitor with low interface state density using TiN/W gate alectrode}, journal = {Solid-State Electronics}, year = 2013, } @article{CTT100658722, author = {Y. Wu and 竇春萌 and F. Wei and Kuniyuki KAKUSHIMA and 大毛利健治 and パールハットアヘメト and T. Watanabe and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and Keisaku Yamada and 片岡好則 and takeo hattori and HIROSHI IWAI}, title = {Influence of Structural Parameters on Electrical Characteristics of Schottky Tunneling Field-Effect Transistor and Its Scalability}, journal = {Japanese Journal of Applied Physics}, year = 2013, } @article{CTT100647654, author = {Takamasa Kawanago and Yeonghun Lee and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Experimental study of electron mobility characterization in direct contact La-silicate/Si structure based nMOSFETs}, journal = {Solid-State Electronics}, year = 2012, } @article{CTT100647652, author = {マイマイティ マイマイティレャアティ and 久保田透 and 関拓也 and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 片岡好則 and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Oxide and interface trap densities estimation in ultrathin W/ La2O3/Si MOS capacitors}, journal = {Microelectronics Reliability}, year = 2012, } @article{CTT100647649, author = {C. Dou and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Resistive switching behavior of a CeO2 based ReRAM cell incorporated with Si buffer layer}, journal = {Microelectronics Reliability}, year = 2012, } @article{CTT100647591, author = {マイマイティ マイマイティレャアティ and Miyuki Kouda and Kuniyuki KAKUSHIMA and Hiroshi Nohira and Ahmet Parhat and 片岡好則 and 西山彰 and KAZUO TSUTSUI and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Valance number transition and silicate formation of cerrium oxide on Si(100)}, journal = {Vacuum}, year = 2012, } @article{CTT100647590, author = {マイマイティ マイマイティレャアティ and Miyuki Kouda and Takamasa Kawanago and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 片岡 好則 and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {The effect of remote Coulomb scattering on electron mobility in La2O3 gate stacked MOSFETs}, journal = {Semiconductor Science and Technology}, year = 2012, } @article{CTT100647588, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Covalent Nature in La-Silicate Gate Dielectrics for Oxygen Vacancy Removal2}, journal = {IEEE ELECTRON DEVICE LETTERS}, year = 2012, } @article{CTT100647573, author = {Takamasa Kawanago and Yeonghun Lee and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {EOT of 0.62 nm and High Electron Mobility in La-silicate/Si Structure Based nMOSFETs Achieved by Utilizing Metal-Inserted Poly-Si Stacks and Annealing at High Temperature}, journal = {IEEE Transactions on Electron Devices}, year = 2012, } @article{CTT100647574, author = {Takamasa Kawanago and 鈴木 拓也 and Yeonghun Lee and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Compensation of oxygen defects in La-silicate gate dielectrics for improving effective mobility in high-k/metal gate MOSFET using oxygen annealing process}, journal = {Solid-State Electronics}, year = 2012, } @article{CTT100647422, author = {来山大祐 and 久保田透 and Tomotsune Koyanagi and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {[ 183] D. Kitayama, T. Kubota, T. Koyonagi, K. Kakushima, P. Ahmet, K. Tsutsui, A. Nishiyama, N. Sugii, K. Natori, T. Hattori, H. Iwai, “Silicate Reaction Control at Lanthanum Oxide and Silicon Interface for Equivalent Oxide Thickness of 0.5nm* Adjustment of Amount of Residual Oxygen Atoms in Metal Layer”, Japanese Journal of Applied Physics, Vol.50, No.10, pp.10PA05-1-5, October, 2011}, journal = {Japanese Journal of Applied Physics}, year = 2011, } @article{CTT100647417, author = {Miyuki Kouda and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Rare Earth Oxide Capping Effect on La2O3 Gate Dielectrics for Equivalent Oxide Thickness Scaling toward 0.5nm}, journal = {Japanese Journal of Applied Physics}, year = 2011, } @article{CTT100647421, author = {ダリューシュザデ and Takashi Kanda and 山下晃司 and Kuniyuki KAKUSHIMA and Hiroshi Nohira and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Capacitance-Voltage Characterization of La2O3 Metal-Oxide-Semiconductor Structures on Ino.53Ga.0.47As Substrate with Different Surface Treatment Methods}, journal = {Japanese Journal of Applied Physics}, year = 2011, } @article{CTT100626838, author = {ダリューシュザデ and Kuniyuki KAKUSHIMA and Takashi Kanda and Y.C.Lin and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and E.Y.Chang and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Improving electrical characteristics of W/HfO2/Ino.53Gao.47As gate stacks by altering deposition techniques}, journal = {Microelectronic Engineering}, year = 2011, } @article{CTT100626839, author = {来山大祐 and Tomotsune Koyanagi and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Effect of thin Si insertion at metal gate/high-k interface on electrical characteristics of MOS device with La2 O3}, journal = {Microelectronic Engineering}, year = 2011, } @article{CTT100621281, author = {DARYOUSH ZADEH and Soshi Sato and Kuniyuki KAKUSHIMA and A. Srivastava and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and C.K. Sarkar and HIROSHI IWAI}, title = {Effects of La2O3 incorporation in HfO2 gated nMOSFETs on low-frequency noise}, journal = {Microelectronics Reliability}, year = 2011, } @article{CTT100614619, author = {Kuniyuki KAKUSHIMA and Koichi Okamoto and Tomotsune Koyanagi and Miyuki Kouda and Kiichi Tachi and Takamasa Kawanago and Jaeyeol Song and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Selection of rare earth silicates for highly scaled gate dielectrics}, journal = {Microelectronic Engineering}, year = 2010, } @article{CTT100607472, author = {Kuniyuki KAKUSHIMA and Kiichi Tachi and M.Adachi and Koichi Okamoto and Soshi Sato and Jaeyeol Song and Takamasa Kawanago and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Interface and electrical properties of La-silicate for direct contact of high-k with silicon}, journal = {Solid-State Electronics}, year = 2010, } @article{CTT100607582, author = {M.K. Bera and Jaeyeol Song and Ahmet Parhat and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Yttrium-scandium oxide as high-k gate dielectric for germanium metal-oxide-semiconductor devices}, journal = {SEMICONDUCTOR SCIENCE AND TECHNOLOGY}, year = 2010, } @article{CTT100613519, author = {M.K.Bera and Jaeyeol Song and Ahmet Parhat and Kuniyuki KAKUSHIMA and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Yttrium-scandium oxide as high-k gate dielectric for germanium metal-oxide-semiconductor devices}, journal = {SEMICONDUCTOR SCIENCE AND TECHNOLOGY}, year = 2010, } @article{CTT100604483, author = {Kuniyuki KAKUSHIMA and Koichi Okamoto and Tomotsune Koyanagi and Miyuki Kouda and Kiichi Tachi and Takamasa Kawanago and Jaeyeol Song and Ahmet Parhat and Hiroshi Nohira and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {SrO capping effect for La2O3/ Ce-Silicate gate dielectrics}, journal = {Microelectronics Reliability 50}, year = 2010, } @article{CTT100607464, author = {Kuniyuki KAKUSHIMA and M. Nakagawa and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Radio-frequency performance of a sub-100 nm metal-oxide field-effect transistor with high-k gate dielectric}, journal = {Semiconductor Science and Technology}, year = 2010, } @article{CTT100607466, author = {Kuniyuki KAKUSHIMA and Tomotsune Koyanagi and Kiichi Tachi and Jaeyeol Song and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Characterization of flatband voltage roll-off and roll-up behavior in La2O3/silicate gate dielectric}, journal = {Solid-State Electronics}, year = 2010, } @article{CTT100588545, author = {Tomotsune Koyanagi and Kiichi Tachi and Koichi Okamoto and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Electrical Characterization of La2O3-Gated Metal Oxide Semiconductor Field Effect Transistor with Mg Incorporation}, journal = {Japanese Journal of Applied Physics}, year = 2009, } @article{CTT100600446, author = {Kuniyuki KAKUSHIMA and Kiichi Tachi and Jaeyeol Song and Soshi Sato and Hiroshi Nohira and E. Ikenaga and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Comprehensive x-ray photoelectron spectroscopy study on compositional gradient lanthanum silicate film}, journal = {JOURNAL OF APPLIED PHYSICS}, year = 2009, } @article{CTT100588755, author = {Ahmet Parhat and 中川健太郎 and Kuniyuki KAKUSHIMA and Hiroshi Nohira and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of MOSFETs with La2O3/Y2O3 gate stack}, journal = {Microelectronics Reliability}, year = 2008, } @article{CTT100588982, author = {Kuniyuki KAKUSHIMA and K. Okamoto and M. Adachi and Kiichi Tachi and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Origin of flat band voltage shift in HfO2 gate dielectric with La2O3 insertion}, journal = {SOLID-STATE ELECTRONICS}, year = 2008, } @article{CTT100586827, author = {Ahmet Parhat and Nakagawa Kentaro and Kuniyuki KAKUSHIMA and Hiroshi Nohira and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of MOSFETs with La2O3/Y2O3 gate stack}, journal = {Microelectronics Reliability 48}, year = 2008, } @article{CTT100588886, author = {Reyes Joel Molina and A. Torres and W. Calleja and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Degradation and breakdown of W-La2O3 stack after annealing in N-2}, journal = {JAPANESE JOURNAL OF APPLIED PHYSICS}, year = 2008, } @article{CTT100586853, author = {Takamasa Kawanago and Kiichi Tachi and Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Electrical characterization of directly deposited La-Sc oxides complex for gate insulator application}, journal = {Microelectronic Engineering}, year = 2007, } @article{CTT100586854, author = {Soshi Sato and Kiichi Tachi and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Thermal-stability improvement of LaON thin film formed using nitrogen radicals}, journal = {Microelectronic Engineering}, year = 2007, } @article{CTT100586852, author = {Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Improvement of interfacial properties with interfacial layer in La2O3 / Ge structure}, journal = {Microelectronic Engineering}, year = 2007, } @inproceedings{CTT100830263, author = {T. Shoji and K. Kakushima and Y. Kataoka and A. Nishiyama and N. Sugii and H. Wakabayashi and K. Tsutsui and K. Natori and H. Iwai}, title = {Effect of Surface Potential Control and Interface States for Silicon Nanowire Solar Cells}, booktitle = {}, year = 2014, } @inproceedings{CTT100830481, author = {H. Hasegawa and Y.Wu and J.Song and K. Kakushima and Y.Kataoka and A. Nishiyama and N. Sugii and H. Wakabayashi and K. Tsutsui and K. Natori and H. Iwai}, title = {Improvement of tunnel FET performance using narrow bandgap semiconductor silicide /Si hetero-structure source electrod}, booktitle = {}, year = 2014, } @inproceedings{CTT100830480, author = {M. Motoki and K. Kakushima and Y. Kataoka and A. Nishiyama and N. Sugii and H.Wakabayashi and K. Tsutsui and K. Natori and H. Iwai}, title = {Effect of Annealing Temperature on Sheet Resistance of Ni Germanide Formed by Multi-Layered Ni and Ge Films}, booktitle = {}, year = 2014, } @inproceedings{CTT100830478, author = {T. Kato and T.Inamura and A.Sasaki and K.Aoki and K.Kakushima and Y.Kataoka and A. Nishiyama and N. Sugii and H.Wakabayashi and K. Tsutsui and K. Natori and H. Iwai}, title = {Thickness-dependent electrical characterization of β‐FeSi2}, booktitle = {}, year = 2014, } @inproceedings{CTT100830473, author = {Y. Ito and H. Hori and K. Tsutsui and K. Kakushima and H. Wakabayashi and Y.Kataoka and A.Nishiyama and N. Sugii and K. Natori and H. Iwai}, title = {Proposal of junction formation process for solar cells made of silicon microstructures}, booktitle = {}, year = 2014, } @inproceedings{CTT100830277, author = {T. Ohashi and H. Wakabayashi and K. Kakushima and N. Sugii and A. Nishiyama and Y. Kataoka and K. Natori and K. Tsutsui and H. Iwai}, title = {Performance Prediction on n-MOSFET using Single-Layer MoS2 Channel}, booktitle = {}, year = 2014, } @inproceedings{CTT100830485, author = {Chunmeng Dou and Kakushima and Y. Kataoka and A. Nishiyama and N. Sugii and H. Wakabayashi and K. Tsutsui and K. Natori and H. Iwai}, title = {Determination of oxide traps distribution in high-k/InGaAs MOS capacitor by capacitance-voltage measurement}, booktitle = {}, year = 2014, } @inproceedings{CTT100830484, author = {M. Okamoto and K. Kakushima and Y. Kataoka and A. Nishiyama and N. Sugii and H. Wakabayashi and K. Tsutsui and H. Iwai and W. Saito}, title = {An Ohmic contact process for AlGaN/GaN Structures using TiSi2 electrodes}, booktitle = {}, year = 2014, } @inproceedings{CTT100830483, author = {Y. Nakamura and K. Kakushima and Y. Kataoka and A. Nishiyama and H. Wakabayashi and N. Sugii and K. Tsutsui and K. Natori and H. Iwai}, title = {Measurement of flat-band voltage shift using multi-stacked dielectric film}, booktitle = {}, year = 2014, } @inproceedings{CTT100673477, author = {長谷川明紀 and 呉研 and 宋 禛漢 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Mg/Si極薄膜積層の熱処理を用いて作製したMg2Siの赤外線吸収特性評価}, booktitle = {}, year = 2014, } @inproceedings{CTT100673475, author = {小路智也 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Siナノワイヤー曲面における保護膜界面準位密度の研究}, booktitle = {}, year = 2014, } @inproceedings{CTT100673474, author = {岡本真里 and 松川佳弘 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 大橋弘通 and 岩井洋 and 齋藤渉}, title = {TiB2電極の熱処理によるAlGaN/GaNへのコンタクト特性の変化}, booktitle = {}, year = 2014, } @inproceedings{CTT100673473, author = {今村浩章 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {積層シリサイド化スパッタプロセスにより作成したNiシリサイドショットキーダイオードの評価}, booktitle = {}, year = 2014, } @inproceedings{CTT100673472, author = {吉原亮 and 元木雅章 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Pを導入したNiSi2/n-Geコンタクトの電気特性と不純物拡散の様子}, booktitle = {}, year = 2014, } @inproceedings{CTT100673471, author = {細田修平 and Tuokedaerhan Kamale and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {W2C電極導入によるLa-silicate/Siにおける平坦な界面の実現}, booktitle = {}, year = 2014, } @inproceedings{CTT100673468, author = {関拓也 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Si(110),(111)基盤上で熱処理による界面反応で形成したLa-silicateゲート絶縁膜の物理的理解に関する研究}, booktitle = {}, year = 2014, } @inproceedings{CTT100673467, author = {大嶺洋 and ザデハサン ダリユーシユ and 角嶋邦之 and 西山彰 and 杉井信之 and 片岡好則 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {La2O3/ InGaAs界面ラフネスに及ぼすALDプロセスの影響}, booktitle = {}, year = 2014, } @inproceedings{CTT100673466, author = {稲村太一 and 嘉藤貴史 and 佐々木亮人 and 青木克明 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {β-FeSi2の抵抗率熱処理依存性}, booktitle = {}, year = 2014, } @inproceedings{CTT100673464, author = {LiWei and 佐々木亮人 and 大図 秀行 and 青木克明 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {単斜晶WO3薄膜抵抗率の熱処理依存性}, booktitle = {}, year = 2014, } @inproceedings{CTT100673463, author = {陳江寧 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋 and 齋藤渉}, title = {La2O3ゲート絶縁膜を用いたAlGaN/GaNデバイスのプロセス依存性}, booktitle = {}, year = 2014, } @inproceedings{CTT100673462, author = {呉研 and 長谷川明紀 and 角嶋邦之 and 渡辺 孝信 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Mg2Si-Siヘテロ接合トンネルFET特性の構造依存性}, booktitle = {}, year = 2014, } @inproceedings{CTT100673460, author = {Tuokedaerhan Kamale and Shuhei Hosoda and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {W2Cゲート電極によるLa-silicate MOSFETの移動度改善}, booktitle = {}, year = 2014, } @inproceedings{CTT100673418, author = {ザデハサン ダリユーシユ and 大嶺洋 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {低界面準位とsub-nm CETを有するLa2O3/ In0.53Ga0.47Asゲートスタックの実現}, booktitle = {}, year = 2014, } @inproceedings{CTT100673381, author = {小路智也 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {立体Si構造における局所的な界面準位密度の抽出}, booktitle = {}, year = 2014, } @inproceedings{CTT100673190, author = {Atsushi Takemasa and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Electrical characteristics of n-type diamond contacts with Ti, Ni, NiSi2 and Ni3P electrodes}, booktitle = {}, year = 2014, } @inproceedings{CTT100673189, author = {Takumi Ohashi and Hitoshi Wakabayashi and Kuniyuki KAKUSHIMA and Nobuyuki Sugii and Akira Nishiyama and Yoshinori Kataoka and Kenji Natori and KAZUO TSUTSUI and HIROSHI IWAI}, title = {Performance Prediction on n-MOSFET using Single-Layer MoS2 Channel}, booktitle = {}, year = 2014, } @inproceedings{CTT100673188, author = {Hayato Hori and Yuuma Itou and KAZUO TSUTSUI and Kuniyuki KAKUSHIMA and Hitoshi Wakabayashi and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and HIROSHI IWAI}, title = {Effects of substrate back bias on solar cells formed on thin SOI structures}, booktitle = {}, year = 2014, } @inproceedings{CTT100673180, author = {Yuuma Itou and Hayato Hori and KAZUO TSUTSUI and Kuniyuki KAKUSHIMA and Hitoshi Wakabayashi and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and HIROSHI IWAI}, title = {Schottky barrier height reduction process for silicide/Si interfaces}, booktitle = {}, year = 2014, } @inproceedings{CTT100673145, author = {Yoshihiro Matsukawa and Mari Okamoto and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {An Ohmic Contact Process for AlGaN/GaN Structures using TiCElectrode}, booktitle = {}, year = 2014, } @inproceedings{CTT100673095, author = {Takafumi Katou and Taichi Inamura and 佐々木亮人 and 青木克明 and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Electrical characteristic of b-FeSi2}, booktitle = {}, year = 2014, } @inproceedings{CTT100673093, author = {雷 一鳴 and Shu Munekiyo and Kuniyuki KAKUSHIMA and Takamasa Kawanago and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI and M. Furuhashi and N. Miura and S. Yamakawa}, title = {Interface reaction analysis of La2O3/SiC upon annealing by ATR-FTIR}, booktitle = {}, year = 2014, } @inproceedings{CTT100672974, author = {Masaaki Motoki and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Dependence between Sheet Resistance and Annealing Temperature of Ni Germanide Formed by Multi-Layered Ni and Ge Films}, booktitle = {}, year = 2014, } @inproceedings{CTT100672973, author = {Hiroki Hasegawa and Y. Wu and 宋 禛漢 and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {The Workshop on Future Trend of Nanoelectronics:WIMNACT 39}, booktitle = {}, year = 2014, } @inproceedings{CTT100672972, author = {Yoshinori Nakamura and Kuniyuki KAKUSHIMA and 片岡好則 and Akira Nishiyama and Hitoshi Wakabayashi and Nobuyuki Sugii and HIROSHI IWAI}, title = {Measurement of flat-band voltage shift using multi-stacked dielectric film}, booktitle = {}, year = 2014, } @inproceedings{CTT100672971, author = {Tomoya Shoji and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Silicon Nanowire Solar Cells: Surface Passivation and Interface Analysis}, booktitle = {}, year = 2014, } @inproceedings{CTT100672969, author = {Hiroaki Imamura and Taichi Inamura and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Characterization of Thin NiSi2 Films by Stacked Silicidation Sputtering Process with Kr Gas}, booktitle = {}, year = 2014, } @inproceedings{CTT100672968, author = {宋 禛漢 and Kazuki Matsumoto and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Reduction of the resistivities of Ni Silicide formed by the reaction of Si nanowire and Ni thin films}, booktitle = {}, year = 2014, } @inproceedings{CTT100672967, author = {吉原亮 and Masaaki Motoki and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Interface control process toward un-pinned metal/germanium Schottky contact}, booktitle = {}, year = 2014, } @inproceedings{CTT100672966, author = {Shuhei Hosoda and Kamale Tuokedaerhan and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Atomically flat interface of La-silicate/Si with W2C gate electrodes}, booktitle = {}, year = 2014, } @inproceedings{CTT100672964, author = {Atsushi Takemasa and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Electrical characteristics of Ti, Ni, NiSi2 and Ni3P/n-diamond contacts}, booktitle = {}, year = 2014, } @inproceedings{CTT100672963, author = {関拓也 and Kuniyuki KAKUSHIMA and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Physical understanding of La-silicate gate dielectrics thermally formed by interface reaction on Si(110) and (111)}, booktitle = {}, year = 2014, } @inproceedings{CTT100672961, author = {Hiroshi Oomine and DARYOUSH ZADEH and Kuniyuki KAKUSHIMA and Akira Nishiyama and Nobuyuki Sugii and 片岡好則 and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Effect of pretreatment for high-/k//InGaAs interface property}, booktitle = {}, year = 2014, } @inproceedings{CTT100672910, author = {Taichi Inamura and Takafumi Katou and 佐々木亮人 and 青木克明 and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A study on silicide semiconductors for high efficiency thin film photovoltaic devices}, booktitle = {}, year = 2014, } @inproceedings{CTT100672909, author = {Jiangning Chen and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI and 齋藤渉}, title = {Electrical characteristics of AlGaN/GaN HEMT with La2O3 gate dielectricsn}, booktitle = {}, year = 2014, } @inproceedings{CTT100672427, author = {K. Tuokedaerhan and Shuhei Hosoda and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Mobility Improvement of La-silicate MOSFET by W2C Gate Electrode}, booktitle = {K. Tuokedaerhan, S. Hosoda, K. Kakushima, Y. Kataoka, A. Nishiyama, N. Sugii, H. Wakabayashi, K. Tsutsui, K. Natori, H. Iwai, “Mobility Improvement of La-silicate MOSFET by W2C Gate Electrode”, The Workshop on Future Trend of Nanoelectronics:WIMNACT 39, February 7, 2014, Suzukake Hall, Suzukakedai Campus, Tokyo Institute of Technology, Japan}, year = 2014, } @inproceedings{CTT100672908, author = {wei li and 佐々木亮人 and 大図秀行 and 青木克明 and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Resistivity Measurement of Monoclinic Thin Tungsten Oxide Film Due to Annealing Processesn}, booktitle = {}, year = 2014, } @inproceedings{CTT100672409, author = {Y. Wu and Hiroki Hasegawa and Kuniyuki KAKUSHIMA and Hitoshi Wakabayashi and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and 片岡好則 and Kenji Natori and HIROSHI IWAI}, title = {Influence of structure parameter on Mg2Si-Si Hetero-junction Tunneling FET}, booktitle = {}, year = 2014, } @inproceedings{CTT100669358, author = {K. Tuokedaerhan and Shuhei Hosoda and Yoshinori Nakamura and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Influence of Carbon Incorporation in W Gate Electrode for La-silicate Gate Dielectrics}, booktitle = {}, year = 2014, } @inproceedings{CTT100672369, author = {Y. Wu and Hiroki Hasegawa and Kuniyuki KAKUSHIMA and 大毛利健治 and T. Watanabe and Hitoshi Wakabayashi and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and 片岡好則 and Kenji Natori and Keisaku Yamada and HIROSHI IWAI}, title = {Influence of Band Discontinuities at Source-Channel contact in Tunnel FET Performance}, booktitle = {}, year = 2014, } @inproceedings{CTT100672372, author = {DARYOUSH ZADEH and Hiroshi Oomine and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Low DitHigh-k/In0.53Ga0.47As Gate Stack with CET down to 0.73 nm and Thermally Stable Silicide Contact by Suppression of Interfacial Reaction}, booktitle = {}, year = 2014, } @inproceedings{CTT100672393, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Advantage of TiN Schottky Gate over Conventional Ni for Improved Electrical Characteristics in AlGaN/GaN HEMT,}, booktitle = {}, year = 2014, } @inproceedings{CTT100672405, author = {unknown unknown and 竇春萌 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A study on Resistive Memory based on Breakdown and Anodic Reoxidation of thin SiO2 on NiSi2 Electrode with CeOx Buffer Layer}, booktitle = {}, year = 2014, } @inproceedings{CTT100669171, author = {Mari Okamoto and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and HIROSHI IWAI}, title = {An Ohmic Contact Process for AlGaN/GaN Structures using TiS}, booktitle = {}, year = 2014, } @inproceedings{CTT100674053, author = {伊藤勇磨 and 堀隼人 and 筒井一生 and 角嶋邦之 and 若林整 and 片岡好則 and 西山彰 and 杉井信之 and 名取研二 and 岩井洋}, title = {微細Si構造を利用した太陽電池に適した接合プロセスの提案}, booktitle = {}, year = 2014, } @inproceedings{CTT100674050, author = {堀隼人 and 伊藤勇磨 and 筒井一生 and 角嶋邦之 and 若林整 and 片岡好則 and 西山彰 and 杉井信之 and 名取研二 and 岩井洋}, title = {薄膜SOI太陽電池の発電特性への基板バイアス効果}, booktitle = {}, year = 2014, } @inproceedings{CTT100674046, author = {松川佳弘 and 岡本真里 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋 and 齋藤渉}, title = {AlGaN/GaN上のTi/C/TiN電極のコンタクト抵抗:Ti/C膜厚及び比率依存性}, booktitle = {}, year = 2014, } @inproceedings{CTT100674010, author = {雷 一鳴 and 宗清修 and 角嶋邦之 and 川那子高暢 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋 and 古橋 壮之 and 三浦 成久 and 山川 聡}, title = {ATR-FTIR法を用いた熱処理によるLa2O3/SiC界面反応の解析}, booktitle = {}, year = 2014, } @inproceedings{CTT100674004, author = {劉 璞誠 and 竇春萌 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {コンダクタンス法によるAlGaN/GaNヘテロ接合界面トラップに関する研究}, booktitle = {}, year = 2014, } @inproceedings{CTT100674002, author = {譚錫昊 and 川那子高暢 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {高電圧ストレスによるAlGaN/GaNの界面とバルクトラップの測定に関する研究}, booktitle = {}, year = 2014, } @inproceedings{CTT100673999, author = {元木雅章 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {NiとGe積層薄膜によって形成したNiGe膜のシート抵抗と熱処理温度の関係}, booktitle = {}, year = 2014, } @inproceedings{CTT100669173, author = {Shuhei Hosoda and K. Tuokedaerhan and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Reliability of La-silicate MOS capacitors with tungsten carbide gate electrode for scaled EOT}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100830488, author = {Shuhei Hosoda and Kamale Tuokedaerhan and Kuniyuki Kakushima and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and Kazuo Tsutsui and Kenji Natori and Hiroshi Iwai}, title = {Reliability of La-Silicate Mos Capacitors With Tungsten Carbide Gate Electrode}, booktitle = {}, year = 2013, } @inproceedings{CTT100669355, author = {Taichi Inamura and 佐々木亮人 and 青木克明 and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A stacked sputtered process for β-FeSi2 formation}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100669354, author = {Taichi Inamura and 佐々木亮人 and 青木克明 and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A stacked sputtered process for β-FeSi2 formation}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100669175, author = {Hiroshi Oomine and DARYOUSH ZADEH and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Electrical characterization of atomic layer deposited La2O3 films on In0.53Ga0.47AAs substrates}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100830490, author = {T. Seki and T. Kawanago and K. Kakushima and P. Ahmet and Y. Kataoka and A. Nishiyama and N. Sugii and K. Tsutsui and K. Natori and T. Hattori and H. Iwai}, title = {Electrical and Infrared Absorption Studies on La-silicate/Si Interface}, booktitle = {}, year = 2013, } @inproceedings{CTT100831028, author = {DARYOUSH ZADEH and Hiroshi Oomine and Yuya Suzuki and Kuniyuki KAKUSHIMA and Hiroshi Nohira and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {La2O3/Ino.53Ga.0.47As metal-oxide-semiconductor capacitor with low interface state density using TiN/W gate alectrode}, booktitle = {}, year = 2013, } @inproceedings{CTT100662341, author = {宋 禛漢 and 松本一輝 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 服部健雄 and 岩井洋}, title = {Niシリサイドナノワイヤ抵抗率のNi膜厚依存性}, booktitle = {}, year = 2013, } @inproceedings{CTT100662340, author = {鹿国強 and 大嶺洋 and ザデハサン ダリユーシユ and 角嶋邦之 and 西山彰 and 杉井信之 and 片岡好則 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {ALD堆積条件によるLa2O3/In0.53Ga0.47Asキャパシタの電気特性への影響}, booktitle = {}, year = 2013, } @inproceedings{CTT100662339, author = {今村浩章 and 稲村太一 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Krガスを用いた積層シリサイド化スパッタプロセスにより形成したNiSi2の薄膜評価}, booktitle = {}, year = 2013, } @inproceedings{CTT100662338, author = {岡本真里 and 松川佳弘 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {TiSi2電極の熱処理によるAlGaN/GaNへのコンタクト特性の変化}, booktitle = {}, year = 2013, } @inproceedings{CTT100662337, author = {小路智也 and 石川昂 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {チャージポンピング法を用いた立体Si構造の絶縁膜界面準位の位置推定}, booktitle = {}, year = 2013, } @inproceedings{CTT100662336, author = {中村嘉基 and 細田修平 and Tuokedaerhan Kamale and 角嶋邦之 and 片岡好則 and 西山彰 and 若林整 and 杉井信之 and 筒井一生 and 名取研二 and 岩井洋}, title = {W2Cゲート電極とLa-silicateゲート絶縁膜を用いたMOSキャパシタの信頼性評価}, booktitle = {}, year = 2013, } @inproceedings{CTT100661681, author = {長谷川明紀 and 呉研 and 宋 禛漢 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {低バンドギャップ、バンドオフセットを持つ半導体シリサイド/Si接合によるトンネルFET特性向上}, booktitle = {}, year = 2013, } @inproceedings{CTT100661680, author = {宗清修 and 川那子高暢 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {ショットキーゲート材料によるAlGaN/GaNの容量電圧特性への影響}, booktitle = {}, year = 2013, } @inproceedings{CTT100661678, author = {元木雅章 and 吉原亮 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Pを導入したNiSi2電極を用いたn-Ge基板の電流電圧特性の熱処理依存性}, booktitle = {}, year = 2013, } @inproceedings{CTT100661665, author = {譚錫昊 and 岡本真里 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {AlGaN/GaN上のTiSi2電極によるコンタクトの温度依存性}, booktitle = {}, year = 2013, } @inproceedings{CTT100661664, author = {劉 璞誠 and 米澤宏昭 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {AlGaNのドライエッチングへのBcl3の影響に関する研究}, booktitle = {}, year = 2013, } @inproceedings{CTT100661663, author = {嘉藤貴史 and 稲村太一 and 佐々木 亮人 and 青木 克明 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Fe層とSi層の積層スパッタにより形成されたβ-FeSi2のキャリア密度に関する研究}, booktitle = {}, year = 2013, } @inproceedings{CTT100661660, author = {松川佳弘 and 岡本真里 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋 and 齋藤渉}, title = {AlGaN/GaN上のTiC電極の電流電圧特性の熱処理温度依存性}, booktitle = {}, year = 2013, } @inproceedings{CTT100661649, author = {石川昂 and 小路智也 and 角嶋邦之 and 若林整 and 片岡好則 and 西山彰 and 杉井信之 and 筒井一生 and 名取研二 and 岩井洋}, title = {チャージポンピング法を用いた三次元Si構造の界面準位密度測定}, booktitle = {}, year = 2013, } @inproceedings{CTT100660888, author = {unknown unknown and shinichi kano and 竇春萌 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A Proposal of a Forming-Free Resistive Switching Memory based on Breakdown and Anodic Reoxidation of thin SiO2 on NiSi2 Electrode using CeOx Buffer Layer}, booktitle = {}, year = 2013, } @inproceedings{CTT100660886, author = {ダリューシュザデ and Hiroshi Oomine and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Scalable La-silicate Gate Dielectric on InGaAs Substrate with High Thermal Stability and Low Interface State Density}, booktitle = {}, year = 2013, } @inproceedings{CTT100660879, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Advantage of TiN Schottky Gate over Conventional Ni for Improved Electrical Characteristics in AlGaN/GaN HEMT}, booktitle = {}, year = 2013, } @inproceedings{CTT100659873, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface properties of La-silicate gate dielectrics on Si(110)surface}, booktitle = {}, year = 2013, } @inproceedings{CTT100658611, author = {Kazuki Matsumoto and 小山将央 and Y. Wu and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical Analyses of Nickel Silicide Formed on Si Nanowires with 10-nm-width}, booktitle = {}, year = 2013, } @inproceedings{CTT100658546, author = {関拓也 and Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {International Symposium on Next-Generation Electronics(ISNE 2013)}, booktitle = {}, year = 2013, } @inproceedings{CTT100658396, author = {Mari Okamoto and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Extraction of Energy Band Diagram of AlGaN/GaN with SiO2 Capped Annealing using X-ray Photoelectron Spectroscopy}, booktitle = {}, year = 2013, } @inproceedings{CTT100658393, author = {宋 禛漢 and 小山将央 and Kazuki Matsumoto and Kuniyuki KAKUSHIMA and 中塚理 and 大毛利健治 and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Keisaku Yamada and HIROSHI IWAI}, title = {Atomically flat Ni-silicide/Si interface using NiSi2 sputtering}, booktitle = {}, year = 2013, } @inproceedings{CTT100658390, author = {吉原亮 and Yuta Tamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {A Novel Ohmic Contact Process for n-Ge Substrates}, booktitle = {}, year = 2013, } @inproceedings{CTT100658389, author = {Shuhei Hosoda and K. Tuokedaerhan and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Improvenents in interface, states with W-carbide metal gate for La2O3/si MOS Capacitor}, booktitle = {}, year = 2013, } @inproceedings{CTT100658366, author = {Atsushi Takemasa and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Impact of Surface Treatments for Metal Contact on p-type Diamonds}, booktitle = {}, year = 2013, } @inproceedings{CTT100658365, author = {関拓也 and Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Infrared absorption study of La-silicate gate dielectrics}, booktitle = {}, year = 2013, } @inproceedings{CTT100658364, author = {Hiroshi Oomine and ダリューシュザデ and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {La-Oxide Gate Dielectrics for InGaAs Substrates formed by Chemical Vapor Deposition}, booktitle = {}, year = 2013, } @inproceedings{CTT100658363, author = {Hiroshi Oomine and ダリューシュザデ and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {La-Oxide Gate Dielectrics for InGaAs Substrates formed by Chemical Vapor Deposition}, booktitle = {}, year = 2013, } @inproceedings{CTT100658362, author = {Taichi Inamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Formation of Fe-silicides using Multi-Stacking Sputtering Process}, booktitle = {}, year = 2013, } @inproceedings{CTT100658361, author = {Taichi Inamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Formation of Fe-silicides using Multi-Stacking Sputtering Process}, booktitle = {}, year = 2013, } @inproceedings{CTT100658358, author = {Yang Zhao and マイマイティ マイマイティレャアティ and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Separation of bulk and interface traps of La-silicate on Si(100) surface}, booktitle = {}, year = 2013, } @inproceedings{CTT100658357, author = {Yang Zhao and マイマイティ マイマイティレャアティ and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Separation of bulk and interface traps of La-silicate on Si(100) surface}, booktitle = {}, year = 2013, } @inproceedings{CTT100658356, author = {Yang Zhao and マイマイティ マイマイティレャアティ and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Separation of bulk and interface traps of La-silicate on Si(100) surface}, booktitle = {}, year = 2013, } @inproceedings{CTT100658354, author = {Kazuki Matsumoto and 小山将央 and Y. Wu and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Size dependent resistivity change of Ni-silicides in nano-region}, booktitle = {}, year = 2013, } @inproceedings{CTT100658335, author = {Kana Tsuneishi and Jiangning Chen and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {A Robust Ohmic Contact Process for AlGaN/GaN using Ti-silicide electrodes}, booktitle = {}, year = 2013, } @inproceedings{CTT100658334, author = {Yuta Tamura and 吉原亮 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Stacked Ni-Silicidation Process for Schottky Barrier FET}, booktitle = {}, year = 2013, } @inproceedings{CTT100658332, author = {田中祐樹 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface controlled metal contact for n-type diamonds}, booktitle = {}, year = 2013, } @inproceedings{CTT100658331, author = {Yuya Suzuki and ダリューシュザデ and Hiroshi Oomine and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface Engineering of La2O3/InGaAs Capacitors with High Temperature Stability}, booktitle = {}, year = 2013, } @inproceedings{CTT100658330, author = {shinichi kano and 竇春萌 and unknown unknown and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Transient Switching Characteristics of Ce-oxide Resistive Switching Devices}, booktitle = {}, year = 2013, } @inproceedings{CTT100658329, author = {Jiangning Chen and 鹿 国強 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of AlGaN/GaN HEMT with La-oxide gate dielectrics}, booktitle = {}, year = 2013, } @inproceedings{CTT100658328, author = {Jiangning Chen and 鹿 国強 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of AlGaN/GaN HEMT with La-oxide gate dielectrics}, booktitle = {}, year = 2013, } @inproceedings{CTT100658327, author = {Jiangning Chen and 鹿 国強 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of AlGaN/GaN HEMT with La-oxide gate dielectrics}, booktitle = {}, year = 2013, } @inproceedings{CTT100658307, author = {Wei Li and 中島一裕 and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Extraction of Interface State Density of 3-dimensional Si channel}, booktitle = {}, year = 2013, } @inproceedings{CTT100658134, author = {K. Tuokedaerhan and Shuhei Hosoda and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Work Function Extraction of W,Ta and Ti Carbides Formed by Multi Stacked Process}, booktitle = {}, year = 2013, } @inproceedings{CTT100658132, author = {unknown unknown and shinichi kano and 竇春萌 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Resistive Switching Device using Ce-oxide with Ni-silicide Electrodes}, booktitle = {}, year = 2013, } @inproceedings{CTT100658131, author = {unknown unknown and shinichi kano and 竇春萌 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Resistive Switching Device using Ce-oxide with Ni-silicide Electrodes}, booktitle = {}, year = 2013, } @inproceedings{CTT100658130, author = {unknown unknown and shinichi kano and 竇春萌 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Resistive Switching Device using Ce-oxide with Ni-silicide Electrodes}, booktitle = {}, year = 2013, } @inproceedings{CTT100658129, author = {unknown unknown and shinichi kano and 竇春萌 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Resistive Switching Device using Ce-oxide with Ni-silicide Electrodes}, booktitle = {}, year = 2013, } @inproceedings{CTT100658112, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface properties of La-silicate gate dielectrics on Si(110)surface}, booktitle = {}, year = 2013, } @inproceedings{CTT100657453, author = {shinichi kano and 竇春萌 and unknown unknown and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and 片岡好則 and Kenji Natori and Miranda Enrique and takeo hattori and HIROSHI IWAI}, title = {Influence electrode materials on CeOx based resistive switching}, booktitle = {}, year = 2013, } @inproceedings{CTT100654680, author = {Yuya Suzuki and ダリューシュザデ and Ryuji Hosoi and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of La2O3/In0.53Ga0.47AAs capacitors with surface nitridation}, booktitle = {}, year = 2013, } @inproceedings{CTT100654679, author = {Takamasa Kawanago and Yeonghun Lee and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Characterization of Effective Electron Mobility in n/MOSFETs with Direct Contact La-silicate/Si Structure}, booktitle = {}, year = 2013, } @inproceedings{CTT100654678, author = {Yuta Tamura and 吉原亮 and Kuniyuki KAKUSHIMA and 中塚理 and パールハットアヘメト and Hiroshi Nohira and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical Properties of Ultrathin-Nickel-Silicide Schottky Diodes on Si(100)}, booktitle = {}, year = 2013, } @inproceedings{CTT100654668, author = {中島一裕 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Dependence of Interface-State Density on Three Dimensional Silicon Structure Measured by Charge-Pumping Method}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100654667, author = {中島一裕 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Dependence of Interface-State Density on Three Dimensional Silicon Structure Measured by Charge-Pumping Method}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100654663, author = {Tasuku Kaneda and Miyuki Kouda and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Influence of Flash Lamp Annealing on Electrical Characteristics of MOS Device with Si/ La2O3/n-Si Structure}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100654590, author = {Yuta Tamura and 吉原亮 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {A novel Ni silicidation technology for Schottky diode formation}, booktitle = {}, year = 2013, } @inproceedings{CTT100654572, author = {DARYOUSH ZADEH and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Characterization of metal Schottky junction for InGaAs substrate}, booktitle = {}, year = 2013, } @inproceedings{CTT100661659, author = {大橋匠 and 若林整 and 角嶋邦之 and 杉井信之 and 西山彰 and 片岡好則 and 名取研二 and 筒井一生 and 岩井洋}, title = {単層MoS2チャネルを用いたn-MOSFETの性能見積もり}, booktitle = {}, year = 2013, } @inproceedings{CTT100649144, author = {小山将央 and Naoto Shigemori and Kenji Ozawa and Kiichi Tachi and Kuniyuki KAKUSHIMA and O. Nakatsuka and 大毛利健治 and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Keisaku Yamada and HIROSHI IWAI}, title = {Si/Ni-Silicide Schottky Junctions with Atomically Flat Interfaces Using NiSi2 Source}, booktitle = {}, year = 2013, } @inproceedings{CTT100654160, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Nitrogen incorporated La-silicate gate dielectric with high scalability}, booktitle = {}, year = 2013, } @inproceedings{CTT100654161, author = {マイマイティ マイマイティレャアティ and 関拓也 and Kuniyuki KAKUSHIMA and Ahmet Parhat and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Evaluation of oxide traps in La based oxides for direct high-k/Si capacitor}, booktitle = {}, year = 2013, } @inproceedings{CTT100654165, author = {unknown unknown and A. Ablimit and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electron transport in ballistic diodes: influence of phonon generation in drain region}, booktitle = {}, year = 2013, } @inproceedings{CTT100649139, author = {Takamasa Kawanago and Yeonghun Lee and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Metal Inserted Poly-Si wirh High Temperature Annealing for Achieving EOT of 0.62nm in La-silicate MOSFET}, booktitle = {}, year = 2013, } @inproceedings{CTT100830496, author = {Y. Tanaka and K. Kakushima and P. Ahmet and Y. Kataoka and A. Nishiyama and N. Sugii and K. Tsutsui and K. Natori and T. Hattori and S. Yamasaki and H. Iwai}, title = {TiC Electrode Formed by Multi-Stacking Process for Diamond Contact Metal}, booktitle = {}, year = 2012, } @inproceedings{CTT100830503, author = {T. Kamale and R. Tan and K. Kakushima and P. Ahmet and Y. Kataoka and A. Nishiyama and N. Sugii and K. Tsutsui and K. Natori and T. Hattori and H. Iwai}, title = {Interface Properties La-Silicate MOS Capacitors with Tungsten Carbide Gate Electrode for Scaled EOT}, booktitle = {}, year = 2012, } @inproceedings{CTT100830553, author = {S. Kano and C. Dou and M. Hadi and K. Kakushima and P. Ahmet and A. Nishiyama and N. Sugii and K. Tsutsui and Y. Kataoka and K. Natori and E. Miranda and T. Hattori and H. Iwai}, title = {Influence of Electrode Material for CaOx Based Resistive Switching}, booktitle = {}, year = 2012, } @inproceedings{CTT100657198, author = {Wei Li and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface state density measurements of 3D silicon channel by conductance method}, booktitle = {}, year = 2012, } @inproceedings{CTT100657187, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Nitrogen incorporated La-silicate gate dielectric with high scalability}, booktitle = {}, year = 2012, } @inproceedings{CTT100657188, author = {マイマイティ マイマイティレャアティ and 関拓也 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Evaluation of oxide traps in La based oxides for direct high-k/Si capacitor}, booktitle = {}, year = 2012, } @inproceedings{CTT100657189, author = {unknown unknown and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Influence of Heat Generation within Drain Region on Transport of Hot Electrons}, booktitle = {}, year = 2012, } @inproceedings{CTT100657193, author = {DARYOUSH ZADEH and Ryuji Hosoi and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical Characterization and improvement of high-k/InGaAs devices}, booktitle = {}, year = 2012, } @inproceedings{CTT100657195, author = {竇春萌 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and HIROSHI IWAI and takeo hattori}, title = {Si nanowire FET with asymmetric channel}, booktitle = {}, year = 2012, } @inproceedings{CTT100657196, author = {竇春萌 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and HIROSHI IWAI and takeo hattori}, title = {Si nanowire FET with asymmetric channel}, booktitle = {}, year = 2012, } @inproceedings{CTT100657197, author = {Y. Wu and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {An analytical model of a tunnel FET with Schottky junction}, booktitle = {}, year = 2012, } @inproceedings{CTT100657205, author = {K. Tuokedaerhan and Tasuku Kaneda and マイマイティ マイマイティレャアティ and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Impact of Annealing Ambient for La2O3/Si Capacitor}, booktitle = {}, year = 2012, } @inproceedings{CTT100657208, author = {Daisuke Kitayama and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Effect of Silicate Formation at Metal Gate/High-k Interface on Electrical Characteristics of La2O3 gated MOS Devices}, booktitle = {}, year = 2012, } @inproceedings{CTT100657211, author = {中島一裕 and Wei Li and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface state density measurements of 3D silicon channel by charge pumping method}, booktitle = {}, year = 2012, } @inproceedings{CTT100657212, author = {Ryuji Hosoi and Yuya Suzuki and DARYOUSH ZADEH and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {A novel interpretation of frequency dispersed capacitances in InGaAs capacitor by conductance method}, booktitle = {}, year = 2012, } @inproceedings{CTT100657214, author = {shinichi kano and 竇春萌 and unknown unknown and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Impact of metal electrode material on resistive swirching properties of Ce oxides}, booktitle = {}, year = 2012, } @inproceedings{CTT100657216, author = {田中祐樹 and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Y. Tanaka, K. Kakushima, P. Ahmet, A. Nishiyama, N. Sugii, K. Tsutsui, K. Natori, T. Hattori, H. Iwai, “Impact of annealing on structural change in amorphous carbon: effect of Fe catalyst}, booktitle = {}, year = 2012, } @inproceedings{CTT100657217, author = {Kazuki Matsumoto and 小山将央 and Y. Wu and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Ni silicidation for Si Fin and nanowire strucures}, booktitle = {}, year = 2012, } @inproceedings{CTT100657218, author = {Kazuki Matsumoto and 小山将央 and Y. Wu and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Ni silicidation for Si Fin and nanowire strucures}, booktitle = {}, year = 2012, } @inproceedings{CTT100657247, author = {Michihiro Hosoda and Yeonghun Lee and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and HIROSHI IWAI}, title = {Size-dependent phonon-limited electron mobility in Si Nanowire MOSFETs}, booktitle = {}, year = 2012, } @inproceedings{CTT100657248, author = {Kana Tsuneishi and Miyuki Kouda and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical properties of Tm2O3 gate dielectric and its scaling issues}, booktitle = {}, year = 2012, } @inproceedings{CTT100657249, author = {Kana Tsuneishi and Miyuki Kouda and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical properties of Tm2O3 gate dielectric and its scaling issues}, booktitle = {}, year = 2012, } @inproceedings{CTT100657252, author = {吉原亮 and Yuta Tamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical characterization of atomically flat NiSi2 Schottky diode”, Ni silicidation for Si Fin and nanowire strucures}, booktitle = {}, year = 2012, } @inproceedings{CTT100657357, author = {Ryuji Hosoi and Yuya Suzuki and DARYOUSH ZADEH and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Characterization of matal Schottky junction for In0.53Ga0.47AAs substrates}, booktitle = {}, year = 2012, } @inproceedings{CTT100657454, author = {Wei Li and 中島一裕 and 竇春萌 and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and 片岡好則 and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Evaluation of Interfacial State Density of MOS Capacitor with Three-Dimensional Channel by Conductance Method}, booktitle = {}, year = 2012, } @inproceedings{CTT100657561, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {(100)-and (110)-oriented nMOSFETs with highly Scaled EOT in La-silicate/Si Interface for Multi-gate Architecture}, booktitle = {}, year = 2012, } @inproceedings{CTT100657562, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {(100)-and (110)-oriented nMOSFETs with highly Scaled EOT in La-silicate/Si Interface for Multi-gate Architecture}, booktitle = {}, year = 2012, } @inproceedings{CTT100657633, author = {Yuta Tamura and 吉原亮 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {A Proposal of Schottky Barrire Height Tuning Method with Interface Controlled Ni/Si Stacked Silicidation Process}, booktitle = {ECS Transactions}, year = 2012, } @inproceedings{CTT100657638, author = {Yuya Suzuki and ダリューシュザデ and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Effect of In0.53Ga0.47AAs surface nitridation on electrical characteristics of high-k/capacitors}, booktitle = {ECS Transactions}, year = 2012, } @inproceedings{CTT100657639, author = {吉原亮 and Yuta Tamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Thermally stable NiSi2 for Ge contact with Schottky barrirer height modulation capability}, booktitle = {ECS Transactions}, year = 2012, } @inproceedings{CTT100657642, author = {Tohtarhan Kamal and R. Tan and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface Properties of La-silicate MOS Capacitors with Tungsten Carbide Gate Electrode for Scaled EOT}, booktitle = {ECS Transactions}, year = 2012, } @inproceedings{CTT100657950, author = {Jiangning Chen and Kana Tsuneishi and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Thickness dependent electrical characteristics of AlGaN/GaN MOSHEMT with La2O3 gate dielectrics}, booktitle = {ECS Transactions}, year = 2012, } @inproceedings{CTT100657951, author = {Jiangning Chen and Kana Tsuneishi and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Thickness dependent electrical characteristics of AlGaN/GaN MOSHEMT with La2O3 gate dielectrics}, booktitle = {ECS Transactions}, year = 2012, } @inproceedings{CTT100658060, author = {Kana Tsuneishi and Jiangning Chen and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Ti silicide electrodes low contact resistance for undoped AlGaN/GaN structure}, booktitle = {ECS Transactions}, year = 2012, } @inproceedings{CTT100830546, author = {T. Kawanago and K. Kakushima and P. Ahmet and Y. Kataoka and A. Nishiyama and N. Sugii and K. Tsutsui and K. Natori and T. Hattori and H. Iwai}, title = {(100)- and (110)-Oriented nMOSFETs with Highly Scaled EOT in La-Silicate/Si Interface for Multi-Gate Architecture}, booktitle = {}, year = 2012, } @inproceedings{CTT100622593, author = {Miyuki Kouda and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Rare earth oxide capping effect on La2O3 gate dielectrics toward EOT of 0.5nm}, booktitle = {}, year = 2011, } @inproceedings{CTT100622594, author = {Miyuki Kouda and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Preparation and electrical characterization of CeO2 films for gate dielectrics application: comparative study of CVD and ALD processes}, booktitle = {}, year = 2011, } @inproceedings{CTT100622598, author = {ダリューシュザデ and Takashi Kanda and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Effects of In0.53Ga0.47As Surface Preparation on MOS Device Electrical Characterization}, booktitle = {}, year = 2011, } @inproceedings{CTT100622683, author = {Naoto Shigemori and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {An effective suppression process for Ni silicide enchroachment into Si nanowire}, booktitle = {}, year = 2011, } @inproceedings{CTT100622684, author = {小山将央 and Naoto Shigemori and Hideaki Arai and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Lateral encroachment of Ni silicide into silicon nanowire}, booktitle = {}, year = 2011, } @inproceedings{CTT100622685, author = {中島一裕 and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Interface State Density Measurement of Three Dimensional Silicon Structures by Charge Pumping Method}, booktitle = {}, year = 2011, } @inproceedings{CTT100654916, author = {竇春萌 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Si nanowire FET with asymmetric channel}, booktitle = {}, year = 2011, } @inproceedings{CTT100654666, author = {Miyuki Kouda and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical Properties of Rare-Earth oxides and La2O3 Stacked Gate Dielectrics}, booktitle = {ECS Transactions}, year = 2011, } @inproceedings{CTT100628848, author = {細田倫央 and 李映勲 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 岩井洋}, title = {矩形断面SiナノワイヤMOSFETにおけるフォノン散乱に制限された移動度のサイズ依存性}, booktitle = {}, year = 2011, } @inproceedings{CTT100628847, author = {叶真一 and MokhammadSholihul Hadi and 竇春萌 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {希土類酸化物(CeOX)を用いたMIM構造の抵抗スイッチング特性}, booktitle = {}, year = 2011, } @inproceedings{CTT100628833, author = {LiWei and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {コンダクタンス法による立体チャネルを有するMOSキャパシタの界面準位密度の評価}, booktitle = {}, year = 2011, } @inproceedings{CTT100628830, author = {吉原 亮 and 角嶋邦之 and パールハットアヘメト and 中塚理 and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Ni/Si積層から形成されるNiシリサイドのショットキーダイオードの電流特性}, booktitle = {}, year = 2011, } @inproceedings{CTT100628819, author = {田村雄太 and 角嶋邦之 and 中塚 理 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {NiとSiの積層薄膜によって形成したシリサイドのシート抵抗に対する熱処理温度の影響}, booktitle = {}, year = 2011, } @inproceedings{CTT100628215, author = {松本一輝 and 小山将央 and 呉研 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {酸化膜被覆型SiナノワイヤおよびSi Fin構造におけるNiシリサイド成長機構の検討}, booktitle = {}, year = 2011, } @inproceedings{CTT100628214, author = {鈴木佑哉 and 細井隆司 and ダリューシュザデ and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {high-k/In0.53Ga0.47As MOS キャパシタの容量-電圧特性の解析}, booktitle = {}, year = 2011, } @inproceedings{CTT100628208, author = {常石佳奈 and 来山大祐 and 幸田みゆき and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {W/Tm2O3/n-Si構造キャパシタの電気特性におけるTm2O3膜厚依存性}, booktitle = {}, year = 2011, } @inproceedings{CTT100628207, author = {Kamale Tuokedaerhan and 金田翼 and マイマイティ マイマイティレャアティ and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {La2O3/n-Si 構造に対するPost Deposition Annealの電気特性への影響}, booktitle = {}, year = 2011, } @inproceedings{CTT100627781, author = {関 拓也 and 来山大祐 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {High-k/Si 直接接合構造における界面準位の定量評価について}, booktitle = {}, year = 2011, } @inproceedings{CTT100627777, author = {田中 祐樹 and 川那子高暢 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {シリコン基板上に堆積したナノカーボン薄膜への高温短時間アニーリングの影響}, booktitle = {}, year = 2011, } @inproceedings{CTT100622712, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Metal Inserted Poly-Si Stacks with La2O3 Gate Dielectrics for Scaled EOT and VFB Control by Oxygen Incorporation}, booktitle = {}, year = 2011, } @inproceedings{CTT100622706, author = {来山大祐 and 久保田 透 and Tomotsune Koyanagi and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Precise Control of Silicate Reaction with La2O3 Gate Dielectrics towards Equivalent Oxide Thickness of 0.5 nm}, booktitle = {}, year = 2011, } @inproceedings{CTT100622704, author = {マイマイティ マイマイティレャアティ and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and HIROSHI IWAI}, title = {Remote-surface-roughness scattering-limited electron, mobility in ultrathin high-k gate stacked MOSFETs}, booktitle = {}, year = 2011, } @inproceedings{CTT100622703, author = {金田翼 and Miyuki Kouda and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Effect of rare earth oxide capping for La-based gate oxides}, booktitle = {}, year = 2011, } @inproceedings{CTT100622686, author = {Takamasa Kawanago and 鈴木 拓也 and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {An effective process for oxygen defect suppression for La-based oxide gate dielectric}, booktitle = {}, year = 2011, } @inproceedings{CTT100654662, author = {Miyuki Kouda and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical Properties of Rare-Earth oxides and La2O3 Stacked Gate Dielectrics}, booktitle = {ECS Transactions}, year = 2011, } @inproceedings{CTT100622711, author = {Takashi Kanda and ダリューシュザデ and Y. C. Lin and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and E.Y. Chang and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Annealing Effect on the Electrical Properties of La2O3/InGaAs MOS Capacitors}, booktitle = {}, year = 2011, } @inproceedings{CTT100623994, author = {C. Dou and 向井 弘樹 and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Resistive switching behaviors of ReRAM having W/CeO2/Si/TiN structure}, booktitle = {}, year = 2011, } @inproceedings{CTT100623983, author = {Ahmet Parhat and 来山大祐 and 金田翼 and 鈴木 拓也 and Tomotsune Koyanagi and Miyuki Kouda and マイマイティ マイマイティレャアティ and Takamasa Kawanago and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Effects of Metal Layer Insertion on EOT scaling in TiN/Metal/ La2O3 Si High –k Gate Stacks}, booktitle = {}, year = 2011, } @inproceedings{CTT100623969, author = {Ahmet Parhat and 来山大祐 and 金田翼 and 鈴木 拓也 and Tomotsune Koyanagi and Miyuki Kouda and マイマイティ マイマイティレャアティ and Takamasa Kawanago and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {TiN/W/La2O3 /Si High-k Gate Stack for EOT below o.5nm}, booktitle = {}, year = 2011, } @inproceedings{CTT100615530, author = {unknown unknown and Kuniyuki KAKUSHIMA and Ahmet Parhat and M. Geni and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {The Effect of Isotropic and Anisotropic Scattering in Drain Region of Ballistic Channel Diode}, booktitle = {}, year = 2010, } @inproceedings{CTT100613733, author = {来山大祐 and Tomotsune Koyanagi and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {TiN Capping Effect on High Temperature Annealed RE-Oxide MOS Capacitors for Scaled EOT}, booktitle = {}, year = 2010, } @inproceedings{CTT100830564, author = {D. Kitayama and T. Koyanagi and K. Kakushima and P. Ahmet and K. Tsutsui and A. Nishiyama and N. Sugii and K. Natori and T. Hattori and H. Iwai}, title = {TiN Capping Effect on High Temperature Annealed RE-Oxide Devices for Scaled EOT}, booktitle = {}, year = 2010, } @inproceedings{CTT100613726, author = {Tomotsune Koyanagi and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Impact of Alkali-Earth-Elements Incorporation on Vfb R0ll-Off Characteristics of La2O3 Gated MOS Device}, booktitle = {}, year = 2010, } @inproceedings{CTT100613728, author = {M.Bera and Ahmet Parhat and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and Nobuyuki Sugii and 西山彰 and takeo hattori and HIROSHI IWAI}, title = {Electrical Properties of Yttrium-Titanium Oxide High-k Gate Dielectric on Ge}, booktitle = {}, year = 2010, } @inproceedings{CTT100613731, author = {M. Mamatrishat and Miyuki Kouda and Takamasa Kawanago and Kuniyuki KAKUSHIMA and Ahmet Parhat and A. Aierken and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and HIROSHI IWAI}, title = {Effect of Remote-Surface –Roughness Scattering on Electron Mobility in MOSFETs with High-k Dielectrics}, booktitle = {}, year = 2010, } @inproceedings{CTT100613735, author = {Y. Wu and Naoto Shigemori and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and 西山彰 and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Observation of Tunneling FET operation in MOSFET with NiSi/Si Schottky source/channel interface}, booktitle = {}, year = 2010, } @inproceedings{CTT100613732, author = {Naoto Shigemori and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Suppression of Lateral Encroachment of Ni Silicide into Si Nanowires using Nitrogen Incorporation}, booktitle = {}, year = 2010, } @inproceedings{CTT100616055, author = {呉研 and 茂森直登 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {トンネルFET動作に向けたNiシリサイド/Si接触におけるトンネル電流の観測}, booktitle = {}, year = 2010, } @inproceedings{CTT100616050, author = {金田翼 and 幸田みゆき and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Tm-oxide/La2O3構造ゲート絶縁膜の界面特性評価}, booktitle = {}, year = 2010, } @inproceedings{CTT100616054, author = {細井隆司 and 神田高志 and ダリューシュザデ and Yueh Chin Lin and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and Edward Yi Chang and 名取研二 and 服部健雄 and 岩井洋}, title = {絶縁膜材料を用いたIn0.53Ga0.47As MOSキャパシタの電気特性}, booktitle = {}, year = 2010, } @inproceedings{CTT100613532, author = {Takamasa Kawanago and Yeonghun Lee and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Optimized Oxygen Annealing Process for Vth Tuning of p-MOSFET with High-k/Metal Gate Stacks}, booktitle = {}, year = 2010, } @inproceedings{CTT100616070, author = {中島 一裕 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {チャージポンピング法による立体Si構造の界面準位密度の評価}, booktitle = {}, year = 2010, } @inproceedings{CTT100616068, author = {小山 将央 and 茂森直登 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 西山彰 and 筒井一生 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {窒素導入によるSiナノワイヤ内へのNiシリサイド侵入抑制機構の検討}, booktitle = {}, year = 2010, } @inproceedings{CTT100616063, author = {マイマイティ マイマイティレャアティ and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {High-kゲートスタックMOSFETにおける電子移動度のリモート界面ラフネス散乱依存性}, booktitle = {}, year = 2010, } @inproceedings{CTT100616062, author = {鈴木 拓也 and 川那子高暢 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {希釈酸素雰囲気熱処理を用いたLaシリケート/Si MOS構造のVFB/Vthシフトの低EOTへの適用}, booktitle = {}, year = 2010, } @inproceedings{CTT100616061, author = {来山大祐 and 小柳友常 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {高温短時間熱処理を用いた希土類MOSキャパシタへのTiNキャップ効果}, booktitle = {}, year = 2010, } @inproceedings{CTT100616058, author = {竇 春萌 and マイマイティ マイマイティレャアティ and ダリューシュザデ and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {希土類(Ce,Eu)酸化物MIM構造の抵抗スイッチング特性}, booktitle = {}, year = 2010, } @inproceedings{CTT100613529, author = {角嶋邦之 and 小柳友常 and 来山大祐 and 幸田みゆき and 宋在烈 and 佐藤創志 and 川那子高暢 and M. マイマイティ and 舘喜一 and M.K. Bera and パールハットアヘメト and 野平博司 and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 山田啓作 and 岩井洋}, title = {LaCe シリケート膜を用いたEOT<0.7nm の直接接合 high-k/Si の実現とフラットバンド電圧制御}, booktitle = {,野平博司,筒井一生,西山彰,杉井信之,名取研二,服部健雄,山田啓作,岩井洋“LaCe シリケート膜を用いたEOT<0.7nm の直接接合 high-k/Si の実現とフラットバンド電圧制御” 応用物理学会分科会 シリコンテクノロジー No.127 pp.4-8(2010年7月22日 )}, year = 2010, } @inproceedings{CTT100608701, author = {茂森直登 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {SiナノワイヤへのNiシリサイド形成と過剰な侵入とその抑制に関する検討}, booktitle = {電子情報通信学会技術研究報告 pp.17-22}, year = 2010, } @inproceedings{CTT100608700, author = {来山大祐 and 小柳友常 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {EOT=0.5nmに向けた希土類MOSデバイスの高温短時間熱処理の検討}, booktitle = {電子情報通信学会技術研究報告 pp.43-48}, year = 2010, } @inproceedings{CTT100607843, author = {Kuniyuki KAKUSHIMA and Tomotsune Koyanagi and 来山大祐 and Miyuki Kouda and Jaeyeol Song and Takamasa Kawanago and M. Mamatrishat and Kiichi Tachi and M. K. Bera and Ahmet Parhat and Hiroshi Nohira and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and Keisaku Yamada and HIROSHI IWAI}, title = {Direct Contact of High-k/Si Gate Stack for EOT below 0.7 nm using LaCe-silicate Layer with Vfb controllability}, booktitle = {}, year = 2010, } @inproceedings{CTT100603761, author = {小柳友常 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {La2O3 MOSデバイスへのアルカリ土類元素キャップによる電気特性の変化}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603768, author = {茂森直登 and 新井英朗 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 西山彰 and 筒井一生 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {酸化膜中のSiナノワイヤへのNi拡散の制御}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603766, author = {川那子高暢 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {酸素添加がWゲートMOSデバイスの電気特性に与える影響}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603765, author = {神田高志 and 船水清永 and Yueh Chin Lin and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and Edward Yi Chang and 名取研二 and 服部健雄 and 岩井洋}, title = {HfO2/ La2O3/ In0.53 Ga0.47As構造の界面特性の変化}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603760, author = {幸田みゆき and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {希土類酸化物をキャップすることによるMOSFETの電気特性の改善}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603759, author = {小澤健児 and 幸田みゆき and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {La2O3 MOSFETへのCeOxキャップによる電気特性の改善}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603758, author = {ダリューシュ ザデ and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {界面にLa2O3 絶縁膜層を挿入したHf系high-kゲートMOSFETの評価}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603756, author = {来山 大祐 and 小柳友常 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {来山大祐,小柳友常,角嶋邦之,パールハット アヘメト,筒井一生,西山彰,杉井信之,名取研二,服部健雄,岩井洋“EOT=0.5nm に向けたTaSi2/La2O3/CeOxゲートスタック構造の検討}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603745, author = {AbudukelimuAbudureheman and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and HIROSHI IWAI and takeo hattori and KENJI NATORI}, title = {Performance of Silicon Ballistic Nanowire MOSFET with Diverse Orientations and Diameters}, booktitle = {}, year = 2010, } @inproceedings{CTT100603744, author = {Wataru Hosoda and Kenji Ozawa and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Fabrication of SB-MOSFETs on SOI Substrate Using Ni Silicide Containing Er Interlayer}, booktitle = {}, year = 2010, } @inproceedings{CTT100603743, author = {Katuya Matano and Kiyohisa Funamizu and Miyuki Kouda and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Electrical Characteristics of Rare Earth (La, Ce, Pr and Tm) Oxides/Silicates Gate Dielectric}, booktitle = {}, year = 2010, } @inproceedings{CTT100630992, author = {金田翼 and 幸田みゆき and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Effect of Rare Earth Oxide Capping for La-based Gate Oxides}, booktitle = {}, year = 2010, } @inproceedings{CTT100630991, author = {小柳友常 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Flatband Voltage Shift of La-based Gate Oxides with Alkali-earth-elements Incorporation}, booktitle = {}, year = 2010, } @inproceedings{CTT100630990, author = {川那子高暢 and 鈴木 拓也 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {An Effective Process for Oxygen Defects Suppression for La-based Oxide Gate Dielectric}, booktitle = {}, year = 2010, } @inproceedings{CTT100630961, author = {中島一裕 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Interface state density of 3-D structured Si using charge pumping method}, booktitle = {}, year = 2010, } @inproceedings{CTT100630960, author = {小山将央 and 茂森直登 and 新井英朗 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Lateral encroachment of Ni silicide into Si nanowire}, booktitle = {}, year = 2010, } @inproceedings{CTT100630958, author = {茂森直登 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 西山彰 and 筒井一生 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Suppression of Lateral Encroachment of Ni Silicide into Si Nanowires using Nitrogen Incorporation}, booktitle = {}, year = 2010, } @inproceedings{CTT100630993, author = {マイマイティ マイマイティレャアティ and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 岩井洋}, title = {Remote Coulomb and roughness scatterings in gate oxide scaling}, booktitle = {}, year = 2010, } @inproceedings{CTT100630957, author = {AbudukelimuAbudureheman and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {The Effect of Scattering in Drain Region of Ballistic Channel Diode}, booktitle = {}, year = 2010, } @inproceedings{CTT100630995, author = {来山大祐 and 小柳友常 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Process Optimization of Rare-Earth Oxides Gated MOS Devices for Future EOT Scaling}, booktitle = {}, year = 2010, } @inproceedings{CTT100630997, author = {久保田透 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Spectroscopic analysis of interface state density in high-k/Si structure}, booktitle = {}, year = 2010, } @inproceedings{CTT100631002, author = {ダリューシュザデ and 神田高志 and 細井隆司 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Towards High Performance III-V MOSFET, A Study on high-k Gate Stacks on In0.53Ga0.47As}, booktitle = {}, year = 2010, } @inproceedings{CTT100631005, author = {竇春萌 and 向井弘樹 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Feasibility study of Ce oxide for resistive RAM application}, booktitle = {}, year = 2010, } @inproceedings{CTT100631006, author = {呉研 and 茂森直登 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Observation of Tunneling FET operation in MOSFET with NiSi/Si Schottky source/channel interface}, booktitle = {}, year = 2010, } @inproceedings{CTT100597761, author = {Hideaki Arai and Hideyuki Kamimura and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Annealing Reaction for Ni Silicidation of Si Nanowire}, booktitle = {}, year = 2009, } @inproceedings{CTT100597764, author = {Tomotsune Koyanagi and Koichi Okamoto and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and AKIRA NISHIYAMA and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Impact of Alkali Earth Elements Incorporation on Electrical Characteristics of La2O3 Gated MOS Device}, booktitle = {}, year = 2009, } @inproceedings{CTT100598275, author = {Tomotsune Koyanagi and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Influence of Alkali Earth Elements Capping on Electrical Characteristics of La2O3 Gated MOS Device}, booktitle = {}, year = 2009, } @inproceedings{CTT100598273, author = {Katuya Matano and Kuniyuki KAKUSHIMA and Ahmet Parhat and Nobuyuki Sugii and KAZUO TSUTSUI and takeo hattori and HIROSHI IWAI}, title = {Threshold Voltage Control in p-MOSFET with High-k Gate dielectric}, booktitle = {}, year = 2009, } @inproceedings{CTT100598270, author = {Wataru Hosoda and Kenji Ozawa and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {A Study of Schottky Barrier Height Modulation of NiSi by Interlayer Insertion and Its Application to SOI SB-MOSFETs}, booktitle = {}, year = 2009, } @inproceedings{CTT100597929, author = {Kiyohisa Funamizu and Takashi Kanda and Y.C.Lin and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and E.Y.Chang and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Electrical Characteristics of HfO2 and La2O3 Gate Dielectrics for In0.53Ga0.47As MOS Structure}, booktitle = {}, year = 2009, } @inproceedings{CTT100597926, author = {Hideaki Arai and Hideyuki Kamimura and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and 西山彰 and KAZUO TSUTSUI and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Annealing Reaction for Ni Silicidation of Si Nanowire}, booktitle = {}, year = 2009, } @inproceedings{CTT100597925, author = {Hiroto Nakayama and Kuniyuki KAKUSHIMA and Ahmet Parhat and E.Ikenaga and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Crystallographic Orientation Dependent Electrical Characteristics of La2O3 MOS Capacitors}, booktitle = {}, year = 2009, } @inproceedings{CTT100597921, author = {A.Abudukelimu and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Current-Voltage Characteristics of Ballistic Nanowire MOSFET by Numerical Analysis}, booktitle = {}, year = 2009, } @inproceedings{CTT100597917, author = {M.Mamatrishat and Miyuki Kouda and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Study on Remote Coulomb Scattering Limited Mobility in MOSFETs with CeO2/ La2O3 Gate Stacks}, booktitle = {}, year = 2009, } @inproceedings{CTT100597907, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Experimental Investigation of VFB shift and Effective Mobility in La2O3 MOS Devices}, booktitle = {}, year = 2009, } @inproceedings{CTT100597900, author = {Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Effect of Ultrathin Si Passivation Layer for La2O3/Ge MOS structure}, booktitle = {}, year = 2009, } @inproceedings{CTT100597891, author = {M.K. Bera and Jaeyeol Song and Ahmet Parhat and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Rare-earth based mixed oxide as high-k gate dielectrics for Ge MOSFET}, booktitle = {}, year = 2009, } @inproceedings{CTT100597775, author = {Hiroto Nakayama and Kuniyuki KAKUSHIMA and Ahmet Parhat and E.Ikenaga and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Crystallographic Orientation Dependent Electrical Characteristics of La2O3 MOS Capacitors}, booktitle = {}, year = 2009, } @inproceedings{CTT100597769, author = {Kiyohisa Funamizu and Y.C. Lin and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and E.Y. Chang and takeo hattori and HIROSHI IWAI}, title = {Electrical Characteristics of HfO2 and La2O3 Gate Dielectrics for In0.53Ga0.47As MOS Structure}, booktitle = {}, year = 2009, } @inproceedings{CTT100597766, author = {M.K.Bera and Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Electrical Properties of Lanthanum-scandate Gate Dielectric Directly Deposited on Ge}, booktitle = {}, year = 2009, } @inproceedings{CTT100597756, author = {Kuniyuki KAKUSHIMA and Koichi Okamoto and Tomotsune Koyanagi and Kiichi Tachi and Miyuki Kouda and Takamasa Kawanago and Jaeyeol Song and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Selection of Rare Earth Silicate with SrO Capping for EOT Scaling below o.5 nm}, booktitle = {}, year = 2009, } @inproceedings{CTT100597760, author = {M.Mamatrishat and Miyuki Kouda and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Analysis of Remote Coulomb Scattering Limited Mobility in MOSFETs with CeO2/La2O3 Gate Stacks}, booktitle = {}, year = 2009, } @inproceedings{CTT100585316, author = {船水清永 and Yueh-Chin Lin and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and Edward Yi Chang and 服部健雄 and 岩井洋}, title = {High-k ゲート絶縁膜を用いたInxGa1-xAs MOS構造の研究}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100586498, author = {Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Post metallization annealing study in La2O3/Ge MOS structure}, booktitle = {INFOS2009}, year = 2009, } @inproceedings{CTT100586499, author = {Takamasa Kawanago and Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Experimental Study for High Efffective Mobility with directly deposited HfO2/La2O3 MOSFET}, booktitle = {INFOS2009}, year = 2009, } @inproceedings{CTT100585313, author = {幸田みゆき and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {CeO2 /La2O3積層ゲート絶縁膜のリーク電流特性の膜厚依存性}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100586581, author = {小柳友常 and 岡本晃一 and 角嶋邦之 and パールハットアヘメト and 杉井信之 and 筒井一生 and 服部健雄 and 岩井洋}, title = {La2O3MOSデバイスへのSrO導入による電気特性の変化}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100586495, author = {Hideyuki Kamimura and Hideaki Arai and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Evaluation of Lateral Ni Diffusion in Si Nanowire Schottky Contact}, booktitle = {ISTC /CSTIC2009}, year = 2009, } @inproceedings{CTT100586472, author = {Hiroki Fujisawa and A Srivastava and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and C.K. Sarkar and HIROSHI IWAI}, title = {Electrical Characterization of W/HfO2 MOSFETs with La2O3 Incorporation}, booktitle = {ISTC /CSTIC2009}, year = 2009, } @inproceedings{CTT100585433, author = {中山寛人 and 日野雅文 and 永田晃基 and 小瀬村大亮 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 小椋厚志 and 服部健雄 and 岩井洋}, title = {As注入とSiN応力膜によるpoly-Siへの歪記憶の検討}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100585430, author = {又野克哉 and 川那子高暢 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {Ge層挿入によるLa2O3-MOSキャパシタのVFB制御}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100585426, author = {新井英朗 and 上村英之 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {SiナノワイヤへのNiシリサイド形成の評価}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100585423, author = {佐藤創志 and 上村英之 and 新井英朗 and 角嶋邦之 and パールハットアヘメト and 大毛利健二 and 筒井一生 and 杉井信之 and 服部健雄 and 山田啓作 and 岩井洋}, title = {四端子測定TEGを用いたSiナノワイヤトランジスタのチャネル内電位の測定}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100585312, author = {細田亘 and 野口浩平 and パールハットアヘメト and 角嶋邦之 and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {異種金属界面挿入によるNiシリサイドのショットキー障壁変調とSB-MOSFETへの応用}, booktitle = {第56回応用物理学会予稿集}, year = 2009, } @inproceedings{CTT100585306, author = {宋在烈 and 舘喜一 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {極薄Si界面層を挿入したLa2O3/Ge MIS構造における界面準位密度低減に関する検討}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100830567, author = {H. Nakayama and K. Kakushima and P. Ahmet and K. Tsutsui and N. Sugii and T. Hattori and H. Iwai}, title = {Electrical Characteristics of La2O3 Gated MOS Capacitors with Different Wafer Orientation}, booktitle = {}, year = 2009, } @inproceedings{CTT100830630, author = {K. Noguchi and W. Hosoda and K. Matano and K. Kakushima and P. Ahmet and K. Tsutsui and N. Sugii and A. Chandorkar and T. Hattori and H. Iwai}, title = {Schottky Barrier Height Modulation by Er Insertion and Its Application to SB-MOSFETs}, booktitle = {}, year = 2008, } @inproceedings{CTT100830629, author = {K. Okamoto and K. Kakushima and P. Ahmet and K. Tsutsui and N. Sugii and A. Chandorkar and T. Hattori and H. Iwai}, title = {0.5 nm EOT MOS Structure with TaSix/W Stacked Gate Electrode}, booktitle = {}, year = 2008, } @inproceedings{CTT100830626, author = {K. Kakushima and K. Okamoto and K. Tachi and S. Sato and J. Song and T. Kawanago and P. Ahmet and N. Sugii and K. Tsutsui and T. Hattori and H. Iwai}, title = {Interfacial Dipole Measurement of Dielectric/Silicon Interface by X-ray Photoelectron Spectroscopy}, booktitle = {}, year = 2008, } @inproceedings{CTT100830627, author = {M. Kouda and K. Tachi and K. Kakushima and P. Ahmet and K. Tsutsui and N. Sugii and A. Chandorkar and T. Hattori and H. Iwai}, title = {Electric Properties of CeOX /La2O3 Stack as Gate Dielectric in Advanced MOSFET Technology}, booktitle = {}, year = 2008, } @inproceedings{CTT100830625, author = {M. Hino and K. Nagata and T. Yoshida and D. Kosemura and K. Kakushima and P. Ahmet and K. Tsutsui and N. Sugii and A. Ogura and T. Hattori and H. Iwai}, title = {Study on Stress Memorization by Argon Implantation and Annealing}, booktitle = {}, year = 2008, } @inproceedings{CTT100576517, author = {新井英朗 and 上村英之 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 服部健雄 and 杉井信之 and 岩井洋}, title = {熱酸化によるSi ナノワイヤの作製とその電気特性}, booktitle = {応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100585100, author = {佐藤創志 and 上村英之 and 新井英朗 and 大毛利健二 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 服部健雄 and 杉井信之 and 山田啓作 and 岩井洋}, title = {Si Finのアスペクト比最適化により作製した円形Siナノワイヤの形状に関する研究}, booktitle = {秋季第69回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100585122, author = {又野克哉 and 野口 浩平 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {Hf層界面挿入によるNiシリサイドのショットキー障壁変調技術}, booktitle = {秋季第69回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100585118, author = {細田亘 and 野口浩平 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {Er層界面挿入によるNiシリサイドのショットキー障壁変調とSB-MOSFETへの応用}, booktitle = {秋季第69回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100585114, author = {中山寛人 and 日野雅文 and 服部健雄 and 杉井信之 and 筒井一生 and パールハットアヘメト and 角嶋邦之 and 小椋厚志 and 永田 晃基 and 吉田 哲也 and 小瀬村大亮 and 岩井洋}, title = {Ar注入とSiN応力膜によるパターン付Si基板への歪記憶技術の検討}, booktitle = {応用物理学会}, year = 2008, } @inproceedings{CTT100576519, author = {小柳友常 and 岡本晃一 and 角嶋邦之 and パールハットアヘメト and 杉井信之 and 筒井一生 and 服部健雄 and 岩井洋}, title = {La203系MOSFETへのMg挿入による電気特性の変化}, booktitle = {秋季第69回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100576524, author = {川那子高暢 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {La2O3/Si直接接合構造における界面特性の評価}, booktitle = {秋季第69回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100585094, author = {船水清永 and 幸田みゆき and 舘喜一 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {CeOX/La2O3積層ゲート絶縁膜構造の膜特性評価}, booktitle = {秋季第69回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100830637, author = {K. Kakushima and K. Tachi and M. Adachi and K. Okamoto and S. Sato and J. Song and T. Kawanago and P. Ahmet and K. Tsutsui and N. Sugii and T. Hattori and H. Iwai}, title = {Advantage of La2O3 Gate Dielectric Over HfO2 for Direct Contact and Mobility Improvment}, booktitle = {}, year = 2008, } @inproceedings{CTT100830655, author = {K. Kakushima and K. Okamoto and M. Adachi and K. Tachi and S. Sato and T. Kawanago and J. Song and P. Ahmet and N. Sugii and K. Tsutsui and T. Hattori and H. Iwai}, title = {Impact of Thin La2O3 Insertion for HfO2 MOSFET}, booktitle = {}, year = 2008, } @inproceedings{CTT100830659, author = {Yoshisa Ohishi and Kohei Noguchi and Kuniyuki Kakushima and Parhat Ahmet and Kazuo Tsutsui and Nobuyuki Sugii and Takeo Hattori and Hiroshi Iwai}, title = {Schottky Barrier Height Modulation of Ni Silicide/Si Contacts by Insertion of Thin Er or Pt Layers}, booktitle = {}, year = 2008, } @inproceedings{CTT100576388, author = {日野雅文 and 吉田哲也 and 小瀬村 大亮 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 小椋 厚志 and 服部健雄 and 岩井洋}, title = {SiN応力膜によるSi基板への歪記憶の検討}, booktitle = {春季第55回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100576391, author = {上村英之 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 大毛利 健二 and 服部健雄 and 岩井洋}, title = {熱酸化によるSiナノワイヤ形状の酸化条件依存性}, booktitle = {春季第55回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100576381, author = {岡本晃一 and 舘喜一 and 足立学 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 杉井信之 and 筒井一生 and 服部健雄 and 岩井洋}, title = {Hf O2系 High-kゲートMOSFETの電気特性に対するLa2O3界面層挿入効果}, booktitle = {春季第55回応用物理学会学術講演会 予稿集}, year = 2008, } @inproceedings{CTT100576382, author = {幸田みゆき and 舘喜一 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {CeO2/La2O3積層ゲート絶縁膜の電気特性評価}, booktitle = {春季第55回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100576379, author = {宋在烈 and 舘喜一 and 岡本晃一 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {Laシリケート層を界面に用いたhigh-k/Si MOS構造の電気特性検討}, booktitle = {春季第55回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100576383, author = {野口浩平 and 大石善久 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {Er層界面挿入によるNiシリサイドのショットキー障壁変調技術}, booktitle = {春季第55回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100576380, author = {足立学 and 岡本晃一 and 舘喜一 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {HfO2/ La2O3積層キャパシタにおけるLa2O3層に依存した界面層成長抑制の効果}, booktitle = {春季第55回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100830660, author = {Kuniyuki Kakushima and Kouichi Okamoto and Manabu Adachi and Kiichi Tachi and Jaeyeol Song and Soushi Sato and Takamasa Kawanago and Parhat Ahmet and Kazuo Tsutsui and Nobuyuki Sugii and Takeo Hattori and Hiroshi Iwai}, title = {Band Bending Measurement of HfO2/SiO2/Si Capacitor with ultra-thin La2O3 Insertion by XPS}, booktitle = {}, year = 2007, } @inproceedings{CTT100599990, author = {佐藤創志 and 舘喜一 and 宋在烈 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {ラジカル窒化によるLa2O3ゲート絶縁膜への窒素導入効果 : 堆積時窒化によるEOT増加抑制効果(ゲート絶縁膜、容量膜、機能幕及びメモリ技術)}, booktitle = {電子情報通信学会技術研究報告、SDM、シリコン材料・デバイス}, year = 2007, } @inproceedings{CTT100830714, author = {H. Sauddin and Y. Sasaki and H. Ito and B. Mizuno and P. Ahmet and K. Kakushima and N. Sugii and K. Tsutsui and H. Iwai}, title = {Leakage Current Characteristics of Ultra-Shallow Junctions formed by B2H6 Plasma Doping}, booktitle = {}, year = 2006, } @inproceedings{CTT100830711, author = {K. Tachi and H. Iwai and T. Hattori and N. Sugii and K. Tsutsui and P. Ahemt and K. Kakushima}, title = {Effect of Oxygen for Ultra-Thin La2O3 Film Deposition}, booktitle = {}, year = 2006, } @inproceedings{CTT100830713, author = {Y. Shiino and K. Kakushima and P. Ahmet and K. Tsutsui and N. Sugii and T. Hattori and H. Iwai}, title = {La2O3 Gate Dielectric Thin Film with Sc2O3 Buffer Layer for High Temperature Annealing}, booktitle = {}, year = 2006, } @inproceedings{CTT100830712, author = {J. Molina and K. Tachi and K. Kakushima and P. Ahmet and K. Tsutsui and N. Sugii and T. Hattori and I. Hiroshi}, title = {Charge Trapping Characteristics of W-La2O3-nSi Mis Capacitors After Post-Metallization Annealing PMA in N2}, booktitle = {}, year = 2006, }