@book{CTT100846136,
  author = {Tso-Fu Mark Chang and Hideaki Nakajima and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi and Masato Sone},
  title = {Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers},
  publisher = {IFSA PUBLISHING, S.L.},
  year = 2021,
}

@book{CTT100791876,
  author = {Chun-Yi Chen and Masaharu Yoshiba and Haochun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida},
  title = {Pulse-Current Electrodeposition of Gold},
  publisher = {IntechOpen},
  year = 2019,
}

@book{CTT100791875,
  author = {Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida},
  title = {Electrodeposition of Gold Alloys and the Mechanical Properties},
  publisher = {IntechOpen},
  year = 2019,
}

@book{CTT100770100,
  author = {Tso-Fu Mark Chang and Chun-Yi Chen and Yota Ishizuka and Minami Teranishi and Takuma Suzuki and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors},
  publisher = {IFSA Publishing},
  year = 2019,
}

@article{CTT100875654,
  author = {Kohei Shibata and Akihiro Uchiyama and Akira Onishi and Katsuyuki Machida and Parthojit Chakraborty and Shin-ichi Iida and Toshifumi Konishi and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure},
  journal = {IEEE Sensors Journal},
  year = 2022,
}

@article{CTT100807019,
  author = {Katsuyuki Machida and Daisuke Yamane and Toshifumi Konishi and Shin-ichi Iida and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Hiroyuki Ito and Kazuya Masu},
  title = {MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology},
  journal = {ECS Transactions},
  year = 2019,
}

@article{CTT100800956,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu},
  title = {A MEMS Accelerometer for Sub-mG Sensing},
  journal = {Sensors and Materials},
  year = 2019,
}

@article{CTT100793648,
  author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices},
  journal = {Microelectronic Engineering},
  year = 2019,
}

@article{CTT100786193,
  author = {Koichiro Tachibana and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test},
  journal = {Microelectronic Engineering},
  year = 2019,
}

@article{CTT100785326,
  author = {Motohiro Takayasu and Ippei Tsuji and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer},
  journal = {Sensors and Materials},
  year = 2018,
}

@article{CTT100766193,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications},
  journal = {Microelectronic Engineering},
  year = 2018,
}

@article{CTT100756750,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices},
  journal = {Microelectronic Engineering},
  year = 2018,
}

@article{CTT100766253,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology},
  journal = {},
  year = 2018,
}

@article{CTT100759221,
  author = {Hao-Chun Tang and Ken Hashigata and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide},
  journal = {Surface and Coatings Technology},
  year = 2018,
}

@article{CTT100758009,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices},
  journal = {Journal of The Electrochemical Society},
  year = 2018,
}

@article{CTT100759250,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers},
  journal = {IEICE Electronics Express},
  year = 2018,
}

@article{CTT100751408,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  journal = {Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
  year = 2017,
}

@article{CTT100751410,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY},
  journal = {Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)},
  year = 2017,
}

@article{CTT100721712,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer},
  journal = {Microelectronics Reliability},
  year = 2016,
}

@article{CTT100733964,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology},
  journal = {IEEE Proceeding},
  year = 2016,
}

@article{CTT100708352,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1-mG MEMS Sensor},
  journal = {ECS Transactions},
  year = 2016,
}

@article{CTT100702128,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers},
  journal = {Microelectronics Engineering},
  year = 2016,
}

@article{CTT100692402,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 0.1G-to-20G Integrated MEMS Inertial Sensor},
  journal = {Japanese Journal of Applied Physics},
  year = 2015,
}

@article{CTT100690964,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Sensor},
  journal = {ECS Transactions},
  year = 2015,
}

@article{CTT100686951,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass},
  journal = {Microsystem Technologies},
  year = 2015,
}

@article{CTT100685143,
  author = {山根 大輔 and 小西 敏文 and 松島 隆明 and 亀井 将太 and 益 一哉 and 町田 克之},
  title = {高感度静電容量型センサにおけるBrownian Noise評価手法},
  journal = {電気学会論文誌E（センサ・マイクロマシン部門誌）},
  year = 2015,
}

@article{CTT100674611,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Integrated CMOS-MEMS Technology and Its Applications},
  journal = {ECS Transactions},
  year = 2014,
}

@article{CTT100669022,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100666863,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Katsuyuki Machida and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Design of sub-1g microelectromechanical systems accelerometers},
  journal = {Applied Physics Letters},
  year = 2014,
}

@article{CTT100666864,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Kazuya Masu and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100658034,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer},
  journal = {Japanese Journal of Applied Physics},
  year = 2013,
}

@article{CTT100657729,
  author = {Toshifumi Konishi and Katsuyuki Machida and Satoshi Maruyama and Makoto Mita and Kazuya Masu and Hiroshi Toshiyoshi},
  title = {A Single-platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator with Hardware Description Language},
  journal = {IEEE/ASME Journal of Microelectromechanical Systems},
  year = 2013,
}

@article{CTT100674612,
  author = {Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi},
  title = {Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators},
  journal = {ECS Transactions},
  year = 2012,
}

@inproceedings{CTT100903097,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and CHAKRABORTYP and 町田克之 and 飯田慎一 and 小西敏文 and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討},
  booktitle = {第83回応用物理学会秋季学術講演会},
  year = 2022,
}

@inproceedings{CTT100903102,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and CHAKRABORTYP and 町田克之 and 飯田慎一 and 小西敏文 and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100791878,
  author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100794652,
  author = {Masato Sone and Hao-Chun Tang and Masaharu Yoshiba and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {Mechanical properties of electrodeposited gold-copper alloy by micro-compression test},
  booktitle = {The 2nd International Conference on Material Strength and Applied Mechanics},
  year = 2019,
}

@inproceedings{CTT100791879,
  author = {Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790678,
  author = {鈴木 康介 and Ken Hashigata and 浅野 啓介 and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人},
  title = {微小曲げ試験による金材料の機械的強度のサンプル形状効果},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790679,
  author = {新田 京太朗 and Tang Haochun and Chen Chun-Yi and Chang Tso-Fu Mark and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人},
  title = {電気めっき法によるAu-Cu合金微小カンチレバーの作製},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790675,
  author = {渡邊 瞳 and 鈴木 拓真 and Chen Chun-Yi and Chang Tso-Fu Mark and 山根 大輔 and 小西 敏文 and 町田 克之 and 伊藤 浩之 and 益 一哉 and 曽根 正人},
  title = {Ti/Au微小カンチレバーの温度依存性への積層構造の影響},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100782446,
  author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100777398,
  author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775374,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {Au単一錘平行平板型3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100786703,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Solid Solution Strengthening of Gold Based Materials  for MEMS Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775380,
  author = {乙部 翔太 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775377,
  author = {古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100772111,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone.},
  title = {Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100772110,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone.},
  title = {Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100772182,
  author = {Tso-Fu Mark Chang and Hao-chun Tang and Kyotaro Nitta and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrodeposition of High Strength Au-Cu Alloys for MEMS Device},
  booktitle = {2018 International Conference on Solid State Devices and Materials (SSDM2018)},
  year = 2018,
}

@inproceedings{CTT100772124,
  author = {Masato Sone and Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu},
  title = {EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER},
  booktitle = {8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"},
  year = 2018,
}

@inproceedings{CTT100771791,
  author = {中島 英亮 and Tso-Fu Mark Chang and Chun-Yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 年吉 洋 and 益 一哉 and 曽根 正人},
  title = {MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討},
  booktitle = {第79回応用物理学会秋季学術講演会},
  year = 2018,
}

@inproceedings{CTT100769742,
  author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769741,
  author = {Takahiro Yamamoto and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys  for Reliability of MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769740,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshib and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769739,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769738,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769737,
  author = {Keisuke Asano and Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769736,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769735,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyotaro Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100768649,
  author = {Masato Sone and Hao-Chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768307,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768308,
  author = {HIdeaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and HIroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768386,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100769399,
  author = {Shota Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760940,
  author = {Ken Hashigata and Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {The effect of acid pre-treatment on electroplating of gold on titanium substrate},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100768387,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyoutarou Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100772038,
  author = {伊藤浩之 and 山根大輔 and 小西敏文 and 道正志郎 and 石原昇 and 町田克之 and 曽根正人 and 三宅美博 and 益一哉},
  title = {MEMS加速度センサと生体計測への応用},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758671,
  author = {Kyoutarou Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices},
  booktitle = {233rd ECS Meeting},
  year = 2018,
}

@inproceedings{CTT100758271,
  author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758521,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys},
  booktitle = {22nd Topical Meeting of the International Society of Electrochemistry},
  year = 2018,
}

@inproceedings{CTT100758968,
  author = {中島英亮 and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 年吉洋 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100766637,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760808,
  author = {古賀 達也 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760805,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760803,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 陳 君怡 and Chang Tso-Fu Mark and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉 and 飯田 慎一},
  title = {積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760802,
  author = {伊藤 浩之 and 山根 大輔 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 曽根 正人 and 三宅 美博 and 益 一哉},
  title = {集積化CMOS-MEMS技術による高感度慣性センサと応用システム},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760801,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 佐布 晃昭 and 小西 敏文 and 道正 志郎 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {単一Au錘3軸差動MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760797,
  author = {高安 基大 and 古賀 達也 and 辻 一平 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {傾斜を用いた1mG MEMS加速度センサの分解能評価の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760620,
  author = {伊藤 浩之 and ?根 ?輔 and 小西敏文 and 道正 志郎 and ?原 昇 and 町? 克之 and 曽根 正? and 三宅 美博 and 益 ?哉},
  title = {集積化CMOS-MEMS技術による?感度慣性センサと応?システム},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758969,
  author = {TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるMEMS⽤⾦銅合⾦の作製及び機械的特性評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758967,
  author = {新⽥ 京太朗 and 橘 航⼀朗 and TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根 ⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {⻑期振動試験によるAu-Cu合⾦微⼩カンチレバーの構造安定性},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758966,
  author = {浅野 啓介 and TangHao-Chun and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {電析制御による微⼩⾦カンチレバーの曲げ特性の改善},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100751721,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strategies of Mechanical Strengthening in Electroplated  Au Materials},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751720,
  author = {Masato Sone and Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751718,
  author = {Tso-Fu Mark Chang and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751442,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751724,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751723,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751439,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780789,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu and Shinichi Iida},
  title = {Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780791,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755527,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1mG Inertial Sensors by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751726,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751725,
  author = {Keisuke Asano and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751717,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755521,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755522,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタルMEMS慣性センサの長期振動特性評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755520,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755519,
  author = {新島 宏文 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755518,
  author = {折原 恒祐 and 高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755389,
  author = {古賀 達也 and 辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755388,
  author = {乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755334,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS慣性センサ用弛張発振型容量検出回路},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753438,
  author = {Shouta Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753404,
  author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753335,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752534,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {金めっきで形成したMEMS加速度センサの長期振動特性に関する検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752532,
  author = {古賀 達也 and 辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS慣性センサの傾斜時感度特性の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752531,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751941,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS加速度センサ用高分解能容量検出回路},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745654,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100748741,
  author = {辻 一平 and 高安 基大 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術を用いた高感度MEMS傾斜計の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100748739,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 山根 大輔 and 小西 敏文 and 町田 克之 and 石原 昇 and 益 一哉},
  title = {MEMS加速度センサ用高分解能容量検出回路の評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100744945,
  author = {曽根 正人 and Tso-Fu Mark Chang and Chun-yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価},
  booktitle = {第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー},
  year = 2017,
}

@inproceedings{CTT100745680,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745676,
  author = {高安 基大 and 權田 惇晟 and 小西 敏文 and 山根 大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {人体振動測定のためのMEMS慣性センサを用いたモジュールの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735592,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  booktitle = {IEEE-NEMS 2017},
  year = 2017,
}

@inproceedings{CTT100738774,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu},
  title = {MEMS inertial sensors for biomedical applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735890,
  author = {中島 英亮 and Chang Tso-Fu Mark and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100737044,
  author = {權田 惇晟 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {移動体制御による慣性センサ評価系の構築},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100737043,
  author = {高安 基大 and 權田 惇晟 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100737042,
  author = {飯塚知希 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735898,
  author = {佐布 晃昭 and 小西 敏文 and 山根 大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術による3軸MEMS加速度センサのばね定数設計方法},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735897,
  author = {小西敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735889,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 中島 英亮 and 寺西 美波 and 陳 君怡 and Chang Tso-Fu Mark and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735888,
  author = {橘 航一朗 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735887,
  author = {鈴木 拓真 and Chang Tso-Fu Mark and Chen Chun-Yi and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100734201,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hideaki Nakajima and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733962,
  author = {小西 敏文 and 山根大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733961,
  author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100723356,
  author = {寺西美波 and Chang Tso-Fu Mark and Chen Chun-Yi and 山根大輔 and 益一哉 and 曽根正人 and 小西敏文 and 町田克之 and 年吉洋},
  title = {電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価},
  booktitle = {第３３回「センサ・マイクロマシンと応用システム」シンポジウム},
  year = 2016,
}

@inproceedings{CTT100733959,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {差動型積層メタルMEMS加速度センサの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733958,
  author = {權田 惇晟 and 高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるMEMS加速度センサを用いた慣性センサモジュールの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733957,
  author = {高安 基大 and 道正 志郎 and 伊藤 浩之 and 石原 昇 and 山根 大輔 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {RC発振器型高感度容量検出回路},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733960,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716614,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716612,
  author = {小西 敏文 and 山根大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {CMOS-MEMS慣性センサにおける機械的ノイズの解析手法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716613,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル差動型MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716615,
  author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100721707,
  author = {Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100721709,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100710653,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100708351,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1-mG MEMS Sensor},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100708852,
  author = {高安 基大 and 權田 惇晟 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {小型高感度MEMS慣性センサモジュールの試作評価},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100708851,
  author = {Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Masakazu Sonobe and Takumi Kobayashi and Yamato Fukuta and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Katsuyuki Machida},
  title = {A study of railroad vehicle control by inertial sensors},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100700921,
  author = {Yota Ishizuka and Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100700918,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating},
  booktitle = {ISE - Topical Meeting},
  year = 2016,
}

@inproceedings{CTT100702917,
  author = {山根大輔 and 小西敏文 and 伊藤浩之 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702922,
  author = {リュウ アンキ and 小西 敏文 and 山根 大輔 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {CMOS低雑音オペアンプ設計法の検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702919,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702918,
  author = {小西敏文 and 山根大輔 and 佐布晃昭 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100700964,
  author = {寺西 美波 and TSO-FU MARK CHANG and 陳 君怡 and 小西 敏文 and 町田 克之 and 年吉 洋 and 山根 大輔 and 益 一哉 and 曽根 正人},
  title = {電解金めっきで作製したTi/Au微小カンチレバーの構造安定性},
  booktitle = {第63回応用物理学会春季学術講演会},
  year = 2016,
}

@inproceedings{CTT100702467,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100695299,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695308,
  author = {佐布 晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695304,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G?20G集積化MEMS慣性センサ},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695305,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {移動体制御における慣性センサ適用性の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695306,
  author = {小西敏文 and 山根大輔 and 高安基大 and 伊藤浩之 and 道正志郎 and 石原昇 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692512,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices},
  booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials},
  year = 2015,
}

@inproceedings{CTT100695406,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology},
  booktitle = {SSDM2015, 2015 International Conference on Solod State Devices and Materials},
  year = 2015,
}

@inproceedings{CTT100695311,
  author = {佐布晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695310,
  author = {小西敏文 and 山根大輔 and 高安基大 and 伊藤浩之 and 道正志郎 and 石原昇 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {ゲイン制御型CMOS-MEMS加速度センサ回路の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695309,
  author = {山根大輔 and 小西敏文 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {Sub-1G?20G集積化MEMS加速度センサの基本評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695302,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695301,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695300,
  author = {Toshifumi Konishi and Daisuke Yamane and Motohiro Takayasu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100691819,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {AMC2015},
  year = 2015,
}

@inproceedings{CTT100693804,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers},
  booktitle = {MNE2015, The 41th International Conference on Micro and Nano Engineering},
  year = 2015,
}

@inproceedings{CTT100695295,
  author = {Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {Nano-G metrology system and its biomedical applications by CMOS-MEMS technology},
  booktitle = {Biological Systems: Open Access},
  year = 2015,
}

@inproceedings{CTT100695297,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {MEMS慣性センサを用いた移動体制御の検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692273,
  author = {高安 基大 and 山根 大輔 and 小西 敏文 and 亀井 将太 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {慣性センサを用いた移動体制御の基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692272,
  author = {寺西美波 and Chang Tso-Fu Mark and 山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 年吉 洋 and 町田克之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製した微小カンチレバーの形状安定性評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695298,
  author = {寺西美波 and Tso-Fu Mark Chang and 小西敏文 and 松島隆明 and 町田克之 and 年吉 洋 and 山根大輔 and 伊藤浩之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製したMEMSデバイスにおける動作構造安定性},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100682962,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Toshifumi Konishi and Masaki Yano and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu and Tatsuo Sato and Masato Sone},
  title = {Stability of Movable Structure Formed by Au Electroplating for MEMS Devices},
  booktitle = {ICMAT2015 & IUMRS-ICA2015,},
  year = 2015,
}

@inproceedings{CTT100690965,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G MEMS Sensor},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100686947,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100684706,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1G検出可能な3軸MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683810,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {エネルギーハーべスティングデバイスの検討（5）},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683809,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100678033,
  author = {Takaaki Matsushima and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100678032,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A 1mG-to-20G Integrated MEMS Inertial Sensor},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677572,
  author = {松島隆明 and 山根大輔 and 小西敏文 and 年吉洋 and 益 一哉 and 町田克之},
  title = {Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677570,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {集積化ＣＭＯＳ?ＭＥＭＳ技術によるＳｕｂ-１Ｇ加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677573,
  author = {小西敏文 and 松島隆明 and 山根大輔 and 益 一哉 and 年吉洋 and 町田克之},
  title = {回路シミュレータを用いたＭＥＭＳエネルギーハーベスティングデバイスの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100677571,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 亀井将太 and 益 一哉 and 町田克之},
  title = {高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676376,
  author = {亀井将太 and 山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676374,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676378,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {エネルギーハーべスティングデバイスの検討（４）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676377,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {積層メタル構造による３軸加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100676375,
  author = {Toshifumi Konishi and Takaaki Matsushima and Daisuke Yamane and Kazuya Masu and Hiroshi Toshiyoshi and Katsuyuki Machida},
  title = {A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674567,
  author = {山根大輔 and 亀井将太 and 小西敏文 and 松島隆明 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674569,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 益 一哉 and 年吉 洋 and 町田克之},
  title = {マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674568,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 亀井将太 and 年吉 洋 and 益 一哉 and 町田克之},
  title = {積層メタルによる静電容量型3軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100674565,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100684704,
  author = {Yusuke Shiino and Hiroyuki Ito and Taku Fujiwara and Noboru Ishihara and Hisashi Yamanouchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {An Ultra Low Power pH-Monitoring IC with a Duty-Cycling Wireless FM-Transmitter},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673061,
  author = {山根大輔 and 松島隆明 and 小西敏文 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673063,
  author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Integrated CMOS-MEMS Technology and its Application},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100673062,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100669023,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668508,
  author = {伊藤浩之 and 小西敏文 and 松島隆明 and 山根大輔 and 石原 昇 and 町田克之 and 益 一哉},
  title = {RF受信機のためのアレイ型MEMS共振器ミキサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668510,
  author = {松島隆明 and 小西敏文 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサ-２軸ＭＥＭＳ加速度センサの検討-},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668509,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {Sub-1G MEMS加速度センサの検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668513,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {MEMS加速度センサによるSub-1G検出の基礎検討},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668512,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベスティングデバイスの検討（２）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100668511,
  author = {小西敏文 and 加賀谷 賢 and 山根大輔 and 松島隆明 and 伊藤浩之 and 石原 昇 and 益 一哉 and 町田克之 and 年吉 洋},
  title = {エネルギーハーベスティングデバイスの検討（３）},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100663423,
  author = {伊藤浩之 and 小西敏文 and 山根大輔 and 石原 昇 and 町田克之 and 益 一哉},
  title = {ミキサファーストRF 受信機のためのMEMS 共振器ミキサの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663420,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1G MEMS Accelerometer},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663432,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの特性評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663429,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 丸山智史 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {マルチフィジクスシミュレーションを用いた集積化CMOS-MEMS技術のためのセンサ回路の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100663428,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベストデバイスの小型化の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100661182,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 町田克之 and 益 一哉 and 年吉 洋},
  title = {CMOSとMEMS集積のためのシミュレーション解析-集積化CMOS-MEMSデバイス実現に向けて-},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660290,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの基本特性評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660521,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Satoshi Maruyama and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660520,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 松島隆明 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {エネルギーハーベストデバイスの検討(1)},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660291,
  author = {小西敏文 and 山根大輔 and 松島隆明 and 丸山智史 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {集積化CMOS-MEMS加速度センサ回路の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100660522,
  author = {椎野雄介 and 藤原琢 and 伊藤浩之 and 石原昇 and 山内悠 and 田邉裕貴 and 野村聡 and 小西敏文 and 町田克之 and 益一哉},
  title = {ISFETを用いたワイヤレスpHモニタリング用低電力FM送信IC},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100659144,
  author = {佃 真文 and 山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの基礎検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658941,
  author = {小西敏文 and 丸山智史 and 山根大輔 and 松島隆明 and 町田克之 and 益 一哉 and 年吉 洋},
  title = {回路シミュレータを用いた集積化CMOS-MEMSのための統合設計環境の構築},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658940,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 加賀谷 賢 and 佃 真文 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益 一哉},
  title = {金メッキ集積化CMOS-MEMSによるアレイ型加速度センサの小型化},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658938,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654655,
  author = {小西敏文 and 山根大輔 and 本橋 剛 and 加賀谷 賢 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの設計},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654654,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 本橋 剛 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100653238,
  author = {椎野雄介 and 藤原琢 and 伊藤浩之 and 石原昇 and 山内 悠 and 田邉裕貴 and 野村聡 and 小西敏文 and 町田克之 and 益一哉},
  title = {ISFETを用いたpHモニタリング用低電力FM送信ICの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654652,
  author = {町田克之 and 小西敏文 and 山根大輔 and 年吉洋 and 益一哉},
  title = {集積化CMOS-MEMS技術の検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654653,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 本橋 剛 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＣＭＯＳ-ＭＥＭＳ加速度センサのためのデバイスの評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658939,
  author = {Hiroshi Toshiyoshi and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {A Mixed-Design Technique for Integrated MEMS using a Circuit Simulator with HDL},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100646781,
  author = {Hiroshi Toshiyoshi and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {A Multi-Physics Simulation Technique for Integrated MEMS},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100661262,
  author = {Kazuya Masu and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi},
  title = {How can we bridge the gap between photonics and Si CMOS LSI?},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645032,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {統合設計技術のためのMEMS加速度センサのモデルの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645434,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645037,
  author = {Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi},
  title = {Multi-physics Equivalent Circuit Models for MEMS Sensors and Actuators},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645036,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサのためのデバイスの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645035,
  author = {伊藤浩之 and 山根大輔 and 小西敏文 and 石原 昇 and 町田克之 and 益一哉},
  title = {RFミキサ回路のため高速MEMSスイッチの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645034,
  author = {小西敏文 and 丸山智史 and 三田信 and 山根大輔 and 伊藤浩之 and 町田克之 and 石原 昇 and 益一哉 and 藤田博之 and 年吉 洋},
  title = {ハードウェア記述言語を用いた集積化CMOS-MEMS統合設計技術},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645029,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644389,
  author = {松島 隆明 and 小西 敏文 and 本橋 剛 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（3）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644392,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644391,
  author = {Toshifumi Konishi and Satoshi Maruyama and Makoto Mita and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644390,
  author = {本橋 剛 and 小西 敏文 and 松島 隆明 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（4）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100640424,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100653249,
  author = {山根大輔 and 本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100635241,
  author = {本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS 加速度センサの検討(1)},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100635244,
  author = {小西敏文 and 本橋剛 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS 加速度センサの検討 (2)},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100645031,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 益一哉 and 町田克之},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100629997,
  author = {小西 敏文 and 丸山 智史 and 松島 隆明 and 三田 信 and 町田 克之 and 伊藤 浩之 and 石原 昇 and 益一哉 and 藤田 博之 and 年吉 洋},
  title = {集積化 CMOSCMOS--MEMSMEMS のための統合設計技術統合設計技術の検討 (2)},
  booktitle = {第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14},
  year = 2011,
}

@inproceedings{CTT100613068,
  author = {藤原 琢 and 石原 昇 and 天川 修平 and 山之内 悠 and 田邉 裕貴 and 野村 聡 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {ISFET を用いた小型低電力ワイヤレス pH センサモジュール},
  booktitle = {応用物理学会集積化 MEMS 技術研究会主催 集積化 MEMS シン ポジウ ム 2010},
  year = 2010,
}

@inproceedings{CTT100612097,
  author = {藤原 琢 and 石原 昇 and 天川 修平 and 山内 悠 and 田邉 裕貴 and 野村 聡 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {ISFETを用いたワイヤレスpHセンシング用低電力FM送信IC},
  booktitle = {2010 年電子情報通信学会エレクトロニクスソサイエティ大会},
  year = 2010,
}

@inproceedings{CTT100612617,
  author = {Toshifumi Konishi and Satoshi Maruyama and Takaaki Matsushima and Makoto Mita and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu and Hiroyuki Fujita and Hiroshi Toshiyoshi},
  title = {A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS},
  booktitle = {Extended Abstracts of the 2010 International Conference on Solid State Devices and Materials},
  year = 2010,
}

@inproceedings{CTT100608501,
  author = {Taku Fujiwara and Noboru Ishihara and Shuhei Amakawa and Hisashi Yamauchi and Hiroki Tanabe and Satoshi Nomura and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {A Wearably Small Low-Power Wireless pH Sensor Module Incorporating an lon-sensitive Field-Effect Transtor},
  booktitle = {The 13th International Meeting on Chemical Sensors (IMCS-13)},
  year = 2010,
}

@inproceedings{CTT100607461,
  author = {藤原 琢 and 石原 昇 and 山内 悠 and 田邉 裕貴 and 野村 聡 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {ISFETを用いた生体・環境モニタリング用ワイヤレスpHセンサモジュール},
  booktitle = {LSIとシステムのワークショップ2010},
  year = 2010,
}

@inproceedings{CTT100605007,
  author = {藤原 琢 and 石原 昇 and 天川 修平 and 山内 悠 and 田邉 裕貴 and 野村 聡 and 小西 敏文 and 町田 克之 and 益 一},
  title = {ISFET を用いたワイヤレス pH センサモジュール},
  booktitle = {2010 年 電子情報通信学会総合大会},
  year = 2010,
}

@inproceedings{CTT100589787,
  author = {藤原 琢 and 石原 昇 and 天川 修平 and 田邉 裕貴 and 野村 聡 and 小西 敏文 and 町田 克之 and 益 一哉},
  title = {pHセンサ用ISFET特性のモデリング},
  booktitle = {2009年（平成21年）秋季第70回応用物理学会学術講演会},
  year = 2009,
}