@inproceedings{CTT100613551,
  author = {Kiichi Tachi and N. Vulliet and S. Barraud and B. Guillaumot and V. Maffini-Alvaro and C. Vizioz and C. Arvet and Y. Campidelli and P. Gautier and J.M. Hartmann and T. Skotnicki and S. Cristoloveanu and HIROSHI IWAI},
  title = {3D Source/Drain Doping Optimization in Multi-Channel MOSFET},
  booktitle = {},
  year = 2010,
}