@article{CTT100615344,
  author = {Tadahiro Ohmi and Hiraku ISHIKAWA and Toshihisa NOZAWA and Takaaki MATSUOKA and Akinobu TERAMOTO and Masaki HIRAYAMA and Takashi ITO and Tadahiro OHMI},
  title = {Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-k Copper Metallization},
  journal = {Japanese Journal of Applied Physics},
  year = 2008,
}