論文

• Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda, Yasuyuki Shirai, Akinobu Teramoto, Masaki Hirayama, Tadahiro Ohmi, Takayuki Watanabe, Takashi Ito. Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system, J. Vac. Sci. Technol. A, J. Vac. Sci. Technol. A, Vol. A27, No. 3, pp. 465-470, Mar. 2009.
• Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda, Yasuyuki Shirai, Akinobu Teramoto, Masaki Hirayama, Tadahiro Ohmi, Takayuki Watanabe, Takashi Ito. High-Efficiency PFC Abatement System Utilizing High-Efficiency PFC Abatement System Utilizing Immobilization, IEEE Trans. on Semicon. Manufacturing, IEEE, Vol. 21, No. 4, pp. 668-675, Nov. 2008.

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