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ImaiHiroshi 研究業績一覧 (1件)
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論文
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Takenao Nemoto,
Hiroshi Imai,
Akinobu Teramoto,
Takashi Ito,
Shigetoshi Sugawa,
Tadahiro Ohmi.
Tantalum Nitride Sputtering Deposition with Xe on Fluorocarbon for Cu Interconnections,
Journal of The Electrochemical Society,
The Electrochemical Society,
Vol. 155,
No. 5,
pp. H323-H328,
Mar. 2008.
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