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研究業績一覧 (1件)
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論文
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ダリューシュザデ,
Kuniyuki KAKUSHIMA,
Takashi Kanda,
Y.C.Lin,
Ahmet Parhat,
KAZUO TSUTSUI,
西山彰,
Nobuyuki Sugii,
E.Y.Chang,
KENJI NATORI,
takeo hattori,
HIROSHI IWAI.
Improving electrical characteristics of W/HfO2/Ino.53Gao.47As gate stacks by altering deposition techniques,
Microelectronic Engineering,
Vol. 88,
No. 7,
pp. 1109-1112,
July 2011.
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