@article{CTT100647652, author = {マイマイティ マイマイティレャアティ and 久保田透 and 関拓也 and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 片岡好則 and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Oxide and interface trap densities estimation in ultrathin W/ La2O3/Si MOS capacitors}, journal = {Microelectronics Reliability}, year = 2012, } @inproceedings{CTT100673468, author = {関拓也 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Si(110),(111)基盤上で熱処理による界面反応で形成したLa-silicateゲート絶縁膜の物理的理解に関する研究}, booktitle = {}, year = 2014, } @inproceedings{CTT100672963, author = {関拓也 and Kuniyuki KAKUSHIMA and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Physical understanding of La-silicate gate dielectrics thermally formed by interface reaction on Si(110) and (111)}, booktitle = {}, year = 2014, } @inproceedings{CTT100658365, author = {関拓也 and Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Infrared absorption study of La-silicate gate dielectrics}, booktitle = {}, year = 2013, } @inproceedings{CTT100654161, author = {マイマイティ マイマイティレャアティ and 関拓也 and Kuniyuki KAKUSHIMA and Ahmet Parhat and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Evaluation of oxide traps in La based oxides for direct high-k/Si capacitor}, booktitle = {}, year = 2013, } @inproceedings{CTT100658546, author = {関拓也 and Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {International Symposium on Next-Generation Electronics(ISNE 2013)}, booktitle = {}, year = 2013, } @inproceedings{CTT100657188, author = {マイマイティ マイマイティレャアティ and 関拓也 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Evaluation of oxide traps in La based oxides for direct high-k/Si capacitor}, booktitle = {}, year = 2012, } @inproceedings{CTT100627781, author = {関 拓也 and 来山大祐 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {High-k/Si 直接接合構造における界面準位の定量評価について}, booktitle = {}, year = 2011, }