@inproceedings{CTT100634689,
  author = {Yasuhisa Sato and Rinshi Sugino and Masaki Okuno and Nobuo Kikuchi and Junichi Teramae and Akinao Ogawa and Shinpei Hijiya and Takashi Ito},
  title = {Photo-Excited Dry Cleaning for ULSI},
  booktitle = {Proc. of VLSI Symp. on Tech. System and Application},
  year = 1991,
}