@inproceedings{CTT100634733,
  author = {Yoshihiro Sugita and Naoki Awaji and Satoshi Ohkubo and Satoru Watanabe and Satoshi Komiya and Takashi Ito},
  title = {X Ray Refractometry and Infrared Analysis of Native Oxides on Si(100) Formed in Chemical Treatment},
  booktitle = {Ext. Abst. of 1995 Int. Conf. on SSDM},
  year = 1995,
}