@article{CTT100646368, author = {Kiichi Tachi and N. Vulliet and S. Barraud and Kuniyuki KAKUSHIMA and HIROSHI IWAI and S. Cristoloveanu and T. Ernst}, title = {Influence of source/drain formation process on resistance and effective mobility for scaled multi-channel MOSFET”}, journal = {Solid-State Electronics}, year = 2011, }