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研究業績一覧 (1件)
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国際会議発表 (査読なし・不明)
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Youhei Miyata,
Jun Kanehara,
Hiroshi Nohira,
Y. Izumi,
T. Muro,
木下豊彦,
パールハットアヘメト,
Kuniyuki KAKUSHIMA,
KAZUO TSUTSUI,
takeo hattori,
HIROSHI IWAI.
Soft X-ray Photoelectron Spectroscopy Study of Boron Doped on Top Surfaces and Sidewalls of Si Fin Structures,
2012 12th International Workshop on Junction Technology(IWJT2012),
2012.
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