@article{CTT100800956,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu},
  title = {A MEMS Accelerometer for Sub-mG Sensing},
  journal = {Sensors and Materials},
  year = 2019,
}

@article{CTT100766253,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology},
  journal = {},
  year = 2018,
}

@article{CTT100751410,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY},
  journal = {Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)},
  year = 2017,
}

@article{CTT100721712,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer},
  journal = {Microelectronics Reliability},
  year = 2016,
}

@article{CTT100733964,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology},
  journal = {IEEE Proceeding},
  year = 2016,
}

@inproceedings{CTT100782446,
  author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100777398,
  author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775374,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {Au単一錘平行平板型3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775380,
  author = {乙部 翔太 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775377,
  author = {古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100769399,
  author = {Shota Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760803,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 陳 君怡 and Chang Tso-Fu Mark and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉 and 飯田 慎一},
  title = {積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760805,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760801,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 佐布 晃昭 and 小西 敏文 and 道正 志郎 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {単一Au錘3軸差動MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100780789,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu and Shinichi Iida},
  title = {Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780791,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755519,
  author = {新島 宏文 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755522,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタルMEMS慣性センサの長期振動特性評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755521,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755388,
  author = {乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753438,
  author = {Shouta Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752534,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 橘 航一朗 and 寺西 美波 and 陳 君怡 and Tso-Fu Mark Chang and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {金めっきで形成したMEMS加速度センサの長期振動特性に関する検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745680,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735889,
  author = {山根 大輔 and 小西 敏文 and 佐布 晃昭 and 中島 英亮 and 寺西 美波 and 陳 君怡 and Chang Tso-Fu Mark and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735898,
  author = {佐布 晃昭 and 小西 敏文 and 山根 大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術による3軸MEMS加速度センサのばね定数設計方法},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735897,
  author = {小西敏文 and 山根 大輔 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100734201,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hideaki Nakajima and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733961,
  author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733960,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733959,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {差動型積層メタルMEMS加速度センサの検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716614,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {Sub-1mG検出へ向けた積層メタルMEMS慣性センサ},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100721709,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716615,
  author = {佐布 晃昭 and 小西 敏文 and 山根大輔 and 年吉 洋 and 曽根 正人 and 益 一哉 and 町田 克之},
  title = {積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100716613,
  author = {山根大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 年吉 洋 and 益 一哉 and 町田 克之},
  title = {積層メタル差動型MEMS加速度センサの基礎検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100710653,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100702918,
  author = {小西敏文 and 山根大輔 and 佐布晃昭 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100695308,
  author = {佐布 晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695406,
  author = {Daisuke Yamane and Toshifumi Konishi and Motohiro Takayasu and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology},
  booktitle = {SSDM2015, 2015 International Conference on Solod State Devices and Materials},
  year = 2015,
}

@inproceedings{CTT100695311,
  author = {佐布晃昭 and 小西敏文 and 松島隆明 and 山根大輔 and 年吉 洋 and 曽根正人 and 益 一哉 and 町田克之},
  title = {MEMS加速度センサのための金属構造体の密着力評価},
  booktitle = {},
  year = 2015,
}