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財満鎭明 研究業績一覧 (1件)
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論文
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Noriyuki Taoka,
Osamu Nakatsuka,
Yoriko Mizushima,
Hideki Kitada,
Young Suk Kim,
Tomoji Nakamura,
Takayuki Ohba,
Shigeaki Zaima.
Observation of lattice spacing fluctuation and strain undulation around through-Si vias in wafer-on-wafer structures using X-ray microbeam diffraction,
Japanese Journal of Applied Physics,
Volume 53,
Apr. 2014.
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