@misc{CTT100725943,
  author = {},
  title = {Study on dry etching for profile and selectivity control in ULSI (ultra-large scale integrated circuits) manufacturing},
  year = 2004,
}



@phdthesis{CTT100725943,
  author = {},
  title = {Study on dry etching for profile and selectivity control in ULSI (ultra-large scale integrated circuits) manufacturing},
  school = {東京工業大学},
  year = 2004,
}