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研究業績一覧 (1件)
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論文
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T. Yahiro,
S. Suzuki,
T. Irita,
N. Hirayanagi,
H. Shimizu,
S. Kojima,
K. Morita,
S. Kawata,
T. Okino,
Kazuaki Suzuki.
Direct measurement of Coulomb effects in electron beam projection lithography,
J. Vac. Sci. Technol. B,
American Vacuum Society,
Vol. 19,
pp. 2468-2473,
2001.
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