@article{CTT100910025,
  author = {Yuki Taoka and Tomohiro Ryo and Sanchuan XU and Shigeki SAITO},
  title = {Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes},
  journal = {Engineering Research Express},
  year = 2024,
}

@article{CTT100910024,
  author = {Yuki Taoka and Terumichi Hayashi and Sanchuan XU and Shigeki SAITO},
  title = {Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure},
  journal = {Advanced Robotics},
  year = 2023,
}

@inproceedings{CTT100910020,
  author = {Sanchuan XU and Yuki Taoka and Shigeki SAITO},
  title = {Attractive Force Increased by Rotational Degree Of-Freedom Tip Structure Used in Beam Structure Electrostatic Chucks},
  booktitle = {},
  year = 2024,
}

@inproceedings{CTT100869421,
  author = {Sanchuan XU and Yuki Taoka and Shigeki SAITO},
  title = {Rotational-Degree-Of -Freedom Tip Structure Used in Collective Beam Structure Electrostatic Chuck for Curved Surfaces},
  booktitle = {2022年度精密工学会春季大会学術講演会論文集},
  year = 2022,
}