@article{CTT100905515, author = {Y. Takamura and H. Nitta and K. Kawahara and T. Kaneko and R. Ishido and T. Miyazaki and N. Hosoda and K. Fujisaki and S. Nakagawa}, title = {Fabrication of CoFeB–SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors}, journal = {IEEE Transactions on Magnetics}, year = 2023, } @inproceedings{CTT100926585, author = {山中 希未斗 and 仁田 帆南 and 宮﨑 達也 and 佐藤 佑樹 and 石戸亮祐 and 難波 央 and 石井 孝太郎 and 藤﨑 敬介 and 中川 茂樹 and 髙村陽太}, title = {タイル型薄膜磁心を用いたスパイラルインダクタの自己共振点の高周波化の検討}, booktitle = {電気学会研究会資料}, year = 2024, } @inproceedings{CTT100910032, author = {山中希未斗 and 仁田帆南 and 宮﨑達也 and 石戸亮祐 and 藤﨑敬介 and 中川茂樹 and 高村陽太}, title = {タイル型CoFeB-SiO2薄膜磁心を用いた高周波対応スパイラルインダクタ}, booktitle = {令和6年電気学会全国大会論文集}, year = 2024, } @inproceedings{CTT100906193, author = {仁田帆南 and 山中希未斗 and 宮﨑達也 and 石戸亮祐 and 藤﨑敬介 and 中川茂樹 and 髙村陽太}, title = {対向ターゲット式スパッタ法で成膜したCoFeB-SiO2 を磁性コアとした平面スパイラルインダクタの作製プロセスの改善}, booktitle = {電気学会研究会資料}, year = 2023, } @inproceedings{CTT100905836, author = {Y. Takamura and H. Nitta and R. Ishido and T. Kaneko and T. Miyazaki and N. Hosoda and K. Fujisaki and S. Nakagawa}, title = {Research on planar type spiral inductors with facing traget sputtered CoFeB-SiO2 magnetic layers for Power Electronics Circuits}, booktitle = {}, year = 2023, } @inproceedings{CTT100891377, author = {Y. Takamura and H. Nitta and K. Kawahara and T. Kaneko and R. Ishido and T. Miyazaki and N. Hosoda and K. Fujisaki and S. Nakagawa}, title = {Fabrication of CoFeB-SiO2 films with large uniaxial anisotropic by facing target sputtering and its application to high frequency planar type spiral inductors}, booktitle = {Intermag 2023 Digest Book}, year = 2023, } @inproceedings{CTT100887540, author = {仁田帆南 and 金子忠幸 and 河原和馬 and 石戸亮祐 and 宮﨑達也 and 細田尚揮 and 藤﨑敬介 and 中川茂樹 and 高村陽太}, title = {対向ターゲット式スパッタで作製したCoFeB-SiO2薄膜を用いた長方形スパイラルインダクタ}, booktitle = {}, year = 2023, }