@inproceedings{CTT100939385,
  author = {Wentao He and Tetsuji Kiyota and Kenta Doi and Tomomitsu Ozeki and Atsusi Nezu and Hiroshi Akatsuka},
  title = {Spatially-Resolved Measurements Of Electron Temperature And Density Of Oxygen ICP By Tomographic Emission Spectroscopy},
  booktitle = {Program Book of AEPSE2025},
  year = 2025,
}

@inproceedings{CTT100939566,
  author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Kazuki Shimatani and Hinata Hanyu and Ayaki Sakurai and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Effects of Bias Power on EEPFs near the Substrate in Argon ICP Measured by a Langmuir Probe},
  booktitle = {Proc. DPS2025},
  year = 2025,
}

@inproceedings{CTT100939033,
  author = {Kazuki Shimatani and Tetsuji Kiyota and Kenta Doi and Yuya Yamashita and Wataru Kikuchi and Kenta Ishi and Yuchen Ye and Ayaki Sakurai and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Spatial distribution measurement of electron temperature and density of inductively coupled nitrogen plasma by tomographic optical emission spectroscopy},
  booktitle = {Bull. American Phys. Soc.},
  year = 2025,
}

@inproceedings{CTT100939013,
  author = {He Wentao and Tetsuji Kiyota and Kenta Doi and Yuya Yamashita and Wataru Kikuchi and Shuhei Watanabe and Ayaki Sakurai and Yuchen Ye and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Spatially Resolved Parameter-Measurement of Oxygen ICP via Optical Emission Spectroscopy with Tomographic Analysis},
  booktitle = {Bull. American Phys. Soc.},
  year = 2025,
}

@inproceedings{CTT100939034,
  author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Wataru Kikuchi and Kazuki Shimatani and Hinata Hanyu and Wentao He and Ayaki Sakurai and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Spatial distribution of electron temperature and density in argon RF-biased ICP with non-quasi-neutrality effects},
  booktitle = {Bull. American Phys. Soc.},
  year = 2025,
}

@inproceedings{CTT100937886,
  author = {何 文涛 and 清田 哲司 and 土居 謙太 and 中尾 裕利 and 小関 智光 and 内記 一宏 and Li Kangbai and 大見 俊一郎 and 赤塚 洋},
  title = {トモグラフィー発光分光法による減圧酸素ICPの空間分解計測},
  booktitle = {第86回応用物理学会秋季学術講演会 講演予稿集},
  year = 2025,
}

@inproceedings{CTT100937887,
  author = {福本 晃己 and 土居 謙太 and 清田 哲司 and 山下 雄也 and 菊地 航行 and 根津 篤 and 赤塚 洋},
  title = {低気圧アルゴンプラズマの空間平均分光計測と局所電子温度・密度との関係},
  booktitle = {第86回応用物理学会秋季学術講演会 講演予稿集},
  year = 2025,
}

@inproceedings{CTT100930590,
  author = {中川 茂樹 and 横澤 諒 and 飯田 大介 and 高村 陽太 and 中光 豊 and 清田 哲司},
  title = {スパッタＷ膜形成時の内部応力in-situ観測による成長機構解析},
  booktitle = {},
  year = 2025,
}