@article{CTT100940915,
  author = {Masako Okumura and Tomoyuki Kurioka and Torauto Yamada and Tatsuhiko Mori and Katsuyuki Machida and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Single-axis gold micro-electro-mechanical-systems capacitive accelerometer with circular proof-mass for suppressing warpage},
  journal = {Japanese Journal of Applied Physics},
  year = 2026,
}

@inproceedings{CTT100941062,
  author = {奥村 雅子 and 栗岡 智行 and 山田 虎人 and 森 達彦 and 向出 千隼 and Chen Chun-Yi and Chang Tso-Fu Mark and 三宅 美博 and 伊藤 浩之 and 町田 克之 and 曽根 正人},
  title = {円形金錘1軸静電容量型MEMS加速度センサの構造とデバイス特性評価},
  booktitle = {第73回応用物理学会春季学術講演会},
  year = 2026,
}