@article{CTT100910024, author = {Yuki Taoka and Terumichi Hayashi and Sanchuan XU and Shigeki SAITO}, title = {Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure}, journal = {Advanced Robotics}, year = 2023, } @article{CTT100869425, author = {Yuki Taoka and Terumichi Hayashi and Pasomphone Hemthavy and Kunio Takahashi and Shigeki Saito}, title = {Development of a bipolar electrostatic chuck with a compliant beam-array assembly having four 3D-printed layers for large film handling}, journal = {Engineering Research Express}, year = 2022, } @inproceedings{CTT100847471, author = {林 輝道 and 田岡 祐樹 and 齊藤 滋規}, title = {集合梁構造を有する双極型静電吸着デバイスを用いた曲面形状への薄膜対象物貼り付け手法の開発}, booktitle = {}, year = 2021, } @inproceedings{CTT100891355, author = {Terumichi Hayashi and Yuki Taoka and Shigeki Saito}, title = {Development of a Compliant Bipolar Electrostatic Chuck Having 3D-Printed Elastically-Deformable Beams for Handling Large Film}, booktitle = {}, year = 2019, } @inproceedings{CTT100794000, author = {林輝道 and HEMTHAVYPASOMPHONE and 高橋邦夫 and 齋藤滋規}, title = {集合梁構造により表面柔軟性を有する双極型静電吸着デザイスの大面積化}, booktitle = {2019年度精密工学会春季大会講演論文集}, year = 2019, }