@inproceedings{CTT100698741,
  author = {H. Akatsuka and E. Tanaka and K. Ando and A. Nezu and D. Kuwahara and S.Shinohara},
  title = {Approximate Monitoring of Electron Temperature and Density of Argon-Based Plasma by Line-Intensity Ratio Measurement with Collisional Radiative Model},
  booktitle = {Proceedings of 2015 International Symposium on Dry Process},
  year = 2015,
}