@inproceedings{CTT100910029, author = {Shigeki Saito and Jeremy Gavriel and Juntian Zhou and Yuki Taoka}, title = {Effect of Heat-Induced Adjustable Stiffness at the Contact Interface on the Gripping Force of a Bipolar Electrostatic Chuck}, booktitle = {}, year = 2023, } @inproceedings{CTT100886530, author = {Jeremy Gavriel and Yuki Taoka and shigeki saito}, title = {Influence of heatinduced changeable stiffness a t the contact interface o n the gripping force of a bipolar electrostatic chuck}, booktitle = {}, year = 2023, } @inproceedings{CTT100886550, author = {Jeremy Gavriel and Yuki Taoka and shigeki saito}, title = {Influence of the surface conductivity of a polymer film on the attractive force of a bipolar electrostatic chuck}, booktitle = {}, year = 2022, } @inproceedings{CTT100847470, author = {ジェレミー ガブリエル and 田岡 祐樹 and 齊藤 滋規}, title = {吸着対象物としてのポリマーフィルムの表面導電性が双極型静電吸着デバイスの発生力に与える影響}, booktitle = {2021年度精密工学会春季大会学術講演会講演論文集}, year = 2021, }