@inproceedings{CTT100622684, author = {小山将央 and Naoto Shigemori and Hideaki Arai and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Lateral encroachment of Ni silicide into silicon nanowire}, booktitle = {}, year = 2011, } @inproceedings{CTT100603770, author = {佐藤創志 and 新井英朗 and 角嶋邦之 and パールハットアヘメト and 大毛利 健治 and 名取研二 and 岩井洋 and 山田啓作}, title = {Siナノワイヤトランジスタの電気特性の断面形状依存症}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603768, author = {茂森直登 and 新井英朗 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 西山彰 and 筒井一生 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {酸化膜中のSiナノワイヤへのNi拡散の制御}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100630960, author = {小山将央 and 茂森直登 and 新井英朗 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Lateral encroachment of Ni silicide into Si nanowire}, booktitle = {}, year = 2010, } @inproceedings{CTT100597761, author = {Hideaki Arai and Hideyuki Kamimura and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Annealing Reaction for Ni Silicidation of Si Nanowire}, booktitle = {}, year = 2009, } @inproceedings{CTT100597913, author = {Soshi Sato and Hideaki Arai and Kuniyuki KAKUSHIMA and Ahmet Parhat and HIROSHI IWAI}, title = {Evaluation of Channel Potential Profile of Si Nanowire Field Effect Transistor}, booktitle = {}, year = 2009, } @inproceedings{CTT100597926, author = {Hideaki Arai and Hideyuki Kamimura and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and 西山彰 and KAZUO TSUTSUI and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Annealing Reaction for Ni Silicidation of Si Nanowire}, booktitle = {}, year = 2009, } @inproceedings{CTT100597754, author = {Soshi Sato and Hideyuki Kamimura and Hideaki Arai and Kuniyuki KAKUSHIMA and Ahmet Parhat and Kenji Ohmori and Keisaku Yamada and HIROSHI IWAI}, title = {High-Performance Si Nanowire FET with a Semi Gate-Around Structure Suitable for Integration}, booktitle = {}, year = 2009, } @inproceedings{CTT100585291, author = {岩井洋 and 山田啓作 and 大毛利健二 and 筒井一生 and 角嶋邦之 and パールハットアヘメト and 佐藤創志 and 上村英之 and 新井英朗}, title = {トップダウンSiナノワイヤFETの作製法とその電気的特性のサーベイ}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100585426, author = {新井英朗 and 上村英之 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {SiナノワイヤへのNiシリサイド形成の評価}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100585423, author = {佐藤創志 and 上村英之 and 新井英朗 and 角嶋邦之 and パールハットアヘメト and 大毛利健二 and 筒井一生 and 杉井信之 and 服部健雄 and 山田啓作 and 岩井洋}, title = {四端子測定TEGを用いたSiナノワイヤトランジスタのチャネル内電位の測定}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100586495, author = {Hideyuki Kamimura and Hideaki Arai and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Evaluation of Lateral Ni Diffusion in Si Nanowire Schottky Contact}, booktitle = {ISTC /CSTIC2009}, year = 2009, } @inproceedings{CTT100576517, author = {新井英朗 and 上村英之 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 服部健雄 and 杉井信之 and 岩井洋}, title = {熱酸化によるSi ナノワイヤの作製とその電気特性}, booktitle = {応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100585100, author = {佐藤創志 and 上村英之 and 新井英朗 and 大毛利健二 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 服部健雄 and 杉井信之 and 山田啓作 and 岩井洋}, title = {Si Finのアスペクト比最適化により作製した円形Siナノワイヤの形状に関する研究}, booktitle = {秋季第69回応用物理学会学術講演会予稿集}, year = 2008, }