@article{CTT100931818, author = {Sotaro Kageyama and Kazuki Okamoto and Shinnosuke Yasuoka and Keisuke Ide and Kota Hanzawa and Yoshiomi Hiranaga and Pochun Hsieh and Sankalpa Harza and Albert Suceava and Akash Saha and Hiroko Yokota and Kei Shigematsu and Masaki Azuma and Venkatraman Gopalan and Hiroshi Uchida and Hidenori Hiramatsu and Hiroshi Funakubo}, title = {Realization of Non-Equilibrium Wurtzite Structure in Heterovalent Ternary MgSiN2 Film Grown by Reactive Sputtering}, journal = {Adv. Electron. Mater.}, year = 2025, } @inproceedings{CTT100931776, author = {河野駿平 and 岡本一輝 and 影山壮太郎 and 孫納納 and 安岡慎之介 and 舟窪浩}, title = {(Al,Sc)N強誘電体薄膜におけるスイッチング特性の結晶構造依存性}, booktitle = {}, year = 2025, } @inproceedings{CTT100931784, author = {影山壮太郎 and 岡本一輝 and 平永良臣 and 上岡義弘 and 召田雅実 and 舟窪浩}, title = {ウルツ鉱構造異原子価3元系窒化物MgSiN2薄膜の作製と評価}, booktitle = {}, year = 2025, } @inproceedings{CTT100931781, author = {影山壮太郎 and 岡本一輝 and 平永良臣 and 舟窪浩}, title = {ウルツ鉱構造(Mg,Si)N-AlN固溶体薄膜の作製と評価”、第72回応用物理学会春季学術講演会}, booktitle = {}, year = 2025, } @inproceedings{CTT100931770, author = {影山壮太郎 and 岡本一輝 and 平永良臣 and 舟窪浩}, title = {異原子価3元系窒化物MgSiN2薄膜の2段階成膜による結晶化温度の低減}, booktitle = {}, year = 2025, } @inproceedings{CTT100931774, author = {河野駿平 and 岡本一輝 and 影山壮太郎 and 孫納納 and 舟窪浩}, title = {(Al,Sc)N強誘電体薄膜の結晶構造及び電気特性に及ぼす成膜条件の影響}, booktitle = {}, year = 2025, } @inproceedings{CTT100931739, author = {Sotaro Kageyama and Kazuki Okamoto and Shinnosuke Yasuoka and Yoshiomi Hiranaga and Yoshihiro Ueoka and Masami Mesuda and Hiroshi Funakubo}, title = {Fabrication of (Mg,Si)N Films by Reactive RF Magnetron Sputtering Method and Their Structure and Electric Properties}, booktitle = {}, year = 2024, } @inproceedings{CTT100931736, author = {Sotaro Kageyama and Kazuki Okamoto and Shinnosuke Yasuoka and Yoshiomi Hiranaga and Hiroshi Uchida and Hiroshi Funakubo}, title = {Growth of Heterovalent Ternary Nitride, (Mg,Si)N, Thin Films and Their Piezoelectricity}, booktitle = {}, year = 2024, } @inproceedings{CTT100919974, author = {影山壮太郎 and 岡本一輝 and 安岡慎之介 and 上岡義弘 and 召田雅実 and 舟窪浩}, title = {MgSiN2薄膜の作製と特性評価}, booktitle = {}, year = 2024, } @inproceedings{CTT100919855, author = {影山壮太郎 and 岡本一輝 and 安岡慎之介 and 舟窪浩}, title = {スパッタリング法によるAlN-(Mg, Si)N膜の作製とその特性評価}, booktitle = {}, year = 2024, }