@inproceedings{CTT100909802,
  author = {Atsushi Shimizu and Keisuke Ide and Takayoshi Katase and Hidenori Hiramatsu and Hideo Hosono and Toshio Kamiya},
  title = {Optimization of deposition parameters for porous a-IGZO thin films using machine learning regression},
  booktitle = {},
  year = 2024,
}