@article{CTT100911911, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Using Continuum and Line Spectra}, journal = {Journal of Physics D: Applied Physics}, year = 2024, } @article{CTT100908519, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Kenta Ishi and Shuhei Watanabe and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model}, journal = {Journal of Vacuum Science & Technology A}, year = 2024, } @inproceedings{CTT100927998, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Yuchen Ye and Wataru Kikuchi and Kazuki Shimatani and Wentao He and Hinata Hanyu and Ayaki Sakurai and Atsushi Nezu and Hiroshi Akatsuka}, title = {トモグラフィック発光分光計測とAr衝突輻射モデルにもとづくCF4/O2/Arプラズマの診断--他原子種の励起状態分布が診断結果に及ぼす影響}, booktitle = {「プラズマの分光診断と原子分子素過程の研究フロンティア」 「原子分子データ応用フォーラムセミナー」要旨集}, year = 2024, } @inproceedings{CTT100927962, author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Ayaki Sakurai and Yuya Yamashita and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Detection of Two-Temperature Distributions of Argon ICP Using Collisional-Radiative Model and Tomographic Optical Emission Spectroscopy}, booktitle = {「プラズマの分光診断と原子分子素過程の研究フロンティア」「原子分子データ応用フォーラムセミナー」合同研究会(2024/12)要旨集}, year = 2024, } @inproceedings{CTT100927261, author = {J. Enomoto and W. Kikuchi and T. Taguchi and Y. Yamashita and A. Nezu and H. Akatsuka}, title = {Optical Emission Spectroscopy Measurement of Atmospheric Pressure Plasma Jet Considering Ionic Continuum Spectrum}, booktitle = {Extended Abstracts of the 41st Annual Meeting of JSPF}, year = 2024, } @inproceedings{CTT100927132, author = {H. Akatsuka and S. Watanabe and K. Doi and T. Kiyota and Y. Yamashita and W. Kikuchi and K. Ishi and Y. Ye and A. Nezu}, title = {Optical Emission Spectroscopic Measurement of Electron Temperature and Density of Oxygen ICP}, booktitle = {Proc. DPS2024}, year = 2024, } @inproceedings{CTT100925568, author = {uya Yamashita and Kenta Doi and Tetsuji Kiyota and Yuchen Ye and Kazuki Shimatani and Wentao He and Hinata Hanyu and Wataru Kikuchi and Ayaki Sakurai and Atsushi Nezu and Hiroshi Akatsuka}, title = {Positional distribution diagnosis of electron temperature, electron density, and EEDF of CF4/O2/Ar plasma based on tomographic optical emission spectroscopic measurement and argon collisional-radiative model}, booktitle = {Exetnded Abstracts of the 85th JSAP Autumn Meeting 2024}, year = 2024, } @inproceedings{CTT100925117, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Based on Continuum and Line Spectra with Weighted Analysis}, booktitle = {Proc. ICDDPS-5}, year = 2024, } @inproceedings{CTT100919092, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Based on Line Spectra with Undetected Level Densities}, booktitle = {Proceedings of 50th EPS Conference on Plasma Physics}, year = 2024, } @inproceedings{CTT100919093, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Wataru Kikuchi and Yuchen Ye and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement}, booktitle = {Proceedings of ESCAMPIG2024}, year = 2024, } @inproceedings{CTT100910225, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement}, booktitle = {Extended Abstracts of the 71st JSAP Spring Meeting}, year = 2024, } @inproceedings{CTT100910224, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Analysis of Atomospheric-pressure Non-equiribrium Ar Plasma Based on Continuum and Line spectra with Weighted Analysis}, booktitle = {Extended Abstracts of the 71st JSAP Spring Meeting}, year = 2024, } @inproceedings{CTT100909733, author = {Kenta Ishi and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Kazuma Yoneda and Shuhei Watanabe and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka}, title = {Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma}, booktitle = {Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13}, year = 2024, } @inproceedings{CTT100908453, author = {Kenta Ishi and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Kazuma Yoneda and Shuhei Watanabe and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka}, title = {Discussion on the Relationship between Number Densities of Excited States and Electron Temperature in Inductively Coupled Nitrogen Plasma}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100908457, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Wataru Kikuchi and Kenta Ishi and Shuhei Watanabe and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial Diagnosis of Electron Temperature and Density of Argon Inductively Coupled Plasma by Improved Spectral Tomography Algorithm}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100908454, author = {Shuhei Watanabe and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Wataru Kikuchi and Kenta Ishi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Optical Emission Spectroscopic Measurement of Inductively Coupled Oxygen Plasma}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100908455, author = {Kohei Yamashita and Wataru Kikuchi and Kenta Ishi and Jun Enomoto and Atsushi Nezu and Hiroshi Akatsuka}, title = {Optical Emission Spectroscopy Measurement of Vibrational and Rotational Temperatures in Ar/N2 Mixed Atmospheric-Pressure Non-Equilibrium Plasma}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100927260, author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Ayaki Sakurai and Yuya Yamashita and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements}, booktitle = {Extended Abstracts of the 41st Annual Meeting of JSPF}, year = 2024, }