@article{CTT100911911, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Using Continuum and Line Spectra}, journal = {Journal of Physics D: Applied Physics}, year = 2024, } @article{CTT100908519, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Kenta Ishi and Shuhei Watanabe and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model}, journal = {J. Vac. Sci. Technol. A}, year = 2024, } @inproceedings{CTT100909733, author = {Kenta Ishi and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Kazuma Yoneda and Shuhei Watanabe and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka}, title = {Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma}, booktitle = {Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13}, year = 2024, } @inproceedings{CTT100910224, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Analysis of Atomospheric-pressure Non-equiribrium Ar Plasma Based on Continuum and Line spectra with Weighted Analysis}, booktitle = {Extended Abstracts of the 71st JSAP Spring Meeting}, year = 2024, } @inproceedings{CTT100910225, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement}, booktitle = {Extended Abstracts of the 71st JSAP Spring Meeting}, year = 2024, } @inproceedings{CTT100908453, author = {Kenta Ishi and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Kazuma Yoneda and Shuhei Watanabe and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka}, title = {Discussion on the Relationship between Number Densities of Excited States and Electron Temperature in Inductively Coupled Nitrogen Plasma}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100908454, author = {Shuhei Watanabe and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Wataru Kikuchi and Kenta Ishi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Optical Emission Spectroscopic Measurement of Inductively Coupled Oxygen Plasma}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100908455, author = {Kohei Yamashita and Wataru Kikuchi and Kenta Ishi and Jun Enomoto and Atsushi Nezu and Hiroshi Akatsuka}, title = {Optical Emission Spectroscopy Measurement of Vibrational and Rotational Temperatures in Ar/N2 Mixed Atmospheric-Pressure Non-Equilibrium Plasma}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, } @inproceedings{CTT100908457, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Wataru Kikuchi and Kenta Ishi and Shuhei Watanabe and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial Diagnosis of Electron Temperature and Density of Argon Inductively Coupled Plasma by Improved Spectral Tomography Algorithm}, booktitle = {Proceedings of 41st Symposium on Plasma Processing (SPP-41)}, year = 2024, }