@book{CTT100748622,
  author = {Tso-Fu Mark Chang and Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors},
  publisher = {IFSA Publishing},
  year = 2017,
}

@article{CTT100751408,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  journal = {Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
  year = 2017,
}

@article{CTT100751410,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY},
  journal = {Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)},
  year = 2017,
}

@article{CTT100742124,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices},
  journal = {Microelectronic Engineering},
  year = 2017,
}

@article{CTT100742125,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures},
  journal = {Materials Letters},
  year = 2017,
}

@article{CTT100734738,
  author = {Sari Yanagida and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Tensile Tests of Micro-Specimens Made of Electroplated Gold},
  journal = {Microelectronics Engineering},
  year = 2017,
}

@article{CTT100736023,
  author = {Hao-Chun Tang and Chun-Yi Chen and Masaharu Yoshiba and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices},
  journal = {Journal of The Electrochemical Society},
  year = 2017,
}

@inproceedings{CTT100751725,
  author = {Keisuke Asano and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751724,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751723,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751721,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Strategies of Mechanical Strengthening in Electroplated  Au Materials},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751720,
  author = {Masato Sone and Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751718,
  author = {Tso-Fu Mark Chang and Haochun Tang and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751726,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780789,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Chun Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu and Shinichi Iida},
  title = {Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755527,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1mG Inertial Sensors by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751442,
  author = {Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751440,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751439,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100780791,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100751717,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755526,
  author = {大西  脩平 and 崔  容俊 and Makoto Ishida and Kazuaki Sawada and Hitoshi Ishii and Katsuyuki Machida and Kazuya Masu and 二階堂 靖彦 and Mitsumasa Saito and Shinichi Yoshida},
  title = {フォトゲート型蛍光センサを用いたレジオネラの蛍光観測},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755522,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {積層メタルMEMS慣性センサの長期振動特性評価},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755521,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755520,
  author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755519,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755518,
  author = {Kosuke Orihara and Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755389,
  author = {Tatsuya Koga and Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Inclining Angle Sensitivity Characteristics of MEMS Accelerometer Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755388,
  author = {Shouta Otobe and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Study of a Single Au Proof Mass and Segmented Electrodes for Tri-axis MEMS Accelerometer},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755334,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A capacitive sensor circuit based on relaxation oscillator for MEMS inertial sensors},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100754658,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753438,
  author = {Shouta Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745653,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745654,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100745655,
  author = {Masaharu Yoshiba and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test},
  booktitle = {MNE2017},
  year = 2017,
}

@inproceedings{CTT100751941,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A high-resolution capacitive sensor circuit for MEMS accelerometers},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752531,
  author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Tilt Sensor Using a High-Resolution MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752532,
  author = {Tatsuya Koga and Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Inclining Angle Sensitivity Characteristics of MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100752534,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {A Study of Long-Term Vibration Characteristics of MEMS Accelerometers Fabricated by Au Electroplating},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753335,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753404,
  author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100748741,
  author = {Ippei Tsuji and Motohiro Takayasu and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Study on a High-Resolution MEMS Tilt Sensor Fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100742158,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100748739,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {An evaluation of capacitive sensor circuit for MEMS accelerometers},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100742056,
  author = {Chun-Yi Chen and Hao-chun Tang and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components},
  booktitle = {SSI-21},
  year = 2017,
}

@inproceedings{CTT100742055,
  author = {Hao-chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers},
  booktitle = {SSI-21},
  year = 2017,
}

@inproceedings{CTT100744945,
  author = {Masato Sone and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu},
  title = {非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価},
  booktitle = {第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー},
  year = 2017,
}

@inproceedings{CTT100745680,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Koichiro Tachibana and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100743817,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100745676,
  author = {Motohiro Takayasu and Toshiaki Gonda and Toshifumi Konishi and Daisuke Yamane and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {人体振動測定のためのMEMS慣性センサを用いたモジュールの検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735375,
  author = {Chun-Yi Chen and Hao-Chun Tang and Masaharu Yoshiba and Tso-Fu Mark Chang and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735592,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices},
  booktitle = {IEEE-NEMS 2017},
  year = 2017,
}

@inproceedings{CTT100738774,
  author = {Daisuke Yamane and Toshifumi Konishi and Hiroshi Toshiyoshi and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu},
  title = {MEMS inertial sensors for biomedical applications},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735897,
  author = {Toshifumi Konishi and Daisuke Yamane and Teruaki Safu and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735890,
  author = {Katsuyuki Machida and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Tso-Fu Mark Chang and Kazuya Masu and Masato Sone},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735887,
  author = {Takuma Suzuki and Tso-Fu Mark Chang and Chun Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735888,
  author = {Takuma Suzuki and Tso-Fu Mark Chang and Chun Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100735889,
  author = {Tso-Fu Mark Chang and Toshifumi Konishi and Teruaki Safu and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu and Katsuyuki Machida},
  title = {積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100737044,
  author = {Toshiaki Gonda and Motohiro Takayasu and Daisuke Yamane and Hiroyuki Ito and Toshifumi Konishi and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Measurement-System using Vehicle-Control for Inertial Sensors},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100737043,
  author = {Motohiro Takayasu and Toshiaki Gonda and Daisuke Yamane and Hiroyuki Ito and Toshifumi Konishi and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A study of module using MEMS accelerometer by multi-layer metal technology},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100737042,
  author = {Tomoki Iizuka and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100735898,
  author = {Teruaki Safu and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
  title = {積層メタル技術による3軸MEMS加速度センサのばね定数設計方法},
  booktitle = {応用物理学会 2017年春季講演会},
  year = 2017,
}

@inproceedings{CTT100806087,
  author = {Onishi, S. and Joon, C. Y. and Ishida, M. and Sawada, K. and Ishii, H. and Katsuyuki Machida and Kazuya Masu and Nikaido, Y. and Saito, M. and Yoshida, S.},
  title = {Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-chip Biological Sensing},
  booktitle = {SEMICONDUCTOR PROCESS INTEGRATION 10},
  year = 2017,
}