@inproceedings{CTT100816737,
  author = {Haruki Iwatsuka and Takuya Hoshii and Iriya Muneta and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kuniyuki KAKUSHIMA},
  title = {Siを導入したHfO2のMIMキャパシタの容量特性},
  booktitle = {},
  year = 2018,
}